ISMI Probe Council - Semiconductor Wafer Test Workshop
ISMI Probe Council - Semiconductor Wafer Test Workshop
ISMI Probe Council - Semiconductor Wafer Test Workshop
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MEMS Setup<br />
Mechanical Fixture<br />
2-Wire for<br />
CRes<br />
Measurement<br />
Keithley Current<br />
Source/Meter<br />
Load Cell<br />
Coupling<br />
Supplier Space Transformer<br />
(MLC. MLO, PCB) + <strong>Probe</strong><br />
Micrometer<br />
Rhodium Plate<br />
June 7 to 10, 2009<br />
IEEE SW <strong>Test</strong> <strong>Workshop</strong> 10