Graphene-on-SiC - ISOM

CS INDUSTRY AWARDS WINNERS
CS INNOVATION AWARD
Winner: Ferrotec - Temescal Division
For: Auratus Deposition Enhancement Methodology
Richard Stevenson,
Editor, congratulates
Gregg Wallace,
Managing Director
AurAtus is a proprietary optimization
methodology for lift-off electron beam evaporation
that incorporates patent pending technology
to achieve unprecedented levels of uniformity
precision and collection efficiency.
Auratus enables temescal customers to coat
wafers with near perfect uniformity resulting in
more consistent better quality products and fewer
defects. temescal’s Auratus methodology also
has the capability to increase effective deposition
rates enabling customers to increase throughput.
temescal’s Auratus process enhancement
methodology is available on select temescal
systems.
temescal, an expert of metallization systems for
the processing of compound semiconductor
substrates provides the finest production
evaporation systems available. temescal systems
provide controlled multi-layer coatings of materials
such as ti Pt Au Pd Ag Ni Al Cr Cu Mo sn siO2
and ItO with highly repeatable and guaranteed
uniformity.
For over a decade temescal has been dedicated
to mapping and better understanding the
dynamics of the flux cloud. through extensive
testing and research we have collected hundreds
of vapour cloud maps and used these maps
to advance and automate the process of lift-off
uniformity mask design.
What industry challenge does this address?
At the heart of every electron beam evaporation
system is a unique yet repeatable vapour cloud of
flux distribution. It conforms to the characteristics
of radiation from a point source. However, each
of these flux clouds vary based on material
characteristics and a variety of other deposition
process factors — like deposition power, the use
of a crucible liner, crucible size and beam spot
focus.
Precision lift-off coating in a conventional box
coater is often inefficiently optimized for these
flux clouds. the use of results in an excessive
consumption of process metals. Auratus solves
this problem optimizing process tooling to the
vapour cloud improving efficiency and reducing
waste.
© 2013 Angel Business Communications.
Permission required.
Richard Stevenson, Editor, of
Compound Semiconductor commented:
“The price of gold has shot up in the last few years.
However, thanks to Ferrotec, this hike in costs
can by combated by improvements to deposition
efficiency.”
36 www.compoundsemiconductor.net April/May 2013