Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products
Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products
Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products
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Titanium Sublimation <strong>Pumps</strong> and Controllers<br />
TSP Cartridge<br />
Outline Drawing<br />
3 TITANIUM<br />
SUBLIMATION<br />
FILAMENT<br />
130.4 (5.13) REF<br />
3/4<br />
2 " O.D.<br />
STAINLESS STEEL<br />
GROUND ROD<br />
Titanium sublimation pumps (TSPs) are typically used as an<br />
effective way to pump getterable gases such as hydrogen and<br />
nitrogen in UHV systems. TSPs are often combined with ion<br />
pumping, since the ion pump is effective with non-getterable<br />
UHV gases such as argon and methane. The TSP can be added<br />
to the inside of the ion pump, or as a separate pumping unit.<br />
If the TSP is used in conjunction with a liquid nitrogen-cooled<br />
cryopanel, extra high water pumping speed will be achieved.<br />
<strong>Varian</strong> offers two different types of titanium sublimation<br />
pumps: filament and titanium ball sources. Filament-type TSP<br />
sources are most popular with UHV systems since they can be<br />
turned off between sublimations and thus do not add<br />
thermally-induced outgassing. The ball-type sources contain<br />
larger amounts of titanium which means longer life when<br />
operated under conditions that use more titanium, such as<br />
higher operating pressures. However, the ball sources require<br />
standby power between sublimations to prevent cracks from<br />
forming in the titanium ball.<br />
The factors affecting titanium sublimation pumping<br />
efficiency include sublimation rate, frequency, surface area,<br />
and temperature. Sublimation pumping speed is generally a<br />
constant value below 10 -7 mbar.<br />
281.9 (11.10) REF<br />
324.3 (12.77) REF<br />
Dimensions: millimeters (inches)<br />
TSP Cartridge Filament Source<br />
The popular TSP cartridge is provided on a 2 3 ⁄ 4 ” OD ConFlat®<br />
flange and contains three titanium-molybdenum filaments,<br />
each with 1.1 grams of usable titanium. The cartridge<br />
assembly is bakeable to 400° C. Maximum sublimation is<br />
achieved at 300 watts of source power.<br />
Usable Titanium (per filament)<br />
Total Usable<br />
Operating Range<br />
Mini Ti-Ball<br />
MINI TI-BALL<br />
SOURCE ASSEMBLY<br />
Technical Specifications<br />
Outline Drawing<br />
MINI TI-BALL<br />
SOURCE HOLDER<br />
1.1 grams<br />
3.3 grams<br />
10 -4 to 10 -12 mbar<br />
3/4<br />
2 " O.D. CFF<br />
(NW35)<br />
21.3 (.84) REF<br />
61.4 (2.42) REF<br />
185.6 (7.31) REF<br />
41.1 (1.62) REF<br />
Dimensions: millimeters (inches)<br />
Mini Ti-Ball Source<br />
The Mini Ti-Ball source provides 15.2 grams of usable<br />
titanium and is mounted on a 2 3 ⁄ 4 ” OD ConFlat® flange.<br />
Maximum sublimation is achieved at 300 watts of source<br />
power, while the Standby power requirement is 100 watts.<br />
Usable Titanium<br />
Operating Range<br />
Technical Specifications<br />
15.2 grams<br />
10 -4 to 10 -12 mbar<br />
36
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