Macquarie Electronics USA Inc. Mattson Suprema
Macquarie Electronics USA Inc. Mattson Suprema
Macquarie Electronics USA Inc. Mattson Suprema
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<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.<br />
<strong>Mattson</strong> <strong>Suprema</strong><br />
Dual Chamber Etch System<br />
SN MT3481<br />
• Currently Configured for 300mm wafer sizes<br />
• MFG Date: Nov-06<br />
• Install Type: Thru-the-wall (TTW)<br />
• Cassette Interface:<br />
o (3) Asyst 300mm Integrated FOUP Load-ports<br />
o Asyst AdVantag Carrier ID<br />
• Robot Handler:<br />
o Asyst Spartan EFEM w/integrated Wafer Mapping<br />
o E84 PCB mounted on EFEM<br />
• Pre-Aligner<br />
• Status Lamp (RYG)<br />
• User Interface (UI): Front/Rear<br />
o Viewsonic LCD Monitor<br />
o Light-pen, Keyboard<br />
o Rear Mon on 24” roll-a-round Cart<br />
• Process Chambers (PM1/2):<br />
o 4-stick Gas Lines per process module<br />
o STEC Z312/313 MFCs<br />
o MOD4 Faraday Shield & Circular Grid<br />
o <strong>Mattson</strong> End Point Detector<br />
o Mylar Template<br />
• Options:<br />
o Ionizer Bars<br />
o Pump Power Distribution Panel<br />
• Pumps:<br />
o Process: (2) Ebara EST300WN<br />
o LLK: Ebara ESR80WN<br />
• Main AC Rack/Cntrl<br />
• Power Requirements: 208V, 175A, 3-PH, 4-Wire, Freq 50/60Hz<br />
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided<br />
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge<br />
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer<br />
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.<br />
Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 or<br />
matt.hayes@macquarie.com.<br />
Visit our web site at www.macquarie.com/electronics<br />
Important Information www.macquarie.com/uk/important_information.htm<br />
© 2010 <strong>Macquarie</strong> Group
<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.<br />
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided<br />
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge<br />
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer<br />
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.<br />
Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 or<br />
matt.hayes@macquarie.com.<br />
Visit our web site at www.macquarie.com/electronics<br />
Important Information www.macquarie.com/uk/important_information.htm<br />
© 2010 <strong>Macquarie</strong> Group
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