DRAFT 7/12/05 - MHz Electronics, Inc

vacuum technologiesSH-110Dry ScrollVacuum PumpINSTRUCTION MANUALMANUALE DI ISTRUZIONINOTICE DE MODE D’EMPLOIBEDIENUNGSHANDBUCH使 用 手 册使 用 説 明 書사용 설명서DRAFT 7/12/05Manual No. 699904311Revision AJuly 2005

SH-110Dry Scroll Vacuum PumpDRAFT 7/12/05Slo-Blo and Littelfuse are registered trademarks of Littelfuse, Inc.Copyright 2005Vacuum Technologies

SH-110 Dry Scroll Vacuum PumpWarrantyDRAFT 7/12/05Products manufactured by Seller are warranted againstdefects in materials and workmanship for twelve (12)months from date of shipment thereof to Customer, andSeller's liability under valid warranty claims is limited, atthe option of Seller, to repair, to replace, or refund of anequitable portion of the purchase price of the Product.Items expendable in normal use are not covered by thiswarranty. All warranty replacement or repair of parts shallbe limited to equipment malfunctions which, in the soleopinion of Seller, are due or traceable to defects in originalmaterials or workmanship. All obligations of Sellerunder this warranty shall cease in the event of abuse,accident, alteration, misuse, or neglect of the equipment.In-warranty repaired or replaced parts are warranted onlyfor the remaining unexpired portion of the original warrantyperiod applicable to the repaired or replaced parts.After expiration of the applicable warranty period, Customershall be charged at the then current prices for parts,labor, and transportation.Reasonable care must be used to avoid hazards. Sellerexpressly disclaims responsibility for loss or damagecaused by use of its Products other than in accordancewith proper operating procedures.Except as stated herein, Seller makes no warranty,expressed or implied (either in fact or by operation oflaw), statutory or otherwise; and, except as stated herein,Seller shall have no liability under any warranty,expressed or implied (either in fact or by operation oflaw), statutory or otherwise. Statements made by any person,including representatives of Seller, which are inconsistentor in conflict with the terms of this warranty shallnot be binding upon Seller unless reduced to writing andapproved by an officer of Seller.Warranty Replacementand AdjustmentAll claims under warranty must be made promptly afteroccurrence of circumstances giving rise thereto, and mustbe received within the applicable warranty period bySeller or its authorized representative. Such claims shouldinclude the Product serial number, the date of shipment,and a full description of the circumstances giving rise tothe claim. Before any Products are returned for repairand/or adjustment, written authorization from Seller or itsauthorized representative for the return and instructionsas to how and where these Products should be returnedmust be obtained. Any Product returned to Seller forexamination shall be prepaid via the means of transportationindicated as acceptable by Seller. Seller reserves theright to reject any warranty claim not promptly reportedand any warranty claim on any item that has been alteredor has been returned by non-acceptable means of transportation.When any Product is returned for examinationand inspection, or for any other reason, Customer shall beresponsible for all damage resulting from improper packingor handling, and for loss in transit, notwithstandingany defect or non-conformity in the Product. In all cases,Seller has the sole responsibility for determining the causeand nature of failure, and Seller's determination withregard thereto shall be final.If it is found that Seller's Product has been returned withoutcause and is still serviceable, Customer will be notifiedand the Product returned at the Customer's expense;in addition, a charge for testing and examination may bemade on Products so returned.3/1/00iv

