Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products
Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products
Ion Pumps Varian, Inc. Vacuum Technologies - Ideal Vacuum Products
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Vac<strong>Ion</strong> Plus Combination <strong>Pumps</strong><br />
Outline Drawing<br />
Vaclon Plus 150 Combination Pump (side-mounted TSP)<br />
6" O.D. CFF (NW100)<br />
123.50 (4.86) REF<br />
337.80 (13.30) REF<br />
100.00 (3.94) REF<br />
1/2"-20 2B<br />
25.00 (.98) REF<br />
245.50 (9.67) REF<br />
170.00 (6.69) REF<br />
205 (8.07) REF<br />
124.35<br />
(4.90) REF 200 (7.87) REF 272.50 (10.73) REF<br />
Dimensions:<br />
millimeters (inches)<br />
Titanium Sublimation Combination <strong>Pumps</strong><br />
• <strong>Ion</strong>-Sublimation combination pumps have been a popular<br />
choice for many years for creating ultra high vacuum<br />
environments. The titanium sublimation creates extra high<br />
getterable gas pumping speed while the ion pumping<br />
mechanisms handle the non-getterable gases such as<br />
argon and methane.<br />
• This combination pump is a Vac<strong>Ion</strong> Plus 150, 300, or 500<br />
with an extra side or bottom-mounted 8” ConFlat® port.<br />
The combination pump includes the cylindrical cryopanel<br />
and TSP source mounted to the extra port. Getterable gases<br />
enter the end of the cylindrical cryopanel and are pumped<br />
by being combined with the freshly-deposited titanium<br />
there. Liquid nitrogen cooling the cryopanel increases the<br />
efficiency of the gettering process and adds greatly to the<br />
water pumping speed.<br />
• The <strong>Varian</strong> Vac<strong>Ion</strong> Plus series combination pumps allow<br />
addition of a cryopanel from the bottom of the pump or<br />
from the side. This can be a significant advantage in<br />
situations where height restrictions are present.<br />
Customized pump configurations are also available.<br />
Vaclon Plus 300 Combination Pump (side-mounted TSP)<br />
348.65 (13.73) REF<br />
55.45<br />
(2.18) REF<br />
123.50<br />
(4.86) REF<br />
N∞4 HOLES Ø1/2"-20 UNC<br />
449.92 (17.71) REF<br />
8" O.D. CFF (NW150)<br />
130 (5.12) REF<br />
170<br />
(6.69) REF<br />
244.45<br />
(9.62) REF<br />
148.50<br />
(5.85) REF<br />
124.35<br />
(4.90) REF<br />
Dimensions: millimeters (inches)<br />
Vaclon Plus 500 Combination Pump (side-mounted TSP)<br />
8" O.D. CFF (NW150)<br />
Technical Specifications<br />
Nominal net pumping speed at 20°C (l/s) with StarCell®<br />
elements (water cooled cryopanel)<br />
Vac<strong>Ion</strong> Plus 150 N 2 – 610<br />
H 2 – 1,380<br />
Vac<strong>Ion</strong> Plus 300 N 2 – 720<br />
H 2 – 1,580<br />
Vac<strong>Ion</strong> Plus 500 N 2 – 880<br />
H 2 – 1,930<br />
525 (20.67) REF<br />
367.95 (14.49) REF<br />
450 (17.72) REF<br />
297 (11.69) REF<br />
142<br />
(5.59) REF<br />
124.35<br />
(4.90) REF<br />
For cryopanel specifications, refer to pages 37-38.<br />
Dimensions: millimeters (inches)<br />
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