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Quick - release vacuum fittings<br />
Overview<br />
1<br />
Advantages<br />
- Space-saving, quick connections<br />
- Exceedingly high vacuum tightness<br />
- Temperature- and radiation-resistant designs<br />
- Anti-magnetic designs<br />
- Even distribution of force<br />
- Rotary connection<br />
Overview of flange systems<br />
Drawing Flange type Flange material Seals Sealing surface Clamping means Page<br />
ISO KF<br />
NW 10...63<br />
Aluminium<br />
Stainless steel<br />
Glass<br />
Elastomer<br />
Aluminium<br />
(Copper)<br />
Unprotected<br />
Chain clamps<br />
(1 screw)<br />
3<br />
<strong>EVAC</strong><br />
tapered<br />
NW 80...250<br />
Aluminium<br />
Stainless steel<br />
Glass<br />
Elastomer<br />
Aluminium<br />
Unprotected<br />
Chain clamps<br />
(1 or 2 screws)<br />
21<br />
<strong>EVAC</strong> -<br />
CeFiX®<br />
NW 80...250<br />
Aluminium<br />
Stainless steel<br />
Elastomer<br />
Aluminium<br />
Copper<br />
Nickel<br />
Protected<br />
No cutting edge<br />
Chain clamps 35<br />
Technical data is subject to change without notice.<br />
Dimensions in mm.<br />
<strong>EVAC</strong> will not accept responsibility for any loss<br />
incurred through error or omission.<br />
Edition 1/2006 © <strong>EVAC</strong> AG<br />
CeFiX ® and <strong>EVAC</strong> ® are registered trademarks of <strong>EVAC</strong> AG.<br />
Teflon ® and Viton ® are registered trademarks of DuPont.<br />
Duran ® is a registered trademark of Schott.<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
2<br />
Quick - release vacuum fittings<br />
Table of Contents<br />
1. KF small flange connections<br />
Page 3 - 20<br />
- Flange system ISO 2861<br />
- Elastomer Seals<br />
- Metal Seals<br />
- Quick-release chain clamps NW 10-63<br />
- Wall clamps<br />
- Flange components<br />
- Metal bellows / Teflon bellows<br />
- Metal tubes<br />
- KF glass components NW 10-63<br />
- <strong>EVAC</strong> KF-CeFiX assembly NW 16-63<br />
Page 3<br />
Page 4<br />
Page 5<br />
Page 6 - 7<br />
Page 8<br />
Page 9<br />
Page 10<br />
Page 11<br />
Page 12 - 16<br />
Page 17 - 20<br />
2. ISO Connections<br />
- <strong>EVAC</strong> tapered flanges NW 80-250<br />
- Elastomer seals<br />
- Metal seals (incl. moulded seals)<br />
- Quick-release chain clamps NW 80-250<br />
- Flange components<br />
- Bellows / metal tubes<br />
- ISO glass components NW 80-160<br />
- <strong>EVAC</strong> ISO-CeFiX assembly NW 80-250<br />
Page 21 - 39<br />
Page 21<br />
Page 22<br />
Page 23 - 24<br />
Page 25 - 26<br />
Page 27<br />
Page 28<br />
Page 29 - 34<br />
Page 35 - 39<br />
3. Checklist for custom parts (up to NW 630)<br />
Page 41<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
Quick - release vacuum fittings<br />
KF small flange connections<br />
Flange system according to ISO 2861<br />
3<br />
metal<br />
glass<br />
Flange Blank flange Inspection glass Protective cap<br />
Flanges<br />
The flanges are made from one piece<br />
of material (short and long)<br />
The can be used with <strong>EVAC</strong> chain<br />
clamps and elastomer seals or with<br />
metal seals for UHV applications<br />
Inspection glasses<br />
Borosilicate glass fused to metal.<br />
Mechanically pre-pressed for higher<br />
stress resistance.<br />
KF flanges, blank flanges, inspection glasses<br />
NW A B C D E F L<br />
short<br />
L<br />
long<br />
Pmax [bar]<br />
flange inspection glass<br />
10 30 12.2 10 14 20 50 100<br />
16 30 17.2 16 20 20 50 100<br />
25 40 26.2 24 28 20 5 20 50 80 10<br />
40 55 41.2 40 44.5 30 5 25 50 40 10<br />
50 75 52.2 50 57 40 7 30 60 20 6<br />
63 87 -- 70 76 45 7 30 60 10 3<br />
Pmax=max. excess pressure in bar, (only with chain clamps 30.151.3xx, 30.151.4xx, 30.151.6xx and<br />
outer centred seals)<br />
Seals must be centred on the outside.<br />
NW<br />
Type Short flange Long flange Blank flange<br />
Order number<br />
Inspection<br />
glass<br />
Protective cap<br />
10 32.111.510 32.111.310 32.112.510 32.112.310 32.120.516 00.3116.00-Ks<br />
16 32.111.516 32.111.316 32.112.516 32.112.316 32.120.516 00.3116.00-Ks<br />
25 32.111.525 32.111.325 32.112.525 32.112.325 32.120.525 32.130.325 00.3125.00-Ks<br />
40 32.111.540 32.111.340 32.112.540 32.112.340 32.120.540 32.130.340 00.3140.00-Ks<br />
50 32.111.550 32.111.350 32.112.550 32.112.350 32.120.550 32.130.350 00.3150.00-Ks<br />
63 32.111.563 32.111.363 32.112.563 32.112.363 32.120.563 32.130.363 00.3163.00-Ks<br />
Materials 1.4301 (304) 1.4435 (316L) 1.4301 (304) 1.4435 (316L) 1.4301 (304) Duran/1.4462 PE<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -271...300°C -271...350°C -271...300°C -271...350°C -271...300°C -30...280°C 0...60°C<br />
Cryogenics yes yes yes yes yes - -<br />
Leak rate [mbar l s -1 ]
4<br />
Quick - release vacuum fittings<br />
KF small flange cennections<br />
Elastomer seals<br />
Our seals with outer centering for<br />
small flanges offer major<br />
advantages:<br />
- One size can be used for 2 nominal<br />
widths<br />
- No adapters for intermediate sizes<br />
(NW 10/20/23) required<br />
- Can be used for vacuum or excess<br />
pressure (thanks to external support<br />
of the sealing ring)<br />
- Easy to mount<br />
- Precise centering<br />
KF elastomer seals<br />
outer centering<br />
NW A C J<br />
10/16 30 16 23<br />
20/25 40 24 33<br />
32/40 55 40 48<br />
50 75 50 59<br />
63 87 68 77<br />
KF elastomer seals<br />
inner centering<br />
NW B C K<br />
16 17 16 25<br />
25 26 24 35<br />
40 41 40 49<br />
50 52 50 61.5<br />
63 70 68 80<br />
NW<br />
Type Teflon / FEP Teflon / Viton Alu / Viton<br />
Alu /<br />
Stainless<br />
steel / Viton<br />
Order number<br />
Stainless<br />
steel / Viton<br />
Stainless<br />
steel / Kalrez<br />
4079<br />
Alu / Viton<br />
Centering outer inner<br />
Stainless<br />
steel / Viton<br />
10/16 - 34.121.616 34.121.816 34.121.516 34.121.316 34.121.F16-iz 34.121.816-iz 34.121.316-iz<br />
20/25 34.121.225 34.121.625 34.121.825 34.121.525 34.121.325 34.121.F25-iz 34.121.825-iz 34.121.325-iz<br />
32/40 34.121.240 34.121.640 34.121.840 34.121.540 34.121.340 34.121.F40-iz 34.121.840-iz 34.121.340-iz<br />
50 34.121.250 34.121.650 34.121.850 34.121.550 34.121.350 34.121.F50-iz 34.121.850-iz 34.121.350-iz<br />
63 34.121.263 34.121.663 34.211.806 34.211.306<br />
Materials<br />
Inner ring Teflon Teflon Aluminium<br />
1.4435<br />
(316L)<br />
Outer ring Teflon Teflon Aluminium Aluminium<br />
1.4435<br />
(316L)<br />
1.4435<br />
(316L)<br />
1.4435<br />
(316L)<br />
1.4435<br />
(316L)<br />
Aluminium<br />
1.4435<br />
(316L)<br />
- -<br />
O-ring FEP Viton Viton Viton Viton Kalrez 4079 Viton Viton<br />
FEP = silicone O-ring with seamless Teflon coating<br />
Range of applications<br />
Vacuum Rough / High Rough / High Rough / High Rough / High Rough / High Rough / High Rough / High Rough / High<br />
Temperature range -50...200°C -20...200°C -20...200°C -20...200°C -20...200°C -10...315°C -20...200°C -20...200°C<br />
