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Stanford (Manchester)<br />
<strong>3D</strong> electrode configurations<br />
Design and fabrication by:<br />
J. Hasi, Manchester<br />
C. Kenney, MBC at CIS-Stanford<br />
50 µm<br />
50 µm<br />
50 µm<br />
2E<br />
400 µm<br />
p 103µm<br />
Vfd ~20V<br />
3E<br />
400 µm<br />
4E<br />
n<br />
n<br />
p<br />
71 µm<br />
Vfd ~8V<br />
400 µm<br />
p<br />
Vfd ~5V<br />
n<br />
56 µm<br />
Thickness <br />
p-type substrate 12kΩcm<br />
Baby-2E Baby-3E<br />
Financial support:<br />
STFC-UK for the FP420 project<br />
DOE, USA for ATLAS Upgrade<br />
10 wafers competed. Yield~80% (1 wafer)<br />
Atlas chip<br />
picture from<br />
Bekerle<br />
Vertex03<br />
ATLAS <strong>pixel</strong> chip<br />
7.2 x 8 mm 2<br />
2880 <strong>pixel</strong>s
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