Graphene-on-SiC - ISOM
Graphene-on-SiC - ISOM
Graphene-on-SiC - ISOM
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
CS INDUSTRY AWARDS WINNERS<br />
METROLOGY, TEST AND MEASUREMENT AWARD<br />
Winner: Jordan Valley Semic<strong>on</strong>ductors Ltd<br />
For: QC3 Fast HRXRD Metrology Tool<br />
Richard Stevens<strong>on</strong>, Editor,<br />
c<strong>on</strong>gratulates Paul Ryan,<br />
UK Site Manager<br />
tHE QC3 High-resoluti<strong>on</strong> X-ray Diffractometer<br />
(HrXrD) from Jordan Valley is a true leapfrog<br />
technology over the existing HrXrD technology<br />
within the market. the QC3 boasts more than<br />
an order-of-magnitude improvement in<br />
performance compared to other HrXrD<br />
systems, with scans taking sec<strong>on</strong>ds rather than<br />
minutes or even hours.<br />
this provides LED manufacturers a dramatic<br />
improvement in quality c<strong>on</strong>trol of LED devices,<br />
with more wafers and higher sampling within<br />
wafers possible.<br />
the development and market launch of QC3<br />
dem<strong>on</strong>strates the success of JVs’ 2008<br />
acquisiti<strong>on</strong> of Bede’s HrXrD and compound semi<br />
technology.<br />
Furthermore, it reinforces JVs management’s<br />
ability to apply its business model and expertise<br />
in providing the semic<strong>on</strong>ductor market with<br />
enabling, high-throughput systems with low costof-ownership,<br />
achieving market dominance with a<br />
valued, customer-preferred product.<br />
Features and benefits:<br />
Productivity and Precisi<strong>on</strong>: the QC3 has a<br />
dedicated and optimised HrXrD system for<br />
LED quality c<strong>on</strong>trol. As a result of its high intensity,<br />
the system gives higher precisi<strong>on</strong> and throughput<br />
compared to other HrXrD systems.<br />
Automati<strong>on</strong>: the system operates with fullyautomated<br />
alignment, measurement and analysis<br />
of wafers, c<strong>on</strong>ducting batch wafer measurements<br />
with opti<strong>on</strong>al robot or multi-sample plates. the<br />
multi-sample plates allow up to 20 wafers to be<br />
loaded into the system for measurement without<br />
requiring a robot.<br />
For the automated analysis of the data spectra,<br />
the QC3 uses tried and trusted industry-leading<br />
rADs software for automated analysis which<br />
will automatically analyse the collected data and<br />
report the results for specific wafers, batches,<br />
chambers. this reporting can be extended to host<br />
reporting if required.<br />
Ec<strong>on</strong>omy: QC3 incorporates XrGProtect, to<br />
ensure the tube lifetime is maximised. It also<br />
has an Eco-mode; ensuring system power<br />
c<strong>on</strong>sumpti<strong>on</strong> is reduced when there is no<br />
measurement being performed.<br />
Simplicity and Reliability: the system is so<br />
reliable and easy to use, that no expert is required<br />
to operate the system.<br />
© 2013 Angel Business Communicati<strong>on</strong>s.<br />
Permissi<strong>on</strong> required.<br />
Richard Stevens<strong>on</strong>, Editor of<br />
Compound Semic<strong>on</strong>ductor comments:<br />
“X-ray diffracti<strong>on</strong> is an essential characterizati<strong>on</strong><br />
tool in many fabs. With many diffractometers,<br />
this process can take hours, holding back fab<br />
throughput. But that’s not the case with the<br />
QC3 High-Resoluti<strong>on</strong> X-Ray Diffractometer from<br />
Jordan Valley, which can scan wafers in a<br />
matter of sec<strong>on</strong>ds.”<br />
38 www.compoundsemic<strong>on</strong>ductor.net April/May 2013