Searching For Correlations in HVM Wafer Testing

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Why No Direct Correlation? Contact Model • Contact resistance is governed by A-spots which are random • Total area of A-spots depends on force, material properties, contact motion and surface condition • Testing environment also affects Cres A-spots 6
Why No Direct Correlation? • The contact performance is determined by the interface quality. Probe card manufacturers control half of this. The other half is controlled by the down stream customers • There are real contact interface differences between the metrology tools used for quality check and the test floor environment – Different material properties – Different surface cleanliness – Different topography – Different contact motion 7
Page 1 and 2: Searching For Correlations in HVM W
Page 3 and 4: Introduction Current Status • Cos
Page 5: Direct Correlation Model Correlatio
Page 9 and 10: Wafers Per Setup Distribution Wafer
Page 11 and 12: Validation • To validate the simu
Page 13 and 14: Validation • The probe cards are
Page 15 and 16: Pin Level Probability Calculation M
Page 17 and 18: Limitation of the Current Model •
Page 19: Interface Probe card Probing proced

Searching For Correlations in HVM Wafer Testing

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