Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products

Typical Applications for VacIon Plus Pumps
• Varian offers a full range of pumps, from 0.4 l/s up to
500 l/s, as well as combination and custom pumps so
analytical system designers can meet all their vacuum
requirements from one supplier.
• 50 years of ion pump experience makes Varian uniquely
qualified to supply customized solutions for special
applications.
Nanotechnologies
• Varian`s line of high performance VacIon ion pumps are
well suited for the vacuum requirements of Transmission
Electron Microscopes (TEM), Scanning Electron
Microscopes (SEM), Focused Ion Beam (FIB) and
Surface Analysis equipments.
• Varian is the only manufacturer to offer
SEM application specific ion pumps.
• The Diode SEM pump with its extremely
low leakage current is ideal for the gun section of the
column.
• The StarCell® pump elment with its unique design is the
ideal solution for the high pressure operation of the
columns. StarCell is also the best pump for noble gases or
hydrogen.
• Varian completes its offering to the microscope
manifacture with a full line of controller/power supplies
including the low cost power supplies and the full feature,
multiple controllers.
• With the addition of Varian complete line of turbo pumps –
ideal for sample chamber vacuum requirements – and
roughing pumps, Varian can supply all the vacuum
components required for electron microscopes.
Supply Chain Partner
Carl Zeiss SMT AG
• Carl Zeiss SMT, global leader in light, electron and ion-optical
technologies for industry and R&D, has designated Varian
Vacuum Technologies as a Carl Zeiss SMT Supply Chain
Partner.
Industrial Vacuum Processes
Supply Chain Partner
Carl Zeiss SMT AG
Different applications in industrial sectors such as
telecommunication, defense, medical and others make use
of VacIon pumps to process and maintain essential
components under vacuum. Most of the core equipment in
these sectors requires the use of different electron
devices including:
• Microwave tubes and devices
• Power grid tubes
• X-ray imaging tubes and devices
• X-ray sources
In the processing cycle of these types of electron
devices, small ion pumps from 8 l/s to 50 l/s are
being used. Special tube sizes or special applications
may require even bigger ion pumps up to 300-500
l/s. VacIon pumps are often being used in
combination with Turbo Molecular Pumps, backing
pumps and other components out of the wide
range of Varian products.
After processing, frequently these electron devices
are being equipped with so-called appendage ion pumps in
the range of 0.2 l/s to 8 l/s for the purpose of maintaining the
electron tube under vacuum for its operational lifetime.
The first ion pump was invented by Varian in the late 1950’s,
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