Integrated Circuit Manufacturing

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Nano & Micro Systems Institute of Physics 1) 12.3 Version of AutoMod is not working in Windows7 now! 2) Start amod.exe -> startscreen -> choose in menu "Model" -> „Open" -> look for folder ex001.arc file "model.amo" -> open => a warning appears, that from 200 possible elements 36 are already used => the simulation model with 9 rolling-dice-tools and the control window opens Presentation Institute of Physics Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 4
Nano & Micro Systems Institute of Physics Basic model: 9 tools, each tool rolls a dice Each tool has a queue, pictured by the box below the tool Starting conditions: the tools roll the dice every 2 seconds, the results are uniformly distributed numbers from 1 to 6, according to the dice result wafer from the startig queue are handed to the next tool Let us see: rightclick white area->Drawstyle-> as is -> click menu „Run“ -> „run model“ -> build the model ? -> yes -> the model will be compiled from the source code, the simulation screen is shown Presentation Institute of Physics Cick menu „control“ -> „continue“ -> the simulation starts. Rightclick->Drawstyle-> as is - The tools start rolling the dices (pips are red numbers below the tools) - The queues change - At the left side, values for WIP, CT and throughput are shown - With the simulated parameters (CT, WIP, TP) we can calculate the parameters for the operation curve (alpha, capa) and draw it - We change the tool‘s parameters (Waferstarts, time off line, batch sizes, ...) and try to achieve better operation curves End of first run - Click menu „control" -> „pause“ - Click menu „file“ -> „exit“ First run of the program Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 5
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Integrated Circuit Manufacturing

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