SH-110 Dry Scroll Vacuum PumpContentsDeclaration of ConformityWarranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .ivWarranty Replacement and Adjustment. . . . . . . . .ivInstructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 1General Information . . . . . . . . . . . . . . . . . . . . . . . 1Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2Istruzioni Per L'uso . . . . . . . . . . . . . . . . . . . . . . . . . . . 3Informazioni Generali . . . . . . . . . . . . . . . . . . . . . . 3Immagazzinamento . . . . . . . . . . . . . . . . . . . . 3Installazione . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4Uso . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4Manutenzione . . . . . . . . . . . . . . . . . . . . . . . . . . . 4Instructions D'utilisation . . . . . . . . . . . . . . . . . . . . . . . 5Indications Générales . . . . . . . . . . . . . . . . . . . . . . 5Emmagasinage . . . . . . . . . . . . . . . . . . . . . . . . 5Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6Utilisation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6Gebrauchsanleitung. . . . . . . . . . . . . . . . . . . . . . . . . . . 7Allgemeine Hinweise . . . . . . . . . . . . . . . . . . . . . . 7Lagerung . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8Gebrauch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8Wartung . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8使 用 说 明 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9一 般 信 息 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9贮 存 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9安 装 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10使 用 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10维 护 与 维 修 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10はじめに . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11一 般 情 報 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11保 管 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11設 置 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12使 用 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12保 守 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12사용 지침. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13일반 정보 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13보관 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13설치 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14사용 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14유지 보수 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Technical Information. . . . . . . . . . . . . . . . . . . . . . . . 15Unpacking and Inspection . . . . . . . . . . . . . . . . . 17Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Electrical Connections . . . . . . . . . . . . . . . . . 18Run Currents . . . . . . . . . . . . . . . . . . . . . . . . 20Start Current . . . . . . . . . . . . . . . . . . . . . . . . 20Mechanical Connections . . . . . . . . . . . . . . . 21Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21Cleaning the Pump . . . . . . . . . . . . . . . . . . . 21Startup Procedure . . . . . . . . . . . . . . . . . . . . 21Shutdown Procedure . . . . . . . . . . . . . . . . . . 21Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . 22Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Kits and Service Options . . . . . . . . . . . . . . . 23Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Tip Seal Replacement . . . . . . . . . . . . . . . . . 23Request for Return Health and Safety CertificationList of FiguresFigure CaptionPage1 Interface Drawing with Dimensions . . . . . . 162 Pumping Speed Curves . . . . . . . . . . . . . . . 163 Outline Drawing and Principal Items . . . . . 174 Grounding Plug and Outlet . . . . . . . . . . . . . 205 ON/OFF Power Switch . . . . . . . . . . . . . . . . 216 Exploded View of Pump Body . . . . . . . . . . 24List of TablesTable Title Page1 Specifications . . . . . . . . . . . . . . . . . . . . . . . 152 SH-110 Power Cord Selection. . . . . . . . . . . 193 SH-110 Typical Run Currents . . . . . . . . . . . 204 Typical SH-110 Maximum Starting Current andDuration @ 115 V 205 Troubleshooting Chart. . . . . . . . . . . . . . . . . 226 Tip Seal Replacement Kit . . . . . . . . . . . . . . 237 Factory Service Options . . . . . . . . . . . . . . . 23DRAFT 7/12/05v

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SH-110 Dry Scroll Vacuum PumpInstructions for UseGeneral InformationThis equipment is designed for use by professionals. Theuser should read this instruction manual and any otheradditional information supplied by Vacuum Technologiesbefore operating the equipment. Vacuum Technologieswill not be held responsible for any events that occur dueto non-compliance with these instructions, improper useby untrained persons, non-authorized interference withthe equipment, or any action contrary to that provided forby specific national standards.The SH-110 is a hermetic, dry scroll vacuum pump. Thispump is suitable for pumping air or inert gases. The pumpis not intended to pump corrosive, explosive, or particulate-forminggases.The following paragraphs contain all the information necessaryto guarantee the safety of the operator when usingthe equipment. Detailed information is supplied in“Technical Information” on page 15.This manual uses the following standard safety protocol:WARNINGCAUTIONThe warning messages are for attractingthe attention of the operator to a particularprocedure or practice which, if notfollowed correctly, could lead to seriousinjury.The caution messages are displayedbefore procedures, which if not followed,could cause damage to theequipment.StorageWhen transporting and storing the pump, the followingenvironmental requirements should not be exceeded:Temperature:Relative humidity:Preparation for InstallationThe pump is supplied in a special protective packing. Ifthis shows signs of damage, which may have occurredduring transport, contact your local sales office.Total weight of the packing, SH-110 pump included, isapproximately 20 kg (44 lbs).WARNINGNOTE−20 °C to +60 °C (−4 °F to 140 °F)0 to 95% (non-condensing)When unpacking the pump, be sure notto drop it and avoid any kind of suddenimpact or shock vibration to it.Normal exposure to the environmentcannot damage the pump. Nevertheless,it is advisable to keep the pumpinlet closed until the pump is installedin the system.DRAFT 7/12/05NOTEThe notes contain important informationtaken from the text.1

SH-110 Dry Scroll Vacuum PumpDRAFT 7/12/05InstallationDo not install or use the pump in an environmentexposed to atmospheric agents (rain, snow, ice), dust,aggressive gases, or in explosive environments or thosewith a high fire risk.If placing the SH-110 pump inside an enclosure, provideample room to supply ambient air to both the front andrear air intakes of the pump.During operation, the following environmentalconditions must be respected:Temperature:Relative humidity:CAUTIONConnect the pump to the power supply using an IEC-320style power cord of at least 10 A capacity.Use+5 °C to +40 °C (41 °F to 104 °F)0 to 95% (non-condensing)Be certain that your electrical mainspower voltage corresponds to that indicatedon the white tab (110 or 220)adjacent to the On/Off switch on therear of the pump.If voltage changeover is required, usea small screwdriver to remove the tabholder from the power module. Positionthe white tab so that the correct voltagefaces out and reinstall the tab holder.In order to reach maximum vacuum, the pump must beleft running for about an hour with the inlet sealed.There are no special instructions for starting the pump; itneed only be switched on using the On/Off switch.The inlet valve will open 10 seconds after the pump isstarted.MaintenancePersonnel responsible for pump operation and maintenancemust be well-trained and aware of the accidentprevention rules.WARNINGNOTE❑ Death may result from contact withhigh voltages. Always take extreme careand observe the accident preventionregulations in force.❑ When machine is powered up,be careful of moving parts and highvoltages.❑ If you have to perform maintenanceon the pump after a considerable timein operation, allow it to cool as the temperatureof the outer surface may be inexcess of 60 °C.❑ Always disconnect your powersupply to the pump before beginningmaintenance work.Before returning the pump to the factoryfor repair, the “Health and Safety” sheetattached to this instruction manual mustbe completed and sent to the local salesoffice. A copy of the sheet must beinserted in the pump package beforeshipping.If a pump is to be discarded, it must be disposed of inaccordance with specific national standards.WARNINGThe pump is designed for operationwith neutral or noncorrosive fluids. Itis absolutely forbidden to use it withpotentially explosive or inflammablesubstances.There are no special instructions for stopping the pump; itneed only be disconnected from the electric powersource by the On/Off switch.The inlet valve will close immediately after the pump isstopped.2