Cryogenics - - - - - - - -<br />
Leak rate [mbar l s -1 ]
Quick - release vacuum fittings<br />
KF small flange connections<br />
Sealing Edge<br />
Metal seals<br />
Advantages:<br />
- Inner or outer centering<br />
- Special, soft aluminium alloy<br />
- Can be used for vacuum and excess<br />
pressure<br />
- Easy to install<br />
- Precise centering<br />
- (Multiple use possible)<br />
- No outgassing<br />
- No permeation<br />
- Smallest leak rates<br />
- Radiation resistant<br />
- Short half-life<br />
- No heat treatment required (no<br />
recrystallisation)<br />
- Antimagnetic<br />
5<br />
KF aluminium seals<br />
outer centering<br />
NW A C1 J<br />
KF aluminium seals<br />
inner centering<br />
NW C C1 J<br />
10/16 30 20 23<br />
16 15 17 21<br />
20/25 40 32 33<br />
25 24 26 30<br />
32/40 55 45 48<br />
40 39 41 47<br />
50 75 65 68<br />
50 50 52 59<br />
63 87 77 80<br />
63 68 70 77<br />
KF aluminium seals<br />
one-side<br />
outer centering<br />
NW A C1 J<br />
KF aluminium seals<br />
one-side<br />
inner centering<br />
NW C C1 J<br />
10/16 30 20 23<br />
16 15 17 21<br />
20/25 40 32 33<br />
25 24 26 30<br />
32/40 55 45 48<br />
40 39 41 47<br />
50 75 65 68<br />
50 50 52 59<br />
63 87 77 80<br />
63 68 70 77<br />
NW<br />
Typ outer centering inner centering<br />
one-side<br />
outer centering<br />
Order number<br />
one-side<br />
inner centering<br />
10/16 34.142.116-az 34.142.116-iz 34.142.116-az1 34.142.116-iz1<br />
20/25 34.142.125-az 34.142.125-iz 34.142.125-az1 34.142.125-iz1<br />
32/40 34.142.140-az 34.142.140-iz 34.142.140-az1 34.142.140-iz1<br />
50 34.142.150-az 34.142.150-iz 34.142.150-az1 34.142.150-iz1<br />
63 34.142.163-az 34.142.163-iz 34.142.163-az1 34.142.163-iz1<br />
Materials<br />
Seal Aluminium Aluminium Aluminium Aluminium<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -271...150°C -271...150°C -271...150°C -271...150°C<br />
Cryogenics yes yes yes yes<br />
Leak rate [mbar l s -1 ]
6<br />
Quick - release vacuum fittings Quick - release chain clamps NW 16-63<br />
KF small flange connections<br />
light<br />
Features<br />
- For elastomer seals<br />
- For rough and high vacuum<br />
- GRP links for electr. insulation<br />
- Rotatable connection<br />
- Torque-free connection<br />
- Quick, safe, reliable<br />
- No tools needed for mounting<br />
- Vibration proof<br />
- Various material combinations<br />
- Favourably priced<br />
Knob / Nut<br />
Clamping bolt<br />
Clamping screw<br />
Strap<br />
KF chain clamps, light<br />
NW L N Torque<br />
[Nm]<br />
No. of<br />
links<br />
10/16 115 60 1.0 3<br />
20/25 125 70 1.5 4<br />
32/40 135 85 2.0 4<br />
50 152 105 2.5 5<br />
63 160 120 2.5 6<br />
Link<br />
NW<br />
Type<br />
Plastic<br />
Plastic<br />
high temperature<br />
Aluminium<br />
Aluminium<br />
with nut<br />
10/16 30.111.816 30.131.916 30.111.516 30.114.516<br />
20/25 30.111.825 30.131.925 30.111.525 30.114.525<br />
32/40 30.111.840 30.131.940 30.111.540 30.114.540<br />
50 30.111.850 30.131.950 30.111.550 30.114.550<br />
63 30.111.863 30.131.963 30.111.563 30.114.563<br />
Materials<br />
Links PA 6.6 sw PPO (grey) Cast aluminium Cast aluminium<br />
Strap Stainless steel Stainless steel Stainless steel Stainless steel<br />
Knob / Nut<br />
Knob<br />
PA 6.6 sw<br />
Knob<br />
PPO (grey)<br />
Knob<br />
PA 6.6 sw<br />
Clamping screw M5 Stainless steel Stainless steel Stainless steel<br />
Nut<br />
Stainless steel<br />
Stainless steel<br />
(Molykote)<br />
Clamping bolt PA 6.6 sw PPO (grey) Aluminium Aluminium<br />
Tightening by hand by hand by hand by hand / key<br />
Anwendungsbereiche, Einsatzgebiete<br />
Vacuum Rough / High Rough / High Rough / High Rough / High<br />
Temperature range<br />
-20...60°C<br />
(80°C, 5h)<br />
-20..100°C<br />
(150°C, 12h)<br />
-20...100°C<br />
-271...100°C<br />
Cryogenics - - - yes<br />
Pressure - - - -<br />
Antimagnetic yes yes yes yes<br />
Radiation resistant - - - yes<br />
Chemistry/Corrosion limited 1 limited 1 - -<br />
Suitable for<br />
clean rooms<br />
yes yes yes limited 2<br />
Electric insulation yes yes - -<br />
Seals only elastomer only elastomer only elastomer only elastomer<br />
Chain clamps for Triclamp flanges also available. 1<br />
Plastic parts , 2 Bolt coating<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
Quick - release vacuum fittings<br />
KF small flange connections<br />
Quick - release chain clamps NW 16-63<br />
standard<br />
7<br />
The new 2-point support for thrust pieces<br />
(pat.) ensures more even pressing and<br />
protects the flanges. With this system,<br />
fewer links and clamping bolts are needed<br />
(up to NW 40).<br />
Features<br />
- For elastomer and metal seals<br />
- For rough and high vacuum and UHV<br />
- Also for pressure applications<br />
- Rotatable connections<br />
- Torque-free connections<br />
- Quick, safe, reliable<br />
- Allows high sealing forces<br />
- Vibration proof<br />
- Various material combinations<br />
- 2-point support with even pressure (Pat.)<br />
SW 14 nut<br />
Clamping bolt<br />
Clamping screw<br />
Link<br />
Strap<br />
KF chain clamps, standard<br />
NW L N Pmax-<br />
**<br />
[bar]<br />
Torque [Nm]<br />
Elastomer Metal<br />
No. of<br />
links<br />
10/16 115 60 100 1.0 2.5 3<br />
20/25 125 70 80 1.5 3.0 3<br />
32/40 135 85 40 2.0 4.5 4<br />
50 152 105 20 2.5 5.0 5<br />
63 160 120 10 2.5 5.0 6<br />
Max. pressure only with chain clamp 30.151.3XX,<br />
30.151.4XX and 30.151.6XX<br />
NW<br />
Type<br />
Aluminium<br />
Aluminium<br />
Teflon coated<br />
Nickel plated<br />
steel<br />
Arcap 3<br />
Stainless steel<br />
10/16 30.151.516 30.159.516 30.151.616 30.151.316 30.151.416<br />
20/25 (3 links) 30.151.523 30.159.523 30.151.623 30.151.323 30.151.423<br />
32/40 30.151.540 30.159.540 30.151.640 30.151.340 30.151.440<br />
50 30.151.550 30.159.550 30.151.650 30.151.350 30.151.450<br />
63 30.151.563 30.159.563 30.151.663 30.151.363 30.151.463<br />
Materials<br />
Links Forged alu Forged alu<br />
Nickel plated<br />
steel<br />
Arcap 3<br />
Stainless steel<br />
Straps Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel<br />
Clamping nut Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel<br />
Clamping screw<br />
(Molykote)<br />
Stainless steel<br />
M5<br />
Stainless steel<br />
M5<br />
Stainless steel<br />
M6<br />
Stainless steel<br />
M6<br />
Stainless steel<br />
M6<br />
Clamping bolt Aluminium Aluminium Stainless steel Stainless steel Stainless steel<br />
Tightening key key key key key<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -271...150°C -271...150°C -271...350°C -271...350°C -271...350°C<br />
Cryogenics yes yes yes yes yes<br />
Pressure - - yes yes yes<br />
Antimagnetic yes yes - yes yes<br />
Radiation resistant yes - yes yes yes<br />
Chemistry/Corrosion limited 1 yes limited 4 yes yes<br />
Suitable for clean rooms limited 2 limited 2 limited 2 limited 2 limited 2<br />
