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Why Silicon Photonics? - Institute of Microelectronics - A*Star

Why Silicon Photonics? - Institute of Microelectronics - A*Star

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Cover<br />

Story<br />

the optical mode within the core <strong>of</strong> the Si<br />

waveguide so as to prevent leakage into<br />

the underneath Si substrate.<br />

Performance Metrics <strong>of</strong> Waveguided<br />

Ge Photodetector<br />

Figure 4(a) examines the current-voltage<br />

characteristics <strong>of</strong> the VPD and LPD<br />

detectors under dark and illumination<br />

conditions. Excellent rectifying<br />

characteristics were demonstrated in<br />

both the detectors, showing a forwardto-reverse<br />

current ratio <strong>of</strong> ~4 orders <strong>of</strong><br />

magnitude. For a given applied bias <strong>of</strong><br />

−1.0V, the dark current (I dark<br />

) in a VPD<br />

was measured to be ~0.57μA (or ~0.7nA/<br />

μm 2 ), which is below the typical 1.0μA<br />

generally considered to be the upper limit<br />

for high speed receiver design. On the<br />

other hand, the dark current performance<br />

in a LPD showed a much higher I dark<br />

value<br />

<strong>of</strong> ~3.8μA (or ~1.9nA/μm 2 ).<br />

the VPD and LPD detectors achieved a<br />

comparable photocurrent level at high<br />

applied biases beyond -1.0V. Figure<br />

4(b) compares the responsivity <strong>of</strong> the<br />

detectors as a function <strong>of</strong> the applied<br />

voltages. It is interesting to note that<br />

the vertical PIN detector demonstrated<br />

a lower responsivity as compared to the<br />

lateral PIN detector for biases below−0.5<br />

V. This could possibly be due to an<br />

enhanced carrier recombination process<br />

at the high density <strong>of</strong> defect centres near<br />

the Ge-Si heterojunction. This is set to<br />

compromise the absolute photocurrent<br />

value <strong>of</strong> a vertical PIN detector under low<br />

field influence. For an applied bias larger<br />

than −1.0 V, a comparable responsivity<br />

was measured for both the vertical and<br />

lateral PIN detectors. Despite that the<br />

metallurgical junction is separated by<br />

merely 0.8μm, a lateral PIN detector also<br />

showed a high absolute responsivity <strong>of</strong><br />

~0.9 A/W.<br />

compared to that <strong>of</strong> LPD detector with<br />

a slightly larger FWHM <strong>of</strong> ~28.9ps.<br />

This could be attributed to the smaller<br />

depletion layer width design in a VPD<br />

detector which reduces the carrier transit<br />

time. The FWHM pulse width is related<br />

to the bandwidth and can be used as a<br />

metric to gauge the speed performance <strong>of</strong><br />

the detectors. The theoretical modelling<br />

results <strong>of</strong> the RC-time constant and the<br />

transit-time bandwidth are also plotted<br />

in Figure 5(b). Reducing the depletion<br />

spacing could be exploited to enhance<br />

the transit-time bandwidth performance<br />

significantly, but it could impose concern<br />

for a degraded RC-time bandwidth. To<br />

overcome such trade-<strong>of</strong>f, one could scale<br />

the detector’s optical absorption length<br />

to achieve lower device capacitance for<br />

enabling bandwidth improvement.<br />

Industry Collaborations and MPW<br />

Services<br />

In order to compare the sensitivity<br />

performance between the VPD and LPD,<br />

optical measurements were performed<br />

by injecting an incident photon with<br />

a wavelength <strong>of</strong> 1550nm into the SOI<br />

micro-waveguide. The typical optical<br />

propagation loss in our SOI microwaveguide<br />

under TE polarization mode<br />

is ~2dB/cm. No coupler was integrated<br />

with the Si waveguide and the incidence<br />

light was coupled through a single mode<br />

lensed fiber directly into the Si nano-taper.<br />

For an incident light power <strong>of</strong> ~300μW,<br />

optical measurements showed that both<br />

To investigate the factors affecting the<br />

speed performance <strong>of</strong> the VPD and LPD<br />

detectors used in this study, impulse<br />

response measurements were performed<br />

at a photon wavelength <strong>of</strong> 1550nm. A<br />

pulsed laser source having a 80fs pulse<br />

width was used in the measurements.<br />

Both the detectors were characterized<br />

using microwave probes and the impulse<br />

responses were captured with a high<br />

speed sampling oscilloscope. Figure<br />

5(a) shows that a VPD detector achieved<br />

a smaller full-width-at-half-maximum<br />

(FWHM) pulse width <strong>of</strong> ~24.4ps as<br />

Figure 4: (a) The current-voltage characteristics <strong>of</strong> the VPD and LPD detectors measured under dark<br />

and illumination conditions. (b) Responsivity as a function <strong>of</strong> applied voltages for both the VPD and LPD<br />

detectors measured at a wavelength <strong>of</strong> 1550nm.<br />

Since the inception <strong>of</strong> silicon photonics<br />

program in 2006, the <strong>Institute</strong> <strong>of</strong><br />

<strong>Microelectronics</strong> (IME) has been<br />

actively engaged with industry partners<br />

in developing and prototyping high<br />

performance optical components and<br />

photonics integrated circuits. Such<br />

prototyping services can be divided into<br />

two categories - Multi-Project-Wafer<br />

(MPW) prototyping and customized<br />

prototyping, both <strong>of</strong> which <strong>of</strong>fer high-end<br />

fabrication services at a cost affordable<br />

to research groups and companies.<br />

MPW prototyping works on the principle<br />

<strong>of</strong> combining designs from various<br />

users on shared masks, sharing a large<br />

fraction <strong>of</strong> the process cost among the<br />

users. On the other hand, many <strong>of</strong> IME’s<br />

existing partners welcome the flexibility<br />

that customized prototyping <strong>of</strong>fers. To<br />

shorten the development life-cycle, IME<br />

also provides a host <strong>of</strong> both active and<br />

passive baseline photonic devices in its<br />

design libraries. Fabrication is performed<br />

using standard CMOS processes in its<br />

200 mm R&D foundry, which facilitates<br />

quick technology transfers to commercial<br />

foundries for mass production. The<br />

service has proven to be a boost for users<br />

- fabless companies and research groups.<br />

An excellent example <strong>of</strong> a company<br />

which has benefited from this service<br />

6 <strong>Institute</strong> <strong>of</strong> <strong>Microelectronics</strong>

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