Istruzioni Per L'usoSH-110 Dry Scroll Vacuum PumpInformazioni GeneraliQuesta apparecchiatura è destinata ad uso professionale.L'utilizzatore deve leggere attentamente il presente manualedi istruzioni ed ogni altra informazione addizionalefornita dalla Vacuum Technologies prima dell'utilizzodell'apparecchiatura. La Vacuum Technologies si ritienesollevata da eventuali responsabilità dovute all'inosservanzatotale o parziale delle istruzioni, ad uso improprioda parte di personale non addestrato, ad interventi nonautorizzati o ad uso contrario alle normative nazionalispecifiche.La pompa a secco Scroll SH-110 è una pompa ermeticaadatta a pompare aria or gas inerti.Questa pompa non è adatta per pompare gas or particelletossiche, corrosive or esplosive.Nei paragrafi seguenti sono riportate tutte le informazioninecessarie a garantire la sicurezza dell'operatore durantel'utilizzo dell'apparecchiatura. Per informazioni dettagliate,vedere “Technical Information” a pagina 15.Questo manuale utilizza le seguenti convenzioni:PERICOLOATTENZIONEI messaggi di pericolo attirano l'attenzionedell'operatore su una procedura ouna pratica specifica che, se non eseguitain modo corretto, potrebbe provocaregravi lesioni personali.I messaggi di attenzione sono visualizzatiprima di procedure che, se nonosservate, potrebbero causare danniall'apparec-chiatura.ImmagazzinamentoDurante il trasporto e l'immagazzinamento della pompanon devono essere superate le seguenti condizioniambientali:Temperatura: –20 °C a + 60 °CUmidità relativa: 0 a 95% (non condensante)Preparazione Per L’installazioneLa pompa viene fornita in un imballo protettivo speciale;se si presentano segni di danni, che potrebbero essersiverificati durante il trasporto, contattare l'ufficio venditelocale.Il peso dell'imballo, comprensivo della pompa SH-110, èdi circa 20 kg.PERICOLONOTADurante l'operazione di disimballaggio,prestare particolare attenzione a nonlasciar cadere la pompa e a non sottoporlaad urti o vibrazioni.La pompa non può essere danneggiatarimanendo semplicemente espostaall'atmosfera. Si consiglia comunque dimantenerla chiusa fino al momentodell'installazione sul sistema ondeevitare eventuale inquinamento dapolvere.DRAFT 7/12/05NOTALe note contengono informazioniimportanti estrapolate dal testo.3

SH-110 Dry Scroll Vacuum PumpDRAFT 7/12/05InstallazioneNon installare e/o utilizzare la pompa in ambienti espostiad agenti atmosferici (pioggia, gelo, neve), polveri, gasaggressivi, in ambienti esplosivi o con elevato rischio diincendio.Durante il funzionamento è necessario che siano rispettatele seguenti condizioni ambientali:Temperatura: +5 °C a +40 °CUmidità relativa: 0 a 95% (non condensante)ATTENZIONECollegare la pompa alla rete utilizzando un cavo da 10 Acon presa IEC-320.UsoVerificate che la tensione di rete corrispondaai valori indicati sulla etichettabianca (110 or 220) adiacente all' interruttoreOn/Off sul retro della pompa. Seil cambiamento di tensione è richiesto,utilizzate un piccolo cacciavite pertogliere la linguetta bianca dal modulodi potenza. Posizionate la linguettabianca in corrispondenza al voltaggiodi rete e riinstallate il tutto.Prima di mettere la pompa in servizio effettivo è necessario,per il raggiungimento del vuoto limite, scaldare lapompa per circa 60 minuti lasciandola lavorare con laflangia di ingresso chiusa.Non ci sono particolari istruzioni per far partire la pompa;basta accenderla utilizzando l'interruttore On/Off.La valvola di ingresso si apre 10 secondi dopo la partenzadella pompa.ManutenzioneIl personale addetto alla condotta ed alla manutenzionedella pompa deve essere ben addestrato e deve avere unaapprofondita conoscenza delle norme antinfortunistiche.PERICOLONOTA❑ Le alte tensioni possono causaremorte al contatto. Operare sempre conla massima cautela e secondo le normeantinfortunistiche in vigore.❑ Quando la macchina è alimentataprestare attenzione per la presenza diparti in movimento e di alta tensione.❑ Nel caso si debba procedere ad operazionidi manutenzione della pompa altermine di un periodo di esercizio, ènecessario lasciarla raffreddare, poichèla temperatura esterna può superare i60 °C.❑ Escludere sempre l'alimentazionedella pompa prima di compiere operazionidi manutenzione.Prima di rispedire al costruttore unapompa per riparazioni, è indispensabilecompilare e far pervenire al locale ufficiovendite la scheda “Sicurezza eSalute” allegata al presente manuale diistruzioni. Copia della stessa deveessere inserita nell'imballo della pompaprima della spedizione.Qualora una pompa dovesse essere rottamata, procederealla sua eliminazione nel rispetto delle normative nazionalispecifiche.PERICOLOLa pompa è progettata per operare confluidi neutri o non corrosivi. E' assolutamentevietato l'impiego con sostanzepotenzialmente esplosive, infiammabilio velenose.Lo spegnimento della pompa non richiede particolarimanovre; è sufficiente scollegarla dall'alimentazioneelettrica agendo sull'apposito interruttore.NOTALa valvola di ingresso si chiude immediatamentequando si spegne la pompa.4

