Macquarie Electronics USA Inc. Tokyo Electron Telius SP 305QS ...

Macquarie Electronics USA Inc.
Tokyo Electron Telius SP 305QS SCCM SE
300mm Dielectric Etch System
SN H00557
• Currently Configured for 300mm wafer sizes
• MFG Date: Nov 2004
• Install Type: Stand-Alone
• Telius SP Mainframe
• OHT Transport Configured
• Interface & Loader Module:
o (5) 300mm FOUP (25-Slot) Load-ports
o Carrier ID Reader: Omron V700-L21 (E99 interface)
o Wafer ID Reader: Cognex In-sight 1700
o
o
o
Mini-Environment
4-axis Handling Robot
• (2) Pick Arms
• Pick Arm Wafer Supports: Hyrec Armor Taper PAD
Orienter (Aligner):
• Sensor: CCD linear image
• Wafer Contact: Kalrez O-Ring
o Utility Box
o Corrosion Prevention: SUS Parts, Ball screw, Linear Guide have PTFE Coating
• Load Lock Module:
o Material: Aluminum Alloy (A5052)
o Surface Finish: Hard Sulfuric Acid Anodizing (20um)
o Top Lid: Clear Window, Polycarbonate material
o Break Filter
o Wafer Detection (IR)
• Process Chambers (P-C1/C2/C3/C4): SCCM SE
o Chamber coating: Y203 (Ceramic)
o Material: Aluminum (A6061)
o Surface Finish: Hard Sulfuric Acid Anodizing
o Temp Control:
• Upper/Lower Electrode: Chiller
• Side wall: Heater Element
o Insulator Lower: Ceramic w/Y203 Spray + Quartz
o Lower Electrode: ESC (Ceramic coating)
o 35mm Fixed GAP
o Resin Tipped Lifter
o Exhaust Ring: Aluminum Alloy w/Y203 Ceramic Spray
o Heated APC Pendulum Valve
o Turbo Pump: Mitsubishi FT-3301
o Upper PS: Daihen AGA-50B2 (5kW, 60MHz)
o Upper RF Match: Daihen AMN-50B2 (5kW, 60MHz)
o Lower PS: Daihen WGA-50E (5kW, 2MHz)
o Lower RF Match: Daihen WMN-50C6 (5kW, 2MHz)
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.
Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 or
matt.hayes@macquarie.com.
Visit our web site at www.macquarie.com/electronics
Important Information www.macquarie.com/uk/important_information.htm
© 2011 Macquarie Group

Macquarie Electronics USA Inc.
o Gas Distribution: Standard
o MKS Heated Pressure Monitor Gauges
o He B.P. Unit
o Deposition Shield: Aluminum w/Y203 Ceramic Spray
o Pneumatic Shutter w/Y203 coated disk
o End Point Detection: SE2000 II (Spectrum Scanning Optical Detection
o Windows: For End-point, Confirmation of Emission, & option Blind (rear of chamber)
o Toshiba Ceramic Final Valve Filters
o Manifold: Aluminum Alloy w/Hard Sulfuric Anodization
o Chamber O-Rings: Armorcrystal
o Gas Box Config (12-stick):
• Bottom Exhaust (76.3mm duct)
• Bottom Feed Single point Gas line connections
• Fujikin Valves
• Pall Filters
• Veriflo Regulators
• 2 nd Containment gas lines GB Chamber final valves w/GB exhaust
• SUS 316L Gasket material
• 4-Port Gas leak Detection
• Bourdon Gauges
• MKS 51A Pressure Switches
• Gas Heating: C5F8 (Gas #1)
• AERA FC-D985CT-BF MFCs
• #1: C5F8, #2: Ar, #3:CO, #4: O2, #5: O2, #6: N2
• #7: CHF3, #8: CH2F2, #9: CF4, #10: CHF3, #11: n/c, #12: n/c
• Heat exchanger/Chiller:
o Daikin UBRPD5A-2T (2-Channel)
• Coolant Used: Low Temp: FC3288 / High Temp: FC40
• Other / Options:
o Maintenance Controller: Flat Panel Touch Screen installed in Front Panel & hand-held
o High Voltage Warning Lamp
o Status Lamp (R/Y/G/B)
o Service outlets: Dedicated outlets for PC & Endpoint
o Analog Test Connector Box
o RF odometer
o EPD Recording (Main controller Hdd)
o Front Panel: SUS Brush or matte finish
o Frame Color: Purple/Ivory LM Frame, Ivory PS Frame
o Chiller coolant hose: Inner: PTFE, Outer: SUS mesh
o GJG Software Standard
o Data Back-up: Floppy Drive, MO Drive (Enginio ES)
o Bottom Feed Facility Connections
o Chinese Safety Labels
o Load Distribution Plate (4PS System)
o Seismic Bolts
o 20m Cable lengths: Interconnect, RF Power, Chiller hoses
• Power Rating (Total): 200VAC, 175A (4-lines)
o Power Rating (#1): 200V (2kW), 10A, 1-Phase, Freq 50/60Hz
o Power Rating (#2): 200V (13.9kW), 40A, 3-Phase, Freq 50/60Hz
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.
Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 or
matt.hayes@macquarie.com.
Visit our web site at www.macquarie.com/electronics
Important Information www.macquarie.com/uk/important_information.htm
© 2011 Macquarie Group

Macquarie Electronics USA Inc.
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.
Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 or
matt.hayes@macquarie.com.
Visit our web site at www.macquarie.com/electronics
Important Information www.macquarie.com/uk/important_information.htm
© 2011 Macquarie Group