Electric insulation - - - - -<br />
Seals<br />
metal /<br />
elastomer<br />
metal /<br />
elastomer<br />
metal /<br />
elastomer<br />
1<br />
Aluminium parts , 2 Bolt coating, 3 Copper / nickel alloy, 4 Nickel Beschichtung<br />
metal /<br />
elastomer<br />
metal /<br />
elastomer<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
8<br />
Quick - release vacuum fittings<br />
KF small flange connections<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -271...150°C<br />
Cryogenics<br />
yes<br />
Max. torque<br />
8 Nm<br />
Pressure -<br />
Antimagnetic<br />
yes<br />
Radiation resistant<br />
yes<br />
Chemistry / Corrosion -<br />
Suitable for clean rooms yes<br />
Electric insulation -<br />
Seals<br />
metal / elastomer<br />
Wall clamps<br />
These clamps are used to make a direct<br />
connection to a housing wall.<br />
Since there is usually no centering groove<br />
on the outside, seals with inside centering<br />
are used.<br />
KF wall clamps, aluminium / stainless steel<br />
NW C D N R T Order no.<br />
16 17.2 45 4 4 3 00.5906.00<br />
25 26.2 55 4 4 4 00.5906.00<br />
40 41.2 71 4 4 5 00.5906.00<br />
50 52.2 91 4 6 6 00.5906.00<br />
63 70.2 102 4 8 6 00.5906.00<br />
Use seals with inner centering, Metric thread size = M6<br />
N= number needed per connection for elastomer seals<br />
R= number needed per connection for metal seals<br />
T= recommended torque [Nm]<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
Quick - release vacuum fittings<br />
KF small flange connections<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range<br />
aluminium<br />
-271...150°C<br />
Temperature range<br />
stainless steel<br />
-271...350°C<br />
Cryogenics<br />
yes<br />
Leak rate
10<br />
Quick - release vacuum fittings<br />
KF small flange connections<br />
Advantages of metal bellows:<br />
- High flexible, without annealing<br />
- Highest bending and torsion strength<br />
- Can be used for ultra-high vacuum to<br />
slight pressure<br />
- Bakeable, suitable for cryogenics<br />
- Radiation resistant, antimagnetic<br />
- Perfect to clean (ultrasound)<br />
- Optimum corrosion resistant<br />
- Individually packed, dust-free<br />
- Guaranteed leak rate<br />
- Minimum outgassing<br />
- Long service life<br />
Advantages of Teflon bellows:<br />
- High flexibility<br />
- Individually packed, dust-free<br />
- Excellent corrosion resistant<br />
- Long service life<br />
- Suitable for glass and metal systems<br />
- GRP reinforced flanges<br />
- Machined from one piece<br />
- Electric insulation<br />
- Antimagnetic<br />
Metal bellows / Teflon bellows<br />
Behaviour under pressure:<br />
Metal bellows and tubes are used for<br />
vacuum, excess pressure and on both<br />
sides. If subjected to excess pressure,<br />
the bellows and tubes tend to elongate or<br />
- in the case of tightly clamped flanges - to<br />
buckle.<br />
The maximum values indicated apply<br />
for:<br />
- axially clamped flanges with buckling<br />
prevention<br />
Applications:<br />
- Compensation of axial, lateral or<br />
angular set-offs<br />
- Prevention of vibration transfer<br />
- Substitute for elastomer<br />
compensators<br />
- Compensate thermal expansion<br />
ISO KF metal bellows, stainless steel<br />
NW<br />
L<br />
Axial<br />
travel<br />
[± mm]<br />
Lateral<br />
travel<br />
± mm]<br />
max.<br />
angle<br />
[±°]<br />
Pmax<br />
[bar]<br />
Order no.<br />
10 70 7.0 8.5 65 6.0 35.001.310<br />
10 120 16.5 45.0 150 6.0 35.004.310<br />
16 70 6.5 4.0 35 3.5 35.001.316<br />
16 120 16.0 27.0 100 3.5 35.004.316<br />
25 80 12.5 7.0 48 2.5 35.002.325<br />
25 120 26.0 30.0 100 2.5 35.004.325<br />
40 100 20.0 10.0 50 1.2 35.003.340<br />
40 150 40.0 40.0 100 1.2 35.005.340<br />
50 100 18.0 7.0 36 1.0 35.003.350<br />
50 150 36.0 29.0 72 1.0 35.005.350<br />
63 100 17.0 6.5 26 0.5 35.003.363<br />
63 150 30.5 20.0 46 0.5 35.005.363<br />
P= max. internal pressure. Only with chain clamps<br />
30.151.3XX, 30.151.4XX, 30.151.6XX and outer<br />
centered seals.<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -200...350°C<br />
Cryogenics<br />
yes<br />
Leak rate
Quick - release vacuum fittings<br />
KF small flange connections<br />
Metal tubes<br />
11<br />
Behaviour under pressure:<br />
Metal bellows and tubes are used for<br />
vacuum, excess pressure and on both<br />
sides. If subjected to excess pressure,<br />
the bellows and tubes tend to elongate or<br />
- in the case of tightly clamped flanges - to<br />
buckle.<br />
The maximum values indicated apply for<br />
- axially clamped flanges with buckling<br />
prevention<br />
Range of applications<br />
Vacuum<br />
Rough / High- /<br />
Ultra-high<br />
Temperature range -200...350°C<br />
Cryogenics<br />
yes<br />
Leak rate
12<br />
Quick - release vacuum fittings<br />
KF small flange connections<br />
KF Glass components<br />
Introduction<br />
Glass components for ultra-pure<br />
processes<br />
These glass elements meet the ever<br />
increasing demands for ultra-pure<br />
processes. Glass is highly resistant to<br />
water and most chemicals and can be<br />
thouroughly cleaned and sterilised.<br />
<strong>EVAC</strong> offers two qualities::<br />
1. Duran ® (borosilicate) glass<br />
2. Quartz glass<br />
Applications<br />
- CVD and PVD processes<br />
- Plasma etching and cleaning processes<br />
- UV, IR and laser measurement<br />
- High frequency and microwavesupported<br />
processes<br />
- Physical / chemical experiments<br />
- Inspection glasses, flow rate observation<br />
Transition from glass to metal<br />
The transition from glass to metal is no<br />
longer a problem but simply a matter of<br />
connecting two flanges. Vacuum<br />
measuring devices can, for example,<br />
easily be connected to glass systems by<br />
means of metal flanges.<br />
Blank flanges become inspection<br />
glasses<br />
Blank flanges can be used as inspection<br />
glasses. Optical blank flanges (parallel 6',<br />
level
Quick - release vacuum fittings<br />
KF small flange connections<br />
KF compatible<br />
The flange dimensions are indentical to<br />
the KF flanges, with the exception of the<br />
side width on the outside diameter, which<br />
is 4 mm instead of 3 mm. The larger<br />
dimension makes the glass flanges<br />
stronger to prevent cracking when the<br />
chain is tightened.<br />
The (compressed) seal ring width is<br />
therefore only 2 mm. Connection to a<br />
tandard KF flange is always possible with<br />
the aid of wider seal (3 mm).<br />
KF Glass components<br />
Flanges NW 16-63<br />
Blank flanges can be used as inspection<br />
glasses. <strong>EVAC</strong> offers two grades:<br />
"standard"<br />
to be used as all-purpose inspection<br />
glasses<br />
"optical"<br />
(parallel within: 6', levelness
14<br />
Quick - release vacuum fittings<br />
KF small flange connections<br />
Two sealing widths<br />
(2mm and 3mm)<br />
Since the glass flanges have a 1 mm<br />
wider OD, the sealing width (compressed)<br />
