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Graphene-on-SiC - ISOM

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200mm GaN-<strong>on</strong>-Si Batch Reactor<br />

5x200mm<br />

AIX G5+<br />

AIX G5+ for GaN-<strong>on</strong>-Si<br />

■ Dedicated technology package<br />

■ Compatible with the AIX G5 HT platform<br />

■ Enables Si-style mass manufacturing<br />

■ Builds <strong>on</strong> planetary technology:<br />

Excellent and symmetric uniformities,<br />

c<strong>on</strong>trolled bow behavior,<br />

using standard Si substrates.<br />

AIXTRON SE · info@aixtr<strong>on</strong>.com · www.aixtr<strong>on</strong>.com

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