Hitachi Chemical Metal CMP Slurry and Low-K Material
Hitachi Chemical Metal CMP Slurry and Low-K Material
Hitachi Chemical Metal CMP Slurry and Low-K Material
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Concepts of HSG-7000HSG-7000RSi OnR: organic groupSpin-on DielectricSiloxane PolymerPorous <strong>Material</strong>k < 2.2<strong>Material</strong> Design Concepts・ Process Compatibility・ <strong>Low</strong> Organic Content・ <strong>Low</strong> Pore Volume・ Narrow Pore SizeDistributionGood Process Compatibility・ High Mechanical Strength・ Cu-<strong>CMP</strong> Resistivity
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