Instructions D'utilisationSH-110 Dry Scroll Vacuum PumpIndications GénéralesCet appareillage a été conçu en vue d'une utilisation professionnelle.Il est conseillé à l'utilisateur de lire attentivementcette notice d'instructions ainsi que toute autreindication fournie par Vacuum Technologies avant d'utiliserl'appareil. Vacuum Technologies décline par conséquenttoute responsabilité en cas de non-respect totalou partiel des instructions fournies, d'utilisation incorrectede la part d'un personnel non formé, d'opérationsnon autorisées ou d'un emploi contraire aux réglementationsnationales spécifiques.La pompe SH-110, est une pompe à vide sèche et hermétique.Cette pompe convient pour le pompage de l'air oude gaz inertes. Elle n'a pas été conçue pour le pompagede gaz toxiques, corrosifs, explosifs, ou susceptibles degénérer des particules.Les paragraphes suivants fournissent toutes les indicationsnécessaires pour garantir la sécurité de l'opérateur pendantl'utilisation de l'appareillage. Les détails sont fournisen page 15 dans le paragraphe “Technical Information”.Cette notice utilise les signes conventionnels suivants:DANGERATTENTIONLes messages de danger attirent l'attentionde l'opérateur sur une procédureou une manœuvre spéciale dont lamauvaise exécution risque de provoquerde graves lésions au personnel.Les messages d'attention apparaissentavant certaines procédures dont lenon-respect peut endommager sérieusementl'appareillage.EmmagasinagePendant le transport et l'emmagasinage de la pompe, ilfaut veiller à respecter les conditions environnementalessuivantes:Température: –20 °C à +60 °CHumidité relative: 0 à 95% (non condensante)Préparation Pour L’installationLa pompe est fournie dans un emballage de protectionspécial; si l'on constate des marques de dommages pouvants'être produits pendant le transport, contacter aussitôtle bureau de vente local.Le poids total de l'emballage et de la pompe SH-110 estd'environ 20 kg.DANGERNOTENTPendant l'opération d'ouverture del'emballage, veiller tout particulièrementà ne pas laisser tomber la pompeet à ne lui faire subir aucun choc niaucune vibration.La pompe ne peut être endommagée enrestant simplement exposée à l'atmosphère.Il est de toute façon conseillé dela garder dans son emballage jusqu'aumoment de sa mise en fonction afind'éviter toute pollution due à lapoussièreDRAFT 7/12/05NOTENTLes notes contiennent des renseignementsimportants, extrapolés du texte.5