is no longer 4 mm* but 2 mm.<br />
For connections between a standard KF<br />
metal flange and a glass flange, a 3 mm<br />
wide seal is used.<br />
KF Glass components<br />
Seals NW 16-63<br />
The total width of two flanges and one<br />
seal is always 10 mm.<br />
(4+2+4=10 for glass to glass connections)<br />
(4+3+3=10 for glass to metal connections)<br />
(3+4+3=10 for metal to metal connections)<br />
* (4mm for metal to metal connections)<br />
KF elastomer seals<br />
for glass flanges<br />
NW A<br />
10/16 30<br />
25 40<br />
40 55<br />
50 75<br />
63 87<br />
for glass to glass connection<br />
for glass to metal connection<br />
Glass to glass connection<br />
Type Teflon / Viton Teflon / FEP Teflon / Viton Teflon / FEP<br />
Use for glass to glass connection for glass to metal connection<br />
NW<br />
Order number<br />
Sealing width 2 mm 3 mm<br />
10/16 34.122.616 34.122.216 34.123.616 34.123.216<br />
25 34.122.625 34.122.225 34.123.625 34.123.225<br />
40 34.122.640 34.122.240 34.123.640 34.123.240<br />
50 34.122.650 34.122.250 34.123.650 34.123.250<br />
63 34.122.663 34.122.263 34.123.663 34.123.263<br />
Materials<br />
Inner ring Teflon Teflon Teflon Teflon<br />
O-ring Viton FEP Viton FEP<br />
Outer ring Teflon Teflon Teflon Teflon<br />
Range of applications<br />
Vacuum Rough / High Rough / High Rough / High Rough / High<br />
Temperature range -20...200°C -50...200°C -20...200°C -50...200°C<br />
Cryogenics - - - -<br />
Pressure NW 10..50 2 bar 2 bar 2 bar 2 bar<br />
Pressure NW 63 1.5 bar 1.5 bar 1.5 bar 1.5 bar<br />
Leak rate [mbar l s -1 ]
Quick - release vacuum fittings<br />
KF small flange connections<br />
KF Glass components<br />
Chain clamps NW 16-63<br />
The right chain clamp<br />
The flanges are connected by means of<br />
plastic chain clamp that is strong enough<br />
to ensure good sealing and soft enough<br />
not to damage the glass flanges.<br />
Available as standard type (60/80°C) or<br />
high-temperature version (100/150°C),<br />
with or without torque limitation.<br />
15<br />
Clamping<br />
bolt<br />
Clamping screw<br />
Knob / Nut<br />
Strap<br />
KF chain clamps<br />
NW A B<br />
10/16 122 60<br />
25 127 70<br />
40 141 85<br />
50 156 105<br />
63 170 120<br />
Link<br />
NW<br />
Type Standard High-temperature<br />
Standard with<br />
torque limitation<br />
Order number<br />
High-temperature<br />
with torque<br />
limitation<br />
10/16 30.131.816 30.131.916 30.132.816 30.132.916<br />
25 30.131.825 30.131.925 30.132.825 30.132.925<br />
40 30.131.840 30.131.940 30.132.840 30.132.940<br />
50 30.131.850 30.131.950 30.132.850 30.132.950<br />
63 30.131.863 30.131.963 30.132.863 30.132.963<br />
Materials<br />
Links GRP white GRP grey GRP white GRP grey<br />
Straps Stainless steel Stainless steel Stainless steel Stainless steel<br />
Knob GRP GRP GRP GRP<br />
M5 Clamping screw Stainless steel Stainless steel Stainless steel Stainless steel<br />
Clamping bolt GRP GRP GRP GRP<br />
Tightening by hand by hand by hand by hand<br />
Range of applications<br />
Vacuum Rough / High Rough / High Rough / High Rough / High<br />
Temperature range<br />
-20...60°C<br />
(80°C, 5h)<br />
-20..100°C<br />
(150°C, 12h)<br />
-20...60°C<br />
(80°C, 5h)<br />
-20..100°C<br />
(150°C, 12h)<br />
Cryogenics - - - -<br />
Pressure NW 10...50 2 bar 2 bar 2 bar 2 bar<br />
Pressure NW 63 1.5 bar 1.5 bar 1.5 bar 1.5 bar<br />
Antimagnetic yes yes yes yes<br />
Radiation resistant - - - -<br />
Chemistry / Corrosion yes yes yes yes<br />
Suitable for clean rooms yes yes yes yes<br />
Electric insulation yes yes yes yes<br />
Seals only elastomer only elastomer only elastomer only elastomer<br />
GRP: glass-fibre reinforced plastic.<br />
The torque limitation prevents over-tightening of the chain clamp thereby protecting the glass flanges<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
16<br />
Quick - release vacuum fittings<br />
KF small flange connections<br />
Flange dimensions, see on page 13<br />
KF Jars<br />
Order no.<br />
NW A B C Duran ® Quarz<br />
10 30 16 12 33.11A.710 33.11A.810<br />
16 30 20 16 33.11A.716 33.11A.816<br />
25 40 30 26 33.11A.725 33.11A.825<br />
40 55 46 42 33.11A.740 33.11A.840<br />
50 75 56 52 33.11A.750 33.11A.850<br />
63 87 76 70 33.11A.763 33.11A.863<br />
Range of applications<br />
Vacuum<br />
Temperature range Duran<br />
Temperature range Quarz<br />
Rough / High<br />
-20...450°C<br />
-20...1000°C<br />
Cryocenics -<br />
Leak rate
Quick - release vacuum fittings<br />
KF small flange connections<br />
<strong>EVAC</strong> KF-CeFiX<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range<br />
aluminium seals<br />
-271...150°C<br />
Temperature range<br />
copper seals<br />
-271...350°C<br />
Cryogenics<br />
yes<br />
Leak rate
18<br />
Quick - release vacuum fittings<br />
KF small flange connections<br />
<strong>EVAC</strong> KF-CeFiX components<br />
Chain clamps NW 16-63<br />
The new 2-point support for thrust pieces<br />
(pat.) ensures more even pressing and<br />
protects the flanges. With this system,<br />
fewer links and clamping bolts are needed<br />
(up to NW 40).<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range<br />
aluminium seals<br />
-271...150°C<br />
Temperature range<br />
copper seals<br />
-271...350°C<br />
Cryogenics<br />
yes<br />
Leak rate
Quick - release vacuum fittings<br />
KF small flange connections<br />
Range of applications<br />
Vacuum<br />
Temperature range<br />
Cryogenics<br />
Rough / High /<br />
Ultra-high<br />
-271...350°C<br />
yes<br />
Leak rate
20<br />
Quick - release vacuum fittings<br />
KF small flange connections<br />
<strong>EVAC</strong> KF-CeFiX components<br />
NW 16-63 metal bellows / metal tubes<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -200...550°C<br />
Cryogenics<br />
yes<br />
Leak rate
Quick - release vacuum fittings<br />
ISO connections<br />
<strong>EVAC</strong> ISO-Konus<br />
<strong>EVAC</strong> tapered flanges NW 80-250<br />
21<br />
The tapered <strong>EVAC</strong> ISO system<br />
This system does away with the typical<br />
drawback of standard ISO-K systems,<br />
namely time- and space-consuming<br />
assembly. The conical flanges correspond<br />
to <strong>EVAC</strong> standards. Nominal widths and<br />
tube dimensions are according to the<br />
ISO-K system.<br />
The tapered <strong>EVAC</strong> ISO flanges can be<br />
easily and reliably connected by means<br />
of chain clamps.<br />
Range of applications:<br />
Vacuum<br />
Temperature range<br />
Temperature range of<br />
inspection glasses<br />
Cryogenics<br />
Rough / High /<br />
Ultra-high<br />
-271...300°C<br />
-30...280°C<br />
yes<br />
Leak rate
22<br />
Quick - release vacuum fittings<br />
ISO connections<br />
Elastomer seals<br />
Properties:<br />
- Various sealing materials<br />
- Various material combinations<br />
- Various materials for centering ring<br />
- With outer ring suitable for pressure<br />
