Design of LCOS Microdisplay Backplanes for Projection Applications

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I History of my research n November 1994 the thin-film-components-group (TFCG) started a small feasibility study on crystalline silicon based display systems. In those pioneering times of liquid-crystal-on-silicon (lcos), the design and manufacturing were indeed questionable. This small-scale experiment included basic possibilities for measurements and provided data about attainable pixel pitches and about the issue of light sensitivity of silicon. Time window of my research : November 1994 – December 2003 Start End List of projects 11/1994 09/1995 Internal feasability study 01/1995 1998… Internal – REFLEC 09/1997 03/2000 European – MOSAREL, EP25340 04/2000 12/2003 Bilateral – TMDC 04/2002 2005… European – LCOS4LCOS, IST_2001_34591 01/2004 08/2004 Incubation – GEMIDIS … 2003 09/2005 Writing my PhD Table of projects over the years Project Feasibility REFLEC x-Si IWT Sigma MOSAREL TMDC LCOS4LCOS Incubation Writing my PhD 94 95 96 97 98 99 00 01 02 03 04 Timeline of primary activities Soon after (beginning of 1995), a full microdisplay project (REFLEC) was born. The standard low-cost foundry process chosen implied the light shielding and top mirror layers had to be processed within laboratory’s clean-room. Assembly into a real display cell and the design and implementation of peripheral electronics also required a lot of precision and effort from a team of colleagues. Two years of chip design, assembly with peripherals and problem-solving allowed to finally reach the first milestone. It consists of a working microdisplay (august 1997) controlled through a personal computer. 05
In the mean time, the author worked on a project on SOI (silicon-on-insulator) based displays and on the Copernicus Sigma project. The purpose of the Sigma project is the development of ‘intelligent gas-sensors’. Next, the European Esprit-IV project MOSAREL (EP-25340) started: 270 times as many pixels as with the REFLEC project. Continued work showed off in march 2000: the consortium was able to see a projected 2560x2048 image. From an organizational and technical perspective, I learned most about silicon design during this project. Basically it allowed me to finetune the design procedures up to a high level of perfection. These successes led a Taiwanese business man to come along and to order a full microdisplay menu. Starting with XGA, development of SXGA and full HDTV formats were the future. This is the cooperation with the Taiwan Micro Display Corporation (tmdc), headed by Mr. L.Y. Tseng. In 2002, TFCG joined the LCOS4LCOS project led by Thomson Multimedia, France and financed by the EC. The last chapter introduces this work. For the LCOS4LCOS project, I did not perform the silicon implementations. My task here was to develop and simulate ‘smart pixel architectures’ – to allow for an implementation of a single-panel system. As such, IMECs’ participation to the project concerned the high-level design of the microdisplay chip. The last years also, a plan has been worked out to throw the GEMIDIS spin-off company into the real world (august 2004) of high-tech companies. My active research work effectively ended at the beginning of 2004. The first months of 2004, I actively participated in the creation of the company; the rest of the year I monitored Gemidis’s first chip design and the LCOS4LCOS project (on a distance) and finally started writing my thesis. Since december 2005 I am with the DSL Experts Team of Alcatel Bell in Antwerp, Belgium.
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Design of LCOS Microdisplay Backplanes for Projection Applications

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