Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products

Ion Pump Features and Benefits
Ion Pump Evolution
• Since the late 1950’s, when the ion pump was invented at
Varian, many changes and technical improvements have
taken place. Virtually all of the major innovations have
come from Varian, from the first Diode VacIon pump
to the Triode, then to the StarCell® series pumps,
and the VacIon Plus.
VacIon Plus
• VacIon Plus is a complete family of ion pumps, controllers,
options, and accessories, designed to provide solutions to
every application. Parameters such as operating pressure,
the gas mixture to be pumped, the starting pressure, etc.
can vary so dramatically that Varian decided to develop
dedicated ion pump solutions (including controllers and all
other accessories) for different applications.
• The VacIon Plus family includes Diode, Noble Diode, and
StarCell® pump versions that allow Varian to provide the
best technology for each field of application. The family is
complemented by the MiniVac and Dual Ion Pump
controllers, that provide different power levels and
interface capabilities.
Titanium Sublimation Combination
Pumps (TSP)
• The titanium sublimation creates extra high getterable gas
pumping speed while the ion pumping mechanisms handle
the non-getterable gases such as argon and methane.
The combination pump includes the cylindrical cryopanel
and TSP source mounted to the extra port.
Customized pump configurations are also available.
Application Specific Solutions
for SEM:
a complete line of ion getter pumps
dedicated to Electron Microscopy.
Element Cells and Insulators
• Cells’ sizes and geometries are
optimized in order to:
- maximize the discharge intensity
- maximize the pumping speed.
• The special design of the ceramic
insulators allows:
- no buildup of sputtered
conductive coating
- longer pump life.
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