ROUTE60â¢: a new vertical probing technology

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Technology Introduction - Needles Buckling Beam style: higher possibility to control the gram force Needle section equivalent to 3 mils ∅ wire: Robust mechanics High current capability Flattened section of needles allows fine Pitch applications down to 60μm Patented June 3-6, 2007 IEEE SW Test Workshop 4
Technology Introduction - Design Gram Force adjustable between 5 to 8 g Small scrub action proportional to OD Tight Alignment: ±10 μm Planarity range : 40 μm Temperature range: -45 ÷ +150°C Hard Ceramic: CTE 3.3 ppm/°C close to Silicon Low needles friction Needles Assembly: no template required, easy tip replacement June 3-6, 2007 IEEE SW Test Workshop 5
Page 1 and 2: Raffaele Vallauri STMicroelectronic
Page 3: Table of contents ROUTE60 Technolog
Page 7 and 8: Product test flow description Packa
Page 9 and 10: Electrical results @ ROOM T (EWS3)
Page 11 and 12: Electrical results @ -40°C (EWS4)
Page 13 and 14: Scrub mark pictures @ +125°C Epoxy
Page 15 and 16: Electrical results after EWS1 and E
Page 17 and 18: Mechanical Results Alignment: Plana
Page 19 and 20: Scrub depth analysis @ ROOM T - 1TD
Page 21 and 22: 6M2T pad over active Bonding point
Page 23 and 24: Conclusions ROUTE60 is the first ve
Page 25: Acknowledgements A special thanks t

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ROUTE60â¢: a new vertical probing technology