applications<br />
ISO - tapered elastomer seals<br />
NW C C 1 E J<br />
80 83 81 112 98<br />
100 102 100 132 118<br />
125 127 125 157 144<br />
160 153 151 182 167<br />
200 213 211 242 227<br />
250 261 259 292 275<br />
with inside centering<br />
outer ring required for<br />
pressure applications<br />
Type<br />
Alu / Viton<br />
Stainless steel<br />
/ Viton<br />
Stainless steel<br />
Teflon / Viton Teflon / FEP<br />
/ Kalrez 4079<br />
Order no.<br />
Spare O-ring,<br />
Viton<br />
Spare O-ring,<br />
FEP<br />
Outer ring<br />
(optional)<br />
NW<br />
80 34.211.808 34.211.308 34.211.508 34.211.208 34.211.F08 34.800.808 34.800.208 34.289.108<br />
100 34.211.810 34.211.310 34.211.510 34.211.210 34.211.F10 34.800.810 34.800.210 34.289.110<br />
125 34.211.812 34.211.312 34.211.512 34.211.212 34.211.F12 34.800.812 34.800.212 34.289.112<br />
160 34.211.816 34.211.316 34.211.516 34.211.216 34.211.F16 34.800.816 34.800.216 34.289.116<br />
200 34.211.820 34.211.320 34.211.520 34.211.220 34.211.F20 34.800.820 34.800.220 34.289.120<br />
250 34.211.825 34.211.325 34.211.525 34.211.225 34.211.F25 34.800.825 34.800.225 34.289.125<br />
Materials -<br />
Centering ring Aluminium 1.4435 Teflon Teflon 1.4435 - - -<br />
O-ring Viton Viton Viton FEP Kalrez 4079 Viton FEP -<br />
Outer ring - - - - - - - Alu<br />
FEP = silicone O-ring with seamless Teflon coating<br />
Range of applications<br />
Vacuum Rough / High Rough / High Rough / High Rough / High Rough / High Rough / High Rough / High Rough / High<br />
Temperature range -20...200°C -20...200°C -20...200°C -50...200°C -10...315°C -20...200°C -50...200°C -50...200°C<br />
Cryogenics - - - - - - - -<br />
Pressure with outer ring with outer ring - - with outer ring with outer ring with outer ring yes<br />
Leak rate [mbar l s -1 ]
Quick - release vacuum fittings<br />
ISO connections<br />
Range of applications<br />
Vacuum<br />
Temperature range<br />
Cryogenics<br />
Rough / High /<br />
Ultra-high<br />
-271...150°C<br />
yes<br />
Leak rate
24<br />
Quick - release vacuum fittings<br />
ISO connections<br />
Moulded seals<br />
Moulded seals can be produced in various<br />
shapes and sizes with various crosssections.<br />
Sealing material is aluminium.<br />
Please send us your inquiry; we will be<br />
pleased to send you an offer.<br />
Standard profile<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
Aluminium<br />
Quick - release vacuum fittings<br />
ISO connections<br />
NW 80-250 Chain clamps<br />
light<br />
Two 20° tapered flanges compress an<br />
elastomer seal by means of chain clamp<br />
that is kept in place by a centering ring<br />
which centres the flanges at the same<br />
time.<br />
A tight vacuum connection is achieved<br />
with only one bolt in no time.<br />
25<br />
Type BX (4 contact points per link)<br />
patented<br />
30.612.4XX<br />
Type BX<br />
<strong>EVAC</strong> ISO - tapered chain clamps<br />
light, aluminium / stainless steel<br />
NW A N Pmax<br />
[bar]<br />
Torque<br />
T[Nm]<br />
80 114 165 20 3.5<br />
100 134 185 20 4<br />
125 161 210 14 5<br />
160 190 235 10 7<br />
200 252 300 6 9.5<br />
250 301 350 4 12<br />
Pmax = maximum excess pressure in bar<br />
T= recommended torque<br />
strap<br />
link<br />
pin<br />
NW<br />
Type<br />
Aluminium type<br />
BX with knob<br />
80 30.612.408<br />
100 30.612.410<br />
125 30.612.412<br />
160 30.612.416<br />
200<br />
250<br />
Nominal widths 320...700 available upon request<br />
Materials<br />
Links<br />
Aluminium<br />
Teflon coated<br />
Straps<br />
1.4435 (316L)<br />
Knob<br />
GRP<br />
Clamping screw Stainless steel<br />
Pin 1.4305 (~304)<br />
Tightening<br />
by hand<br />
Range of applications<br />
Vacuum<br />
Rough / High<br />
Temperature range -20...100°C<br />
Cryogenics -<br />
Pressure -<br />
Antimagnetic<br />
yes<br />
Chemistry / Corrosion limited<br />
Suitable for clean rooms yes<br />
Electric insulation -<br />
Seals<br />
elastomer only<br />
GRP: glass-fibre reinforced plastic<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
26<br />
Quick - release vacuum fittings<br />
ISO connections<br />
NW 80-250 Chain clamps<br />
standard<br />
Two 20° tapered flanges compress a metal<br />
seal by means of chain clamp. The seals<br />
also centres the flanges at the same time.<br />
Within no time, an UHV-tight radiationresistant<br />
(not for Teflon coated chains)<br />
and antimagnetic connection is achieved.<br />
Tighten the two screws evenly in turns to<br />
achieve a perfect seal.<br />
The new 2-point support for thrust pieces<br />
(pat.) ensures more even pressing and<br />
protects the flanges. With this system,<br />
fewer links and clamping bolts are needed<br />
(up to NW 40).<br />
Type BX<br />
30.642.4XX<br />
30.642.7XX<br />
Type BX<br />
screw<br />
- Two screws achieve a sealing force of<br />
100 N/mm sealing length<br />
- Sealing widths: 2.5/2mm (sealed)<br />
- Minimum space requirement; can be<br />
mounted in tight places<br />
- Very suitable for the connection of<br />
accelerating tubes<br />
30.242.3XX<br />
Stainless steel<br />
screw<br />
<strong>EVAC</strong> ISO - tapered chain clamps,<br />
standard<br />
link<br />
link<br />
NW A M N Torque [Nm]<br />
elastomer metal<br />
80 114 38 160 3.5 8.5<br />
100 134 38 180 4 10<br />
125 161 38 205 5 12.5<br />
160 190 44 250 7 18<br />
200 252 44 310 9.5 24<br />
250 301 44 355 12 30<br />
N = recommended installation space<br />
strap<br />
pin<br />
screw<br />
strap<br />
pin<br />
screw<br />
NW<br />
Type<br />
Stainless steel<br />
Teflon coated<br />
alu / stainless<br />
type BX<br />
CuNi alloy<br />
type BX<br />
80 30.242.308 30.642.408 30.642.708<br />
100 30.242.310 30.642.410 30.642.710<br />
125 30.242.312 30.642.412 30.642.712<br />
160 30.242.316 30.642.416 30.642.716<br />
200 30.242.320<br />
250 30.242.325<br />
Nominal widths 320...700 available upon request<br />
Materials<br />
Links Stainless steel Aluminium CuNiFe<br />
Straps 1.4435 (316L) 1.4435 (316L) 1.4435 (316L)<br />
Clamping screw (2x) Stainless steel Stainless steel Stainless steel<br />
Pin 1.4301 (304) 1.4301 (304) 1.4301 (304)<br />
Tightening key key key<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -271...350°C -271...150°C -271...250°C<br />
Cryogenics yes yes yes<br />
Pressure yes - yes<br />
Antimagnetic yes yes yes<br />
Radiation resistant yes - yes<br />
Chemistry / Corrosion yes yes yes<br />
Suitable for clean rooms limited limited yes<br />
Electric insulation - - -<br />
metal* /<br />
Seals<br />
only metal<br />
elastomer<br />
*for chain clamps 30.642.4xx, use metal seals 34.272.1xx<br />
metal /<br />
elastomer<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
Quick - release vacuum fittings<br />
ISO connections<br />
Range of applications<br />
Vacuum<br />
Temperature range<br />
Cryogenics<br />
Rough / High /<br />
Ultra-high<br />
-271...300°C<br />
yes<br />
Leak rate
28<br />
Quick - release vacuum fittings<br />
