High Power Diode Lasers - Center for Biomedical Optics and New ...
High Power Diode Lasers - Center for Biomedical Optics and New ...
High Power Diode Lasers - Center for Biomedical Optics and New ...
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Layers growth : 2 kinds of epitaxy<br />
MBE : Molecular Beam Epitaxy<br />
MOCVD : Metallo-Organic<br />
Chemical Vapor Deposition<br />
Molecules fluxes, with ≠ rates<br />
Gas fluxes, with ≠ rates<br />
Wafer en<br />
rotation<br />
400-500°<br />
Dissociated<br />
molecules<br />
Unused<br />
gas<br />
Rotating wafer ∼<br />
650°<br />
Liquid or solid sources<br />
Gas sources