- RMA 5 pol - Mikroskop Technik Rathenow Gmbh

10.5. Depth measurement
10.5.1 Depth measurement (z-axis) with the
combination drive is done by reading the scale
on the drive knob during fine focussing between
the two or more certain object levels. The scale
is divided into 100 units. When the fine drive is
used One graduation mark equals 2,8 µm. The
range of depth measurement with combination
drive is 0,288 mm.
To avoid measuring errors caused by the
reversal error of the drive (combination and
coaxial coarse and fine drive) just measure the
object points (object levels) from only one
direction.
10.5.2 Depth measurement with the coaxial
coarse and fine drive is almost the same as with
the combination drive. The scale is divided into
50 units. When the fine drive is used one
graduation mark equals 2,0 µm. The range of
depth measurement with coaxial is limited to
adjustable range of coarse drive (20 mm).
10.5.2 Depth measurement can also be done
with help of a analogue or digital dial indicator
gauge which is mounted on the side. The gauge
sensor cone is connected to the stage.
pic. 23: indicator gauge for depth measurement
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