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Graphene-on-SiC - ISOM

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CS INDUSTRY AWARDS WINNERS<br />

METROLOGY, TEST AND MEASUREMENT AWARD<br />

Winner: Jordan Valley Semic<strong>on</strong>ductors Ltd<br />

For: QC3 Fast HRXRD Metrology Tool<br />

Richard Stevens<strong>on</strong>, Editor,<br />

c<strong>on</strong>gratulates Paul Ryan,<br />

UK Site Manager<br />

tHE QC3 High-resoluti<strong>on</strong> X-ray Diffractometer<br />

(HrXrD) from Jordan Valley is a true leapfrog<br />

technology over the existing HrXrD technology<br />

within the market. the QC3 boasts more than<br />

an order-of-magnitude improvement in<br />

performance compared to other HrXrD<br />

systems, with scans taking sec<strong>on</strong>ds rather than<br />

minutes or even hours.<br />

this provides LED manufacturers a dramatic<br />

improvement in quality c<strong>on</strong>trol of LED devices,<br />

with more wafers and higher sampling within<br />

wafers possible.<br />

the development and market launch of QC3<br />

dem<strong>on</strong>strates the success of JVs’ 2008<br />

acquisiti<strong>on</strong> of Bede’s HrXrD and compound semi<br />

technology.<br />

Furthermore, it reinforces JVs management’s<br />

ability to apply its business model and expertise<br />

in providing the semic<strong>on</strong>ductor market with<br />

enabling, high-throughput systems with low costof-ownership,<br />

achieving market dominance with a<br />

valued, customer-preferred product.<br />

Features and benefits:<br />

Productivity and Precisi<strong>on</strong>: the QC3 has a<br />

dedicated and optimised HrXrD system for<br />

LED quality c<strong>on</strong>trol. As a result of its high intensity,<br />

the system gives higher precisi<strong>on</strong> and throughput<br />

compared to other HrXrD systems.<br />

Automati<strong>on</strong>: the system operates with fullyautomated<br />

alignment, measurement and analysis<br />

of wafers, c<strong>on</strong>ducting batch wafer measurements<br />

with opti<strong>on</strong>al robot or multi-sample plates. the<br />

multi-sample plates allow up to 20 wafers to be<br />

loaded into the system for measurement without<br />

requiring a robot.<br />

For the automated analysis of the data spectra,<br />

the QC3 uses tried and trusted industry-leading<br />

rADs software for automated analysis which<br />

will automatically analyse the collected data and<br />

report the results for specific wafers, batches,<br />

chambers. this reporting can be extended to host<br />

reporting if required.<br />

Ec<strong>on</strong>omy: QC3 incorporates XrGProtect, to<br />

ensure the tube lifetime is maximised. It also<br />

has an Eco-mode; ensuring system power<br />

c<strong>on</strong>sumpti<strong>on</strong> is reduced when there is no<br />

measurement being performed.<br />

Simplicity and Reliability: the system is so<br />

reliable and easy to use, that no expert is required<br />

to operate the system.<br />

© 2013 Angel Business Communicati<strong>on</strong>s.<br />

Permissi<strong>on</strong> required.<br />

Richard Stevens<strong>on</strong>, Editor of<br />

Compound Semic<strong>on</strong>ductor comments:<br />

“X-ray diffracti<strong>on</strong> is an essential characterizati<strong>on</strong><br />

tool in many fabs. With many diffractometers,<br />

this process can take hours, holding back fab<br />

throughput. But that’s not the case with the<br />

QC3 High-Resoluti<strong>on</strong> X-Ray Diffractometer from<br />

Jordan Valley, which can scan wafers in a<br />

matter of sec<strong>on</strong>ds.”<br />

38 www.compoundsemic<strong>on</strong>ductor.net April/May 2013

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