ISO connections<br />
Range of applications<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range -200...350°C<br />
Cryogenics<br />
yes<br />
Leak rate
Quick - release vacuum fittings<br />
ISO connections<br />
ISO Glass components<br />
Introduction<br />
29<br />
Glass components for ultra-pure<br />
processes<br />
These glass elements meet the ever<br />
increasing demands for ultra-pure<br />
processes. Glass is highly resistant to<br />
water and most chemicals and can be<br />
thouroughly cleaned and sterilised, which<br />
ensures that your processes are much<br />
cleaner than with stainless steel or<br />
aluminium.<br />
<strong>EVAC</strong> offers two qualities:<br />
1. Duran ® (borosilicate) glass<br />
2. Quartz glass<br />
Applications<br />
- CVD and PVD processes<br />
- Plasma etching and cleaning processes<br />
- UV, IR and laser measurement<br />
- High frequency and microwavesupported<br />
processes<br />
- Physical / chemical experiments<br />
- Inspection glasses, flow rate observation<br />
Transition from glass to metal<br />
The transition from glass to metal is no<br />
longer a problem but simply a matter of<br />
connecting two flanges. Vacuum<br />
measuring devices can, for example,<br />
easily be connected to glass systems by<br />
means of metal flanges.<br />
Blank flanges become inspection<br />
glasses<br />
Blank flanges can be used as inspection<br />
glasses. Optical blank flanges (parallel 6',<br />
level
30<br />
Quick - release vacuum fittings<br />
ISO connections<br />
ISO Glass components<br />
Flanges NW 80-160<br />
Properties:<br />
- Available in Duran and Quartz<br />
- Blank flanges standard or optical<br />
- Can be directly mounted on <strong>EVAC</strong> ISO<br />
tapered flanges<br />
- NW 80...125 can be directly mounted<br />
on ISO F flanges (with plastic wall<br />
clamps)<br />
<strong>EVAC</strong> ISO - tapered flanges<br />
Other tube diameters upon request<br />
NW A C D<br />
80 114 83 89<br />
100 134 102 110<br />
125 161 127 135<br />
160 190 153 160<br />
NW<br />
Type Flange Duran Flange Quartz<br />
Blank flange<br />
Duran<br />
Order no.<br />
Blank flange<br />
Quartz<br />
Blank flange<br />
Duran optical<br />
Blank flange<br />
Quartz optical<br />
80 32.213.708 32.213.808 32.223.708 32.223.808 32.224.708 32.224.808<br />
100 32.213.710 32.213.810 32.223.710 32.223.810 32.224.710 32.224.810<br />
125 32.213.712 32.213.812 32.223.712 32.223.812 32.224.712 32.224.812<br />
160 32.213.716 32.213.816 32.223.716 32.223.816 32.224.716 32.224.816<br />
Materials<br />
Duran Quartz Duran Quartz Duran Quartz optical<br />
Range of applications<br />
Vacuum Rough / High Rough / High Rough / High Rough / High Rough / High Rough / High<br />
Temperature range -20..450°C -20..1000°C -20..450°C -20..1000°C -20..450°C -20..1000°C<br />
Cryogenics - - - - - -<br />
Pressure - - - - - -<br />
Leak rate [mbarls -1 ]
Quick - release vacuum fittings<br />
ISO connections<br />
ISO Glass components<br />
Seals NW 80-160<br />
Properties:<br />
- Various sealing materials<br />
- Insulating<br />
- With outer or inner centering<br />
31<br />
ISO elastomer seals,<br />
inner centering<br />
NW C C1 J<br />
80 83 81 98<br />
100 102 100 118<br />
125 127 125 144<br />
160 153 151 167<br />
ISO elastomer seals,<br />
outer centering<br />
NW C C1 J<br />
80 114 83 92<br />
100 134 102 114<br />
125 161 127 139<br />
160 190 153 162<br />
Use this seal for blank flanges<br />
Type Teflon / Viton Teflon / FEP Teflon / Viton Teflon / FEP<br />
NW<br />
Order no.<br />
Centering inner outer<br />
80 34.211.508 34.211.208 34.212.508 34.212.208<br />
100 34.211.510 34.211.210 34.212.510 34.212.210<br />
125 34.211.512 34.211.212 34.212.512 34.212.212<br />
160 34.211.516 34.211.216 34.212.516 34.212.216<br />
Materials<br />
Inner ring Teflon Teflon Teflon Teflon<br />
O-ring Viton FEP Viton FEP<br />
Outer ring - - Teflon Teflon<br />
FEP=Silicone O-ring with seamless Teflon coating<br />
Range of applications<br />
Vacuum Rough / High Rough / High Rough / High Rough / High<br />
Temperature range -20...200°C -50...200°C -20...200°C -50...200°C<br />
Cryogenics - - - -<br />
Pressure - - - -<br />
Leak rate [mbar l s -1 ]
32<br />
Quick - release vacuum fittings<br />
ISO connections<br />
The new 2-point support for thrust pieces<br />
(pat.) ensures more even pressing and<br />
protects the flanges. With this system,<br />
fewer links and clamping bolts are needed<br />
(up to NW 40).<br />
ISO Glass components<br />
Chain clamps NW 80-160<br />
Advantages:<br />
- No damage of glass flanges<br />
- Links with two pressure points (patented)<br />
- Load on GRP links only upon pressure<br />
- Minimum space required<br />
Clamping screw<br />
Knob<br />
Strap<br />
Chain clamps<br />
NW A R N<br />
80 114 244 154<br />
100 134 256 172<br />
125 161 278 200<br />
160 190 360 220<br />
Link<br />
Pin<br />
NW<br />
Type<br />
Plastic /<br />
Stainless steel<br />
Plastic high<br />
temperature<br />
Order number<br />
80 30.221.808 30.221.908<br />
100 30.221.810 30.221.910<br />
125 30.221.812 30.221.912<br />
160 30.221.816 30.221.916<br />
Materials<br />
Links GRP black GRP grey<br />
Straps<br />
Stainless steel Stainless steel<br />
Knob GRP GRP<br />
Clamping screw<br />
M6<br />
stainless steel<br />
M6<br />
stainless steel<br />
Tightening by hand by hand<br />
Range of applications<br />
Vacuum Rough / High Rough / High<br />
Temperature range<br />
-20...60°C<br />
(80°C, 5h)<br />
-20..100°C<br />
(150°C, 12h)<br />
Cryogenics - -<br />
Pressure - -<br />
Antimagnetic yes yes<br />
Radiation resistant - -<br />
Chemistry / Corrosion yes yes<br />
Suitable for clean rooms yes yes<br />
Electric insulation yes yes<br />
Seals<br />
elastomer only elastomer only<br />
GRP: glass-fibre reinforced plastic<br />
The chain clamps can be sterilised with hot water<br />
Glass to glass connection<br />
Glass to metal connection<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
Quick - release vacuum fittings<br />
ISO connections<br />
ISO Glass components<br />
Wall clamps NW 80-160<br />
Advantages:<br />
- No damage of glass flanges<br />
- Can be directly mounted on ISO-F<br />
flanges (NW 80...125)<br />
33<br />
Wall clamps<br />
Plastic / Stainless steel, antimagnetic<br />
NW B H M N Order no.<br />
80 125 145 8 8 00.5908.60<br />
100 145 165 8 8 00.5908.60<br />
125 175 200 10 8 00.5908.70<br />
160 204 225 10 8 00.5908.70<br />
Max. torque 2 Nm<br />
N=quantity required per connection<br />
Temperature range -20°C to +100°C<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
34<br />
Quick - release vacuum fittings<br />
ISO connections<br />
<strong>EVAC</strong> ISO tapered jars<br />
Any length available<br />
<strong>EVAC</strong> ISO tapered elbows<br />
<strong>EVAC</strong> ISO tapered tees<br />
Order no.<br />
NW L X Duran Quartz<br />
80 196 98 33.461.708 33.461.808<br />
100 216 108 33.461.710 33.461.810<br />
125 236 118 33.461.712 33.461.812<br />
