Macquarie Electronics USA Inc.
Macquarie Electronics USA Inc.
Macquarie Electronics USA Inc.
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<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.<br />
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Gas Box Config (Pallet modules):<br />
Gas Line # Gas Flow (sccm) MFC Mfgr MFC Model<br />
PC 1<br />
1 O2 20 Aera FC-980<br />
2 C4F8 20 Lintec MC-2100NC<br />
3 CO 500 Aera FC-980<br />
4 Ar 500 Aera FC-980<br />
5 CH2F2 100 Lintec MC-2100NC<br />
6 CHF3 50 Aera FC-980<br />
7 C5F8 20 Lintec MC-2100NC<br />
8 CF4 100 Aera FC-980<br />
Backside Edge He 20 Aera FC-980C<br />
Backside Center He 20 Aera FC-980C<br />
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PC 2<br />
1 O2 50 Aera FC-980<br />
2 C4F8 30 Aera FC-980<br />
3 CO 500 Lintec MC-2100NC<br />
4 Ar 500 Aera FC-980<br />
5 CH2F2 100 Lintec MC-2100NC<br />
6 CHF3 50 Area FC-980<br />
7 C5F8 20 Lintec MC-2100NC<br />
8 CF4 100 Area FC-980<br />
Backside Edge He 20 Area FC-D980C<br />
Backside Center He 20 Area FC-D980C<br />
Turbo Pump(s):<br />
• PC1: Ebara ET600WS<br />
• PC1 CNTRL: Ebara 600W-ETC04<br />
• PC2: Ebara ET600WS<br />
• PC2 CNTRL: Ebara 600W-ETC04<br />
Chiller Type:<br />
• The chiller that was originally part of the tool is not included<br />
Status Lamp<br />
GEM / SECS<br />
(1) AC Power Box<br />
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided<br />
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge<br />
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer<br />
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.<br />
Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 or<br />
matt.hayes@macquarie.com.<br />
Visit our web site at www.macquarie.com/electronics<br />
Important Information www.macquarie.com/uk/important_information.htm<br />
© 2011 <strong>Macquarie</strong> Group
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