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download EVAC catalogus - Fergutec

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12<br />

Quick - release vacuum fittings<br />

KF small flange connections<br />

KF Glass components<br />

Introduction<br />

Glass components for ultra-pure<br />

processes<br />

These glass elements meet the ever<br />

increasing demands for ultra-pure<br />

processes. Glass is highly resistant to<br />

water and most chemicals and can be<br />

thouroughly cleaned and sterilised.<br />

<strong>EVAC</strong> offers two qualities::<br />

1. Duran ® (borosilicate) glass<br />

2. Quartz glass<br />

Applications<br />

- CVD and PVD processes<br />

- Plasma etching and cleaning processes<br />

- UV, IR and laser measurement<br />

- High frequency and microwavesupported<br />

processes<br />

- Physical / chemical experiments<br />

- Inspection glasses, flow rate observation<br />

Transition from glass to metal<br />

The transition from glass to metal is no<br />

longer a problem but simply a matter of<br />

connecting two flanges. Vacuum<br />

measuring devices can, for example,<br />

easily be connected to glass systems by<br />

means of metal flanges.<br />

Blank flanges become inspection<br />

glasses<br />

Blank flanges can be used as inspection<br />

glasses. Optical blank flanges (parallel 6',<br />

level

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