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High Power Diode Lasers - Center for Biomedical Optics and New ...

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Layers growth : 2 kinds of epitaxy<br />

MBE : Molecular Beam Epitaxy<br />

MOCVD : Metallo-Organic<br />

Chemical Vapor Deposition<br />

Molecules fluxes, with ≠ rates<br />

Gas fluxes, with ≠ rates<br />

Wafer en<br />

rotation<br />

400-500°<br />

Dissociated<br />

molecules<br />

Unused<br />

gas<br />

Rotating wafer ∼<br />

650°<br />

Liquid or solid sources<br />

Gas sources

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