SH-110 Dry Scroll Vacuum PumpInstallationNe pas installer et/ou utiliser la pompe dans des milieuxexposés aux agents atmosphériques (pluie, gel, neige), àdes poussières, à des gaz agressifs ainsi que dans desmilieux explosifs ou à fort risque élevé d'incendie.Pendant le fonctionnement, il est nécessaire de respecterles conditions environnementales suivantes:L'arrêt de la pompe ne requiert aucune manœuvre particulière;il faut seulement la déconnecter de l'alimentationélectrique grâce au bouton On/Off.NOTENTLa valve d'entrée se ferme immédiatementà l'arrêt de la pompe.DRAFT 7/12/05Température: +5 °C à +40 °CHumidité relative: 0 à 95% (non condensante)ATTENTIONConnecter la pompe au générateur de tension par le biaisd'un cordon d'alimentation IEC-320 d'une capacité minimalede 10 ampères.UtilisationS'assurer que la tension fournie parvotre générateur corresponde à celleindiquée sur l'étiquette blanche(110 ou 220) adjacente au boutonOn/Off au rétro de la pompe. Pourchanger la tension de travail, utilisez unpetit tourne-vis pour retirer la protectionde l'étiquette du module de tension.Positionner l'étiquette blanche en facede la tension désirée et remettrela protection.Avant la mise en service de la pompe, il est nécessaire,pour atteindre le vide maximum, que la pompe tourneenviron une heure avec l'entrée hermétiquement fermée.Il n'y a pas d'instructions spéciales pour démarrer lapompe; la mise en marche se fait à l'aide du commutateurOn/Off.La valve d'entrée s'ouvre 10 secondes après la mise enmarche de la pompe.DANGERLa pompe a été conçue pour fonctionneravec des fluides neutres ou noncorrosifs. L'emploi de substances potentiellementexplosives, inflammables ouvénéneuses est strictement interdit.MaintenanceLe personnel chargé de la conduite et de la maintenancede la pompe doit avoir reçu la formation nécessaire etposséder une connaissance approfondie des normes deprévention des accidents du travail.DANGERNOTENT❑ Les hautes tensions peuvent entraînerla mort par contact. Veiller à toujoursopérer avec le maximum de prudenceet dans le respect des normes deprévention des accidents du travail envigueur.❑ Lorsque la machine est sous alimentation,faire attention à la présenced'organes en mouvement et de hautetension.❑ En cas de nécessité de procéder à desopérations de maintenance de lapompe au terme d'une période de fonctionnement,il est indispensable de lalaisser refroidir car sa températureextérieure peut être supérieure à 60 °C.❑ Avant toute opération de maintenance,il est impératif de toujourscouper l'alimentation de la pompe.Avant de retourner une pompe au constructeurpour réparation, il est indispensablede remplir et d'adresser aubureau local de vente la fiche “Sécuritéet Santé” jointe à la présente noticed'instructions. Une copie de celle-cidevra être mise dans l'emballage de lapompe avant expédition.En cas de mise au rebut de la pompe, procéder à sonélimination conformément aux réglementations nationalesen la matière.6

SH-110 Dry Scroll Vacuum PumpGebrauchsanleitungAllgemeine HinweiseDieses Gerät ist für den professionellen Gebrauchbestimmt. Vor dem Gebrauch soll der Benutzer diesesHandbuch sowie alle weiteren von Vacuum Technologiesmitgelieferten Zusatzinformationen genau lesen. Bei vollständigerbzw. teilweiser Nichtbeachtung der enthaltenenHinweise, unsachgemäßem Gebrauch durch ungeschultesPersonal, nicht autorisierten Eingriffen und Benutzungunter Mißachtung der nationalen Bestimmungenübernimmt Firma Vacuum Technologies keinerlei Haftung.Die Pumpe SH-110 ist eine hermetisch dichte trockenlaufendeVakuumpumpe (Scrollpumpe).Diese Vorvakuumpumpe eignet sich für das Pumpen vonLuft oder inerten Gasen. Die Pumpe ist nicht zumAbpumpen von toxischen, korrosiven oder explosivenGasen geeignet. Ferner sind Partikel zu vermeiden.In den folgenden Abschnitten sind alle erforderlichenInformationen für die Sicherheit des Bedieners bei derVerwendung des Geräts aufgeführt. Nähere Einzelheitensind den “Technical Information” auf Seite 15 zu entnehmen.In dieser Gebrauchsanleitung werden Sicherheitshinweisefolgendermaßen hervorgehoben:GEFAHRDie Gefahrenhinweise richten dieAufmerksamkeit des Bedieners auf einespezielle Prozedur oder Praktik, die beiunkorrekter Ausführung schwere Personenschädenzur Folge haben könnte.LagerungWährend des Transports und der Lagerung der Pumpe sollendie folgenden Umgebungsbedingungen gegeben sein:Temperatur: −20 °C bis +60 °CRelative Feuchtigkeit: 0 bis 95% (niederschlagsfrei)Vor Der InstallationDie Pumpe wird in einer speziellen Schutzverpackunggeliefert. Eventuelle Transportschäden sind der zuständigenörtlichen Verkaufsstelle zu melden.Das Verpackungsgewicht beträgt, einschließlich derPumpe SH-110, ungefähr 20 kg.GEFAHRANMERKUNGBeim Auspacken ist darauf zu achten,daß die Pumpe nicht fallengelassenoder Stößen oder Vibrationen ausgesetztwird.Die Pumpe kann, wenn sie einfachder Atmosphäre ausgesetzt ist, nichtbeschädigt werden. Sie sollte jedoch biszur Installation an der Anlage geschlossenbleiben, um Verunreinigungendurch Staub zu vermeiden.DRAFT 7/12/05ACHTUNGDie Warnhinweise vor bestimmtenProzeduren machen den Bedienerdarauf aufmerksam, daß bei NichteinhaltungSchäden am Gerät entstehenkönnen.ANMERKUNGDie Anmerkungen enthalten wichtigeInformationen, die aus dem Text hervorgehobenwerden.7

