Macquarie Electronics USA Inc.
Macquarie Electronics USA Inc.
Macquarie Electronics USA Inc.
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<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.<br />
TEL Unity II 855DD<br />
Oxide Etch System<br />
SN U00610<br />
• Currently Configured for 200mm Wafer Sizes<br />
• MFG Date: Jun 1997<br />
• Model: U2-855DD<br />
• M/F Type: Unity II<br />
• Install Type: Stand Alone<br />
• System Software: v3.00-Rev206-PMS-3.11a<br />
• Cassette Interface:<br />
o SMIF Ready<br />
o Note: The Asyst SMIF Load-ports that were originally part of this tool are not included<br />
• Chambers:<br />
o PC-4 T/C Module (M/PR)<br />
o PC 1&2: Unity IIe 855DD Etch<br />
• Chamber Type: PT collar, BARE/Park<br />
• Electrostatic Chuck (ESC)<br />
• ESC Type: Ceramic<br />
• Process Kit Material: Quartz<br />
• RF PS1: ENI OEM-25B<br />
• Bottom Match: ENI MWD-25LD<br />
• Match CNTRL: ENI RFC-6<br />
• Servo: Yaskawa DR1-08AC-N00A<br />
• Process Kit PNs:<br />
Cat Parts S/N<br />
1 Electrode – Bottom 1D85-006978-13<br />
2 Electrode – Upper 1D10-202177-12<br />
3 Ring Focus 1D10-302209-15<br />
4 Plate Baffle 1D10-101475-11<br />
5 Shield DEPO 1D10-303124-21<br />
6 Ring Insulator C 1D05-300197-11<br />
7 Cover Bellows A 1D10-204619-11<br />
8 Cover Bellows B 1D10-302586-12<br />
9 Ring Insulator A7 1D05-300052-13<br />
10 Ring Insulator B2 1D05-300053-14<br />
11 Ring Shield B3 1D10-304010-12<br />
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided<br />
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge<br />
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer<br />
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.<br />
Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 or<br />
matt.hayes@macquarie.com.<br />
Visit our web site at www.macquarie.com/electronics<br />
Important Information www.macquarie.com/uk/important_information.htm<br />
© 2011 <strong>Macquarie</strong> Group
<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.<br />
o<br />
Gas Box Config (Pallet modules):<br />
Gas Line # Gas Flow (sccm) MFC Mfgr MFC Model<br />
PC 1<br />
1 O2 20 Aera FC-980<br />
2 C4F8 20 Lintec MC-2100NC<br />
3 CO 500 Aera FC-980<br />
4 Ar 500 Aera FC-980<br />
5 CH2F2 100 Lintec MC-2100NC<br />
6 CHF3 50 Aera FC-980<br />
7 C5F8 20 Lintec MC-2100NC<br />
8 CF4 100 Aera FC-980<br />
Backside Edge He 20 Aera FC-980C<br />
Backside Center He 20 Aera FC-980C<br />
o<br />
o<br />
o<br />
o<br />
o<br />
PC 2<br />
1 O2 50 Aera FC-980<br />
2 C4F8 30 Aera FC-980<br />
3 CO 500 Lintec MC-2100NC<br />
4 Ar 500 Aera FC-980<br />
5 CH2F2 100 Lintec MC-2100NC<br />
6 CHF3 50 Area FC-980<br />
7 C5F8 20 Lintec MC-2100NC<br />
8 CF4 100 Area FC-980<br />
Backside Edge He 20 Area FC-D980C<br />
Backside Center He 20 Area FC-D980C<br />
Turbo Pump(s):<br />
• PC1: Ebara ET600WS<br />
• PC1 CNTRL: Ebara 600W-ETC04<br />
• PC2: Ebara ET600WS<br />
• PC2 CNTRL: Ebara 600W-ETC04<br />
Chiller Type:<br />
• The chiller that was originally part of the tool is not included<br />
Status Lamp<br />
GEM / SECS<br />
(1) AC Power Box<br />
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided<br />
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge<br />
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer<br />
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.<br />
Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 or<br />
matt.hayes@macquarie.com.<br />
Visit our web site at www.macquarie.com/electronics<br />
Important Information www.macquarie.com/uk/important_information.htm<br />
© 2011 <strong>Macquarie</strong> Group
<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.<br />
This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be provided<br />
to any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledge<br />
and information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offer<br />
by you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.<br />
Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 or<br />
matt.hayes@macquarie.com.<br />
Visit our web site at www.macquarie.com/electronics<br />
Important Information www.macquarie.com/uk/important_information.htm<br />
© 2011 <strong>Macquarie</strong> Group
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