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ISMI Probe Council - Semiconductor Wafer Test Workshop

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Cantilever Setup<br />

Mechanical Fixture<br />

2-Wire for<br />

CRes<br />

Measurement<br />

Keithley Current<br />

Source/Meter<br />

Load Cell<br />

Coupling<br />

PCB<br />

Micrometer<br />

Rhodium Plate<br />

June 7 to 10, 2009<br />

IEEE SW <strong>Test</strong> <strong>Workshop</strong> 12

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