SH-110 Dry Scroll Vacuum PumpInstallationDie Pumpe darf nicht in Umgebungen installiert und/oderbenutzt werden, die ungeschützt vor Witterungsbedingungen(Regen, Frost, Schnee), Staub und aggressivenGasen sind und in denen Explosions oder erhöhteBrandgefahr besteht.Während des Betriebs sollen die folgenden Umgebungsbedingungengegeben sein:Das Ausschalten der Pumpe erfordert keine speziellenSchritte, sie braucht nur durch Betätigung des SchaltersOn/Off abgeschaltet werden.ANMERKUNGDas Einlaßventil schließt unverzüglichnach Abschalten der Pumpe.DRAFT 7/12/05Temperatur: +5 °C bis +40 °CRelative Feuchtigkeit 0 bis 95% (niederschlagsfrei)ACHTUNGSchließen Sie die Pumpe über ein Netzkabel (IEC-320Typ) für mindestens 10 A an.GebrauchStellen Sie sicher, daß die Betriebsspannungmit der auf dem weißen Schild(110 oder 220) neben dem EinschalterOn/Off auf der Rückseite der Pumpeübereinstimmt.Falls ein Wechsel der Spannungerforderlich wird, nehmen Sie einenkleinen Schraubendreher üm dasAbdeckschild zu entfernen. Drehen Sienun den Spannungsselektor auf diegewünschte Spannung und schließendas Abdeckschild. Sie sehen jetzt aufeinem weißen Hintergrund die vonIhnen gewählte Spannung.Vor der eigentlichen Inbetriebnahme der Pumpe ist es zurErreichung des Grenzvakuums erforderlich, die Pumpeungefähr eine Stunde laufen zu lassen.Die Einschaltung der Pumpe erfordert keine speziellenSchritte, es ist lediglich der Schalter On/Off zu betätigen.Das Einlaßventil wird ca. 10 sec. Nach Einschalten derPumpe öffnen.GEFAHRDie Pumpe ist für den Betrieb mit neutralenund nicht korrosiven Fluidenkonzipiert. Der Einsatz mit potentiellexplosions- oder feuergefährlichen odergiftigen Substanzen ist streng verboten.WartungDas für den Betrieb und die Wartung zuständige Personalsoll geschult sein und über eine solide Kenntnis derUnfallschutzvorschriften verfügen.GEFAHRANMERKUNG❑ Hochspannungen können bei Kontakttödliche Folgen haben. Es ist stetsmit größter Vorsicht und gemäß der geltendenUnfallschutzvorschriften vorzugehen.❑ Bei eingeschaltetem Gerät ist aufBewegungs- und Hochspannungsteilezu achten.❑ Falls die Pumpe im Anschluß an denBetrieb gewartet werden soll, ist abzuwarten,bis sie abgekühlt ist, da ihreOberfläche eine Temperatur von 60 °Cüberschreiten kann.❑ Vor Wartungsarbeiten ist die Pumpestets energiefrei zu schalten.Bevor dem Hersteller eine Pumpe zurReparatur zurückgesandt wird, ist dasFormular “Sicherheit und Gesundheit”in der Anlage zum vorliegenden Handbuchauszufüllen und der lokalenVerkaufsstelle zuzustellen. Eine Kopiedes Formulars ist der Pumpenverpackungvor dem Versand beizulegen.Bei eventueller Verschrottung einer Pumpe ist dieseentsprechend der einschlägigen nationalen Vorschriftenzu entsorgen.8

SH-110 Dry Scroll Vacuum Pump使 用 说 明一 般 信 息本 设 备 仅 可 由 专 业 人 员 操 作 和 使 用 。 操 作 本 设 备 之 前 , 使用 人 员 应 认 真 阅 读 本 使 用 手 册 及 由 Vacuum Technologies提 供 的 其 它 所 有 相 关 说 明 。Vacuum Technologies 对 于 因未 按 使 用 手 册 指 导 进 行 违 规 操 作 、 未 经 培 训 人 员 执 行 不当 操 作 、 未 获 授 权 的 设 备 连 接 、 或 其 它 与 特 定 国 家 标 准 及规 章 相 违 反 的 行 为 而 引 起 的 任 何 问 题 或 事 件 , 概 不 负 责 。SH-110 为 气 密 型 干 滚 式 真 空 泵 。 此 泵 可 稳 定 地 泵 吸 空 气或 惰 性 气 体 。 此 泵 并 非 设 计 用 于 泵 吸 有 毒 、 腐 蚀 性 、 爆 炸性 或 含 有 细 微 颗 粒 的 气 体 。以 下 说 明 旨 在 提 供 使 用 本 设 备 时 保 障 操 作 员 安 全 需 遵 守的 事 项 及 有 关 信 息 。 详 情 说 明 , 请 参 阅 第 15 页 “ 技 术 信息 ”。本 手 册 使 用 以 下 标 准 安 全 警 示 标 志 :警 告 警 告 信 息 用 于 引 起 操 作 人 员 的 注 意 力 ,使 其 注 意 某 个 特 定 步 骤 或 如 果 操 作 不 当便 会 导 致 严 重 人 身 伤 害 的 操 作 。注 意注 意 事 项 消 息 显 示 在 操 作 步 骤 之 前 , 必须 遵 守 , 否 则 会 损 坏 设 备 。注 释 注 释 包 含 从 正 文 摘 录 的 重 要 信 息 。贮 存当 将 泵 运 输 到 其 它 地 方 或 进 行 贮 存 时 , 不 应 超 出 以 下 环境 范 围 要 求 :温 度 :−20 °C 至 +60 °C (−4 °F 至 140 °F)相 对 湿 度 : 0 至 95% ( 无 冷 凝 )安 装 准 备本 泵 在 发 货 时 采 用 特 殊 的 保 护 性 包 装 。 如 果 发 现 运 输 期间 可 能 造 成 的 包 装 受 损 迹 象 , 请 与 当 地 销 售 办 事 处 联 系 。包 装 总 重 量 , 包 括 SH-110 泵 本 身 在 内 , 约 为 20 千 克(44 磅 )。警 告注 释当 拆 开 泵 包 装 时 请 小 心 谨 慎 , 避 免 将 泵跌 落 , 或 对 其 造 成 较 大 撞 击 或 振 动 。在 正 常 环 境 中 置 放 和 使 用 , 不 会 对 泵 造成 任 何 损 害 。 但 建 议 您 在 将 泵 安 装 到 系统 之 前 , 让 泵 的 入 口 保 持 密 闭 。DRAFT 7/12/059

