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Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products

Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products

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<strong>Ion</strong> <strong>Pumps</strong><br />

Dedicated Magnetic Stray Shields<br />

• External magnetic shields<br />

for stray magnetic field<br />

reduction available.<br />

New Feedthrough and New Cables<br />

• New HV Safety Interlock prevents<br />

any chance of electrical shock.<br />

• The voltage is automatically cut off<br />

as soon as the cable is<br />

disconnected from the pump.<br />

• Safer pump operation.<br />

Dedicated Heaters<br />

• Dedicated Heater for every<br />

pump size.<br />

• The new heaters are designed to<br />

perform a more effective pump<br />

baking.<br />

• Lower power and operational costs.<br />

Optical Baffle<br />

Buit-in Optical Baffle (optional) for:<br />

• Minimized particle emission.<br />

• Minimum conductance reduction.<br />

• Total column protection.<br />

• Maximum e-gun life.<br />

<strong>Ion</strong><br />

<strong>Pumps</strong><br />

Higher Pumping Speed<br />

• Optimized magnetic circuit for max.<br />

performance in a very compact<br />

package.<br />

• Faster pump down.<br />

IPCU3 / IPCU 2 Power Supplies<br />

Two versions available: 3 or 2 supply<br />

channels.<br />

• Special low noise electronics for<br />

better SEM imaging.<br />

• Battery backup (optional):<br />

up to 30 days 24/7 of battery life.<br />

• Pressure reading down to –10 range.<br />

• Optional display and front panel.<br />

Available in Round Shape<br />

Integrated ion pump/column allows:<br />

• Optimum mass balancing.<br />

• Improved pumping conductance.<br />

• Compact and modular design.<br />

• Simmetric weight distribution for<br />

rugged column integration.<br />

Battery Power Supply<br />

• Enables service without breaking<br />

vacuum.<br />

• Allows for column shipping under<br />

vacuum.<br />

<strong>Varian</strong>, <strong>Inc</strong>. <strong>Vacuum</strong> <strong>Technologies</strong><br />

7

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