160 276 138 33.461.716 33.461.816<br />
<strong>EVAC</strong> ISO tapered crosses<br />
Order no.<br />
NW X Duran Quartz<br />
80 98 33.451.708 33.451.808<br />
100 108 33.451.710 33.451.810<br />
125 118 33.451.712 33.451.812<br />
160 138 33.451.716 33.451.816<br />
Order no.<br />
NW L X Duran Quartz<br />
80 196 98 33.471.708 33.471.808<br />
100 216 108 33.471.710 33.471.810<br />
125 236 118 33.471.712 33.471.812<br />
160 276 138 33.471.716 33.471.816<br />
<strong>EVAC</strong> ISO tapered adapters<br />
Other lengths upon request Order no.<br />
NW L Duran ® Quartz<br />
Range of applications:<br />
Vacuum<br />
Temperature range<br />
Duran<br />
Temperature range<br />
Quartz<br />
80 196 33.522.708 33.522.808<br />
100 216 33.522.710 33.522.810<br />
125 236 33.522.712 33.522.812<br />
160 276 33.522.716 33.522.816<br />
Rough / High<br />
-20...450°C<br />
-20...1000°C<br />
Cryogenics -<br />
Leak rate
Quick - release vacuum fittings<br />
ISO connections<br />
The most striking feature of the <strong>EVAC</strong>-<br />
CeFiX flange compared to the Conflat<br />
flange is the lack of a cutting edge. The<br />
edge is easily damaged and requires<br />
high sealing forces and has therefore<br />
been omitted with the CeFiX system.<br />
The seals are designed in such a way<br />
that they seal on the 20° taper of the<br />
flange, thereby reducing the necessary<br />
sealing force by up to 50%.<br />
Since the dimensions of the sealing<br />
groove of both systems are absolutely<br />
identical, the CeFiX seal can also be<br />
used for standard CF flanges. So the<br />
seal can also be used for flanges with<br />
slightly damaged flange edge.<br />
Standard Conflat® connection:<br />
Thanks to the reduced sealing force,<br />
nickel alloys can also be used, but just<br />
for <strong>EVAC</strong> CeFiX flanges, since standard<br />
CF flanges could be damaged.<br />
<strong>EVAC</strong> offers the seals in three materials::<br />
- aluminium<br />
- OFS copper<br />
- nickel<br />
Comparison of sealing force<br />
(N/mm sealing length)<br />
CeFiX Standard<br />
Aluminium 70 100<br />
Copper 220 410<br />
Nickel 400 680<br />
<strong>EVAC</strong>-CeFiX seal with Conflat® flanges:<br />
Comparison CF / <strong>EVAC</strong> - CeFiX<br />
<strong>EVAC</strong>-CeFiX components are<br />
quick-release fittings that are:<br />
- bakeable up to high temperatures<br />
- suitable for UHV<br />
- suitable for excess pressure<br />
- suitable for cryogenics<br />
- resistant to chemicals<br />
Summary:<br />
- <strong>EVAC</strong>-CeFiX seals are absolutely<br />
compatible with standard CF flanges<br />
- CeFiX nickel seals cannot be used<br />
for standard CF flanges<br />
- Standard CF seals cannot be used<br />
with CeFiX flanges<br />
<strong>EVAC</strong>-CeFiX seal with chain clamp and<br />
<strong>EVAC</strong> flanges:<br />
35<br />
Sealing force 100%<br />
Sealing force 50%<br />
Sealing force 50%<br />
<strong>EVAC</strong>-CeFiX seals come in three<br />
materials:<br />
Conflat® is a registered trademark of Varian Inc. Palo Alto, CA<br />
1. Aluminium<br />
This highly ductile material can be heated<br />
up to 150°C and can be used with<br />
aluminium CF flanges. Due to the short<br />
half life of the aluminium isotopes,<br />
disposal of seals used in accelerator<br />
poses no problem.<br />
The seals can also be used for testing<br />
new installation, since only a few screws<br />
are needed. Later the aluminium seals<br />
can be replaced by copper ones.<br />
2. OFS copper<br />
Oxygen-free, silver-alloyed copper for<br />
higher thermal stability (no reduction in<br />
strength up to 300°C compared to 200°C<br />
for standard OFHC copper) (standard<br />
application).<br />
Can also be used for cryogenic<br />
applications.<br />
3. Highly pure nickel<br />
The highest corrosion resistance and<br />
ductility (for applications in the<br />
semiconductor or in the chemical<br />
industry).<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
36<br />
Quick - release vacuum fittings<br />
ISO connections<br />
Range of applications<br />
Vacuum<br />
Temperature range<br />
aluminium seals<br />
Temperature range<br />
copper seals<br />
Temperature range<br />
nickel seals<br />
Cryogenics<br />
Rough / High /<br />
Ultra-high<br />
-271...150°C<br />
-271...350°C<br />
-271...450°C<br />
yes<br />
Leak rate
Quick - release vacuum fittings<br />
ISO connections<br />
Range of applications:<br />
Vacuum<br />
Rough / High /<br />
Ultra-high<br />
Temperature range<br />
aluminium seals<br />
-271...150°C<br />
Temperature range<br />
copper seals<br />
-271...350°C<br />
Temperature range<br />
nickel seals<br />
-271...450°C<br />
Cryogenics<br />
yes<br />
Leak rate
38<br />
Quick - release vacuum fittings<br />
ISO connections<br />
Range of applications:<br />
Vacuum<br />
Temperature range<br />
Cryogenics<br />
Rough / High /<br />
Ultra-high<br />
-271...350°C<br />
yes<br />
Leak rate
Quick - release vacuum fittings<br />
ISO connections<br />
<strong>EVAC</strong> ISO-CeFiX components<br />
Metal bellows / metal tubes NW 80...250<br />
39<br />
Range of applications:<br />
Vacuum<br />
Temperature range<br />
Cryogenics<br />
Rough / High /<br />
Ultra-high<br />
-200...550°C<br />
yes<br />
Leak rate
40<br />
Quick - release vacuum fittings<br />
General information<br />
1. Flanges and components<br />
<strong>EVAC</strong> offers the following flange<br />
system for quick-release vacuum<br />
fittings::<br />
· ISO KF flanges and components<br />
NW 16 – NW 63<br />
<strong>EVAC</strong> introduced NW 63 KF - not<br />
included in ISO standard 2861 - which<br />
offers a simplification compared to<br />
connections with larger diameters.<br />
· <strong>EVAC</strong> ISO tapered connection<br />
Metal cone, based on the clamping<br />
flanges according to Pneurop 6606<br />
· Glass connections (Duran or<br />
quartz), NW 10 to NW 160<br />
· CeFiX flange connections based<br />
on the Conflat® system for UHV<br />
applications<br />
With this connection, only metal seals<br />
(aluminium, copper on nickel) are<br />
used; sealing force is only approx.<br />
50%.<br />
2. Seals<br />
Seals with centering on the inside or<br />
outside made from various elastomer<br />
materials.<br />
Seals with centering on the inside or<br />
outside as aluminium edge seals with<br />
various cross-sections.<br />
CeFix Seals for UHV applications in<br />
aluminium, copper or nickel.<br />
Moulded seals in various shapes and<br />
sizes, aluminium (see catalogue page<br />
24).<br />
3. Chain clamps<br />
a) General<br />
These are chains for quick connection<br />
of two tubes by means of tapered<br />
flanges. The tubes are centred by<br />
means of the inserted seals and a tight<br />
vacuum is ensured.<br />
Due to the sturdy design, high<br />
compression strengths can be<br />
achieved and various types of metal<br />
seals used. A decisive aspect in many<br />