SH-110 Dry Scroll Vacuum PumpDRAFT 7/12/05安 装不 要 将 泵 安 装 在 易 受 自 然 天 气 侵 害 ( 如 下 雨 、 下 雪 、 结 冰 )的 环 境 中 , 不 要 在 多 尘 、 周 围 存 在 腐 蚀 性 气 体 、 易 发 生 爆炸 场 所 或 易 引 起 火 灾 的 环 境 中 使 用 本 泵 。操 作 期 间 , 必 须 留 意 并 符 合 以 下 环 境 条 件 。温 度 :+5 °C 至 +40 °C (41 °F 至 104 °F)相 对 湿 度 : 0 至 95% ( 无 冷 凝 )注 意使 用 额 定 电 流 至 少 为 10 A 的 IEC-320 型 电 源 电 缆 , 将 泵连 接 到 主 供 电 电 源 上 。使 用为 确 保 达 到 最 高 真 空 度 , 必 须 让 泵 在 入 口 密 封 密 闭 的 情况 下 运 行 至 少 约 一 小 时 。起 动 泵 并 无 特 别 要 求 ; 只 需 使 用 On/Off 开 关 将 泵 置 于 电源 打 开 状 态 。泵 起 动 后 , 入 口 阀 将 打 开 约 10 秒 钟 。警 告检 查 并 确 保 设 备 的 供 电 电 源 电 压 与 泵 体背 面 电 源 开 关 旁 边 的 调 整 片 指 示 的 电 压一 致 (110V 或 220V)。如 果 需 要 修 改 电 压 , 请 使 用 小 号 螺 丝 刀拨 开 电 源 模 块 上 的 调 整 片 护 架 。 将 白 色调 整 片 拨 到 指 向 正 确 的 电 压 , 然 后 重 新装 回 调 整 片 护 架 。此 泵 设 计 用 于 输 送 中 性 或 非 腐 蚀 性 液体 。 严 禁 用 此 泵 输 送 存 在 潜 在 爆 炸 、易 燃 或 毒 性 危 险 的 物 质 。维 护 与 维 修负 责 操 作 和 维 护 泵 的 人 员 , 必 须 接 受 良 好 的 专 业 培 训 , 并熟 知 突 发 事 件 预 防 及 处 理 规 程 。警 告 ❑ 接 触 高 电 压 将 有 导 致 死 亡 的 危 险 。应 始 终 保 持 格 外 小 心 , 并 遵 守 预 防 突 发事 件 的 规 章 和 要 求 。❑ 机 器 处 于 开 机 运 转 状 态 时 , 应 特 别 留意 避 开 移 动 部 件 和 高 压 区 。❑ 如 果 在 操 作 一 定 时 间 之 后 需 要 对 泵 进行 维 修 检 查 , 应 让 泵 先 完 全 冷 却 ,因 为 操 作 期 间 泵 体 外 表 的 温 度 可 能 超 过60 °C。注 释❑ 在 开 始 维 修 之 前 , 必 须 先 断 开 泵 的 电源 连 接 。在 将 泵 退 回 工 厂 修 理 之 前 , 必 须 填 写 本手 册 中 附 带 的 “ 健 康 与 安 全 证 明 ” 单 ,并 将 其 寄 至 当 地 销 售 办 事 处 。 退 运 产 品进 行 包 装 时 , 应 将 此 证 明 单 的 一 份 副 本放 入 泵 的 包 装 箱 内 。如 果 需 要 将 泵 废 弃 并 丢 弃 , 必 须 遵 守 本 国 的 特 定 废 品 处理 规 章 。停 止 泵 并 无 特 别 要 求 ; 只 需 使 用 On/Off 开 关 将 泵 置 于 断开 电 源 的 状 态 。泵 停 止 后 , 入 口 阀 将 立 即 关 闭 。10

