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MAY 2011 issue n°112<br />

THE DISRUPTIVE SEMICONDUCTOR TECHNOLOGIES MAGAZINE<br />

MEMS<br />

<strong>Microvision</strong> <strong>establishes</strong> <strong>first</strong> <strong>global</strong> R&D <strong>center</strong> <strong>in</strong> S<strong>in</strong>gapore<br />

From page 1<br />

By collaborat<strong>in</strong>g with NTU, MicroVision aims<br />

to leverage the university's strength and<br />

expertise <strong>in</strong> Eng<strong>in</strong>eer<strong>in</strong>g, Microelectronics<br />

and Materials Science to conduct jo<strong>in</strong>t research and<br />

development with faculty and students.<br />

MicroVision's dedicated R&D <strong>center</strong> <strong>in</strong>cludes a<br />

customized laboratory at NTU's Innovation Centre.<br />

The company will work directly with NTU's School of<br />

Electrical and Electronic Eng<strong>in</strong>eer<strong>in</strong>g and the<br />

Division of Physics and Applied Physics.<br />

NTU has established strong <strong>in</strong>dustry partners<br />

<strong>in</strong>clud<strong>in</strong>g Rolls-Royce, Robert Bosch, Thales, and<br />

Toray. Like MicroVision, these lead<strong>in</strong>g companies<br />

chose to set up research facilities at NTU, where they<br />

collaboratively work with NTU faculty and students<br />

to pursue their respective research <strong>in</strong>terests.<br />

www.microvision.com<br />

DelfMEMS successfully delivered custom RF MEMS samples to NTT DOCOMO<br />

DelfMEMS has provided arrays of custom MEMS ohmic switches to enable tunability <strong>in</strong>to Radio-Frequency front-end<br />

modules -FEM- for mobile applications.<br />

Voltage, size, losses, isolation, ultra-fast<br />

switch<strong>in</strong>g time and power handl<strong>in</strong>g will be<br />

evaluated by the <strong>in</strong>novative telecom operator<br />

accord<strong>in</strong>g to the requested specifications until 6 GHz.<br />

DelfMEMS is sett<strong>in</strong>g-up an open technology platform<br />

to propose a new <strong>in</strong>tegrated micro-mechanical<br />

build<strong>in</strong>g block that is based on a strong, totally new<br />

IP portfolio that solves past issues of RF MEMS ohmic<br />

switches. MEMS switch is considered as the optimum<br />

RF switch<strong>in</strong>g technology that drastically decreases<br />

power consumption and bill of material by m<strong>in</strong>imiz<strong>in</strong>g<br />

losses between the antenna and active devices of a<br />

FEM.<br />

www.delfmems.com<br />

Lemoptix MEMS micromirrors replace galvanometer and rotat<strong>in</strong>g mirrors<br />

Optical MEMS scann<strong>in</strong>g micromirrors much smaller, much faster, much more robust and much less power<br />

consum<strong>in</strong>g than conventional optical scann<strong>in</strong>g systems.<br />

Lemoptix silicon-based, magnetically actuated<br />

MEMS micromirror technologies are best <strong>in</strong><br />

class replacement solutions to traditional<br />

galvanometer and rotat<strong>in</strong>g mirrors, br<strong>in</strong>g<strong>in</strong>g<br />

outstand<strong>in</strong>g performance and space reduction.<br />

Respond<strong>in</strong>g to <strong>in</strong>dustry requests to significantly<br />

reduce size, power consumption and <strong>in</strong>creased<br />

performance of micromirror devices, Lemoptix has<br />

developed a bottom-up approach by us<strong>in</strong>g semiconductor-like<br />

equipment to build micromirrors with<br />

actuation based on magnetic and heat-dissipat<strong>in</strong>g<br />

pr<strong>in</strong>ciples <strong>in</strong>stead of gear<strong>in</strong>gs.<br />

Lemoptix LSCAN laser scann<strong>in</strong>g micromirrors are<br />

<strong>in</strong>tegrated by OEM customers <strong>in</strong>to a number of<br />

immediately available applications like optical<br />

spectrometers, laser range f<strong>in</strong>ders and microscopes,<br />

enhanc<strong>in</strong>g performances and enabl<strong>in</strong>g the<br />

development of smaller, higher resolution and lower<br />

cost products. Lemoptix’ resonant and static<br />

scann<strong>in</strong>g micromirrors are designed to rotate and<br />

deflect light and can be used <strong>in</strong> a myriad of optical<br />

applications due to the unique comb<strong>in</strong>ation of<br />

performance and size.<br />

www.optoiq.com<br />

LSCAN-F series (Resonant) (Courtesy of Lemoptix)<br />

Copyrights © Yole Développement SA. All rights reserved - Recycled paper<br />

Okmetic <strong>in</strong>creases SOI wafer production capacity <strong>in</strong> Vantaa and specifies<br />

long-term f<strong>in</strong>ancial objectives<br />

Okmetic's board of directors has approved plans to <strong>in</strong>crease the group's silicon-on-<strong>in</strong>sulator (SOI) wafer production<br />

capacity by extend<strong>in</strong>g the Vantaa plant.<br />

The around 30 million euro <strong>in</strong>vestment <strong>in</strong>cludes<br />

the plant extension and different k<strong>in</strong>ds of<br />

production equipment. This <strong>in</strong>vestment,<br />

together with the on-go<strong>in</strong>g SOI equipment<br />

<strong>in</strong>vestments, more than triples the Vantaa plant's<br />

current SOI wafer production capacity. Along with the<br />

grow<strong>in</strong>g production amounts, new equipment and<br />

process development, improved productivity is be<strong>in</strong>g<br />

aimed at. At the same time, improvement of SOI<br />

wafers' performance cont<strong>in</strong>ues <strong>in</strong> order to ensure<br />

customers' competitiveness.<br />

The <strong>in</strong>vestment will be carried out ma<strong>in</strong>ly <strong>in</strong> 2011-<br />

2013. The build<strong>in</strong>g of the Vantaa plant extension will<br />

start <strong>in</strong> autumn 2011. The surface area of the<br />

extension is 2,420 m2, approximately a quarter of<br />

which is for clean room facilities. The extension is<br />

due to be complete <strong>in</strong> the end of 2012, after which it<br />

will be taken <strong>in</strong>to production use <strong>in</strong> stages, follow<strong>in</strong>g<br />

the growth of the market demand.<br />

The aim is that the <strong>in</strong>vestment will be covered ma<strong>in</strong>ly<br />

with cash flow from operations, and no need for<br />

significant loan f<strong>in</strong>anc<strong>in</strong>g is foreseeable.<br />

SOI wafers are used for demand<strong>in</strong>g MEMS sensors<br />

and HV applications whose markets have <strong>in</strong>creased<br />

year by year. It is estimated that the markets cont<strong>in</strong>ue<br />

to grow as automotive electronics, consumer<br />

electronics as well as <strong>in</strong>dustrial process control<br />

<strong>in</strong>crease. Sensor applications <strong>in</strong>crease especially <strong>in</strong><br />

consumer products such as smart phones, cameras,<br />

game consoles and <strong>in</strong> other portable devices.<br />

This newly made <strong>in</strong>vestment decision supports<br />

Okmetic's long-term strategy and growth objectives,<br />

strengthens company's market leadership as the<br />

supplier of demand<strong>in</strong>g sensor wafers and enables<br />

<strong>in</strong>crease of market share <strong>in</strong> SOI wafers.<br />

www.reuters.com<br />

8

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