applications. Tightening has to be done<br />
evenly, with just one or two screws.<br />
Tighten is guaranteed once a certain<br />
tightening torque has been reached.<br />
When opening the the chains, just one<br />
screw needs to be loosened to remove<br />
the chain - swift work ensured.<br />
Since suitable materials are used, such<br />
connections are usually not larger -<br />
and above all, they are lighter - than<br />
fixed flange couplings.<br />
There are various standard designs;<br />
but one of the main advantages of their<br />
strucure is that any diameter from NW<br />
16 to NW 630 can be offered at<br />
favourable prices. The entire system is<br />
designed for a wide range of diameters<br />
and forces so that corresponding<br />
combination of standardised parts can<br />
cater to many special demands with<br />
regard to sealing force, excess<br />
pressure and materials.<br />
The main advantages of this system<br />
are:<br />
- high tightening forces<br />
- even distribution of force<br />
- simple and swift assembly and<br />
removal<br />
- assembly possible even in places<br />
that are difficult to access<br />
- great flexibility of design<br />
- versatile use of various seals<br />
b) Range of applications<br />
These chains are the preferred choice<br />
for:<br />
- Vacuum technology and applications<br />
demanding the highest sealing<br />
tightness (metal seals)<br />
- Locations subject to radiation<br />
(nuclear industry, accelerators, etc.)<br />
where radiation-proof seals and quick<br />
assembly are essential<br />
- Connections that have to withstand<br />
high temperatures or baking (UHV<br />
connections, furnaces, etc.)<br />
- Chemical industry (corrosion<br />
resistant design), petrochemical<br />
industry<br />
- Cryogenics<br />
- Generally for connections with<br />
medium to large diameters<br />
- Customised designs for critical<br />
applications (restricted space,<br />
pressure, etc.)<br />
- Securing of units or assemblies with<br />
or without sealing but respective<br />
centering (securing of filters, valves,<br />
etc.)<br />
The application range is virtually<br />
limitless.<br />
The maximum diameter depends on<br />
requirements and is between 500 and<br />
630 mm.<br />
There are various materials for various<br />
purposes, such as antimagnetic<br />
systems made from aluminium and<br />
stainless steel.<br />
c) Special designs<br />
If diameter, applicable pressure or other<br />
properties of standard designs do not<br />
meet your requirements, customised<br />
designs can be offered - even in<br />
relatively small quantities.<br />
The simplest change is a change of<br />
diameter, since the requires nothing<br />
more than adjusting the strap length. It<br />
goes without saying that flanges and<br />
seal will have to be adjusted as well. If<br />
you need a customised system, please<br />
fill in the questionnaire on the last<br />
page.<br />
For products for chemical industry and<br />
excess pressure please see the other<br />
catalogue!<br />
<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
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Quick - release vacuum fittings<br />
41<br />
Checklist for customised parts<br />
Customer data:<br />
Skizze:<br />
Company .......................... Date .......................................<br />
Address ............................ Phone no. ..............................<br />
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......................................... Fax no. ...................................<br />
Family name, first name ...................................................<br />
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E-mail address .................................................................<br />
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Function / Dept. ...........................................................<br />
Project ..............................................................................<br />
Description of requirements<br />
Operating conditions<br />
o Vacuum<br />
p=............mbar (rough, high, ultra-high vacuum)<br />
o Pressure:<br />
pmax=...............bar<br />
o Operating temperature: T min:.............°C<br />
o Radiation<br />
(ionising)<br />
onone<br />
oweak<br />
omedium<br />
ohigh<br />
o Medium:<br />
o gaseous o ...................................<br />
o inert<br />
o reactive, corrosive<br />
o liquid o...................................<br />
o reactive, corrosive<br />
o pasty o...................................<br />
o granular, (solid)<br />
o foodstuff<br />
Environment:<br />
o Industry<br />
T max:............°C<br />
o...................................<br />
o CIP (Clean in Place)<br />
o SIP (Steam in Place)<br />
o can be sterilised<br />
o Chemical industry [ ]reactive, corrosive<br />
o Sterile<br />
o Inert gas<br />
o Subject to detergents, celaning agents<br />
o Subject to weather<br />
o Clean room<br />
Tubes:<br />
Outer diameter:<br />
Inner diameter:<br />
Length<br />
Material<br />
D=...................mm<br />
d=...................mm<br />
L=...................mm<br />
o Steel.................................<br />
o Stainless steel............................<br />
o Aluminium...................................<br />
o Nickel-plated aluminium<br />
o Glass o Duran<br />
o Quartz<br />
o Plastic.....................................<br />
o ....................................................<br />
Seals:<br />
Material o Elastomer o Viton<br />
o PTFE (Teflon)<br />
o FEP<br />
o Kalrez<br />
o.....................................<br />
o Metal<br />
o Aluminium<br />
o Copper<br />
o Silver-plated copper<br />
o Nickel<br />
o.......................................<br />
o Seal diameter: Dmax=...................mm<br />
Dmin=....................mm<br />
o Seal width: Bmax:=...................mm<br />
Bmin=.................... mm<br />
Flanges:<br />
o Standard flange system<br />
o ISO-KF (small flange)<br />
o ISO-K (clamping flanges)<br />
o CF (Conflat)<br />
o Tri-Clamp<br />
o...................................................<br />
o Special flange system<br />
o <strong>EVAC</strong> ISO tapered<br />
o <strong>EVAC</strong> ISO combi<br />
o <strong>EVAC</strong> CeFiX<br />
o...................................................<br />
Clamping device:<br />
o Screws<br />
o Clamping screws<br />
o Wall clamps<br />
o Chain clamps<br />
o Tightening o by hand o with tool<br />
o Material Glieder o GRP<br />
o Aluminium<br />
o Coated aluminium<br />
o Steel<br />
o Coated steel<br />
o Stainless steel<br />
o Material of straps o Coated steel<br />
o Stainless steel<br />
o No. of clamping screws o 1 o 2<br />
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<strong>EVAC</strong> AG Fabrikstrasse 16, CH-9470 Buchs (Switzerland) Tel. +41 81 750 06 70, Fax. +41 81 750 06 79<br />
info@evacvacuum.com www.evacvacuum.com
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