SH-110 Dry Scroll Vacuum Pumpはじめに一 般 情 報本 装 置 は、 専 門 家 による 使 用 を 想 定 して 設 計 されています。ユーザーは 装 置 を 使 用 する 前 に、 本 取 扱 説 明 書 、および Varian Technologies が 提 供 するその 他 の 情 報 を 読んでください。これらの 説 明 書 の 指 示 を 守 らなかった場 合 や 未 熟 練 者 による 誤 用 、 装 置 に 対 する 未 認 可 の 干渉 、または 該 当 する 国 内 基 準 に 反 する 行 動 によって 発 生した 事 態 に 対 し 責 任 を 負 いません。SH-110 は 密 封 式 ドライ スクロール 真 空 ポンプです。このポンプは、エアまたは 不 活 性 ガスのポンピングに 適 しています。ポンプは、 有 害 ガス、 腐 食 性 ガス、 爆 発 性 ガス、または 粒 子 生 成 ガスには 適 していません。下 記 には 装 置 を 使 用 するオペレータの 安 全 を 保 障 するための 情 報 が 記 載 されています。 詳 細 情 報 は、15ページの “Technical Information” に 記 載 されています。本 マニュアルは、 以 下 の 標 準 安 全 規 約 を 採 用 しています。警 告注 意警 告 文 は、 正 しく 守 らなければ 深 刻 なケガにつながる 特 定 の 手 順 や 業 務 について、オペレーターに 注 意 を 促 すためのものです。注 意 文 は、 守 らなければ 装 置 への 損 傷につながるような 手 順 の 前 に 記 載 されています。保 管ポンプを 輸 送 および 保 管 する 際 は、 以 下 の 環 境 条 件 を守 ってください。温 度 :相 対 湿 度 :取 付 け 準 備ポンプは 特 別 な 保 護 梱 包 材 に 入 れられて 供 給 されます。梱 包 材 にキズや 破 れがある 場 合 、 輸 送 中 に 損 傷 したものと 思 われますので、 最 寄 の 営 業 所 にお 問 い 合 わせください。SH-110 ポンプを 含 む 荷 物 の 総 重 量 は 約 20 kg です。警 告注 記−20 °C ~ +60 °C (−4 °F ~ 140 °F)0 ~ 95% ( 結 露 なきこと)ポンプを 開 梱 する 際 に 落 としたり、 衝撃 や 振 動 を 与 えないようにしてください。通 常 の 環 境 下 ではポンプは 損 傷 することはありません。ただし、ポンプをシステムに 設 置 するまでポンプの 吸 気 口は 閉 じておくことをお 勧 めします。DRAFT 7/12/05注 記注 記 は、 文 章 から 選 択 された 重 要 な 情報 を 含 んでいます。11

SH-110 Dry Scroll Vacuum PumpDRAFT 7/12/05設 置大 気 中 の 作 用 物 ( 雨 、 雪 、 氷 )、ダスト、 悪 性 ガスにさらされるような 環 境 、 爆 発 性 雰 囲 気 、または 火 災 危 険 度 の高 い 環 境 下 でポンプを 設 置 したり、 使 用 したりしないでください。動 作 時 は 以 下 の 環 境 条 件 に 準 拠 してください:温 度 :相 対 湿 度 :注 意容 量 が 10A 以 上 の IEC-320 型 パワー コードを 使 用 してポンプを 電 源 に 接 続 してください。使 用+5 °C ~ +40 °C (41 °F ~ 104 °F)0 ~ 95% ( 結 露 なきこと)ご 使 用 の 主 電 力 電 圧 が、ポンプ 背 面 のオン/オフ スイッチの 隣 にある 白 いタブに 記 載 されている 数 値 (110 または220) と 一 致 していることを 確 認 してください。電 圧 変 換 が 必 要 な 場 合 、 小 型 のドライバーでパワー モジュールのタブ ホルダを 取 り 外 します。 正 しい 電 圧 値 が 外側 から 見 えるように 白 いタブの 位 置 を決 め、タブ ホルダを 元 の 位 置 に 戻 します。最 大 真 空 圧 に 達 するには、 吸 入 口 を 閉 じた 状 態 でポンプを 約 1 時 間 、 回 しておく 必 要 があります。ポンプを 始 動 する 上 で 特 別 な 手 順 は 要 りません。オン /オフ スイッチをオンにするだけです。ポンプが 始 動 してから 約 10 秒 後 に 吸 入 バルブが 開 きます。保 守ポンプの 操 作 • 保 守 責 任 者 は、 十 分 な 訓 練 を 受 けており事 故 防 止 規 則 に 精 通 している 必 要 があります。警 告注 記❑ 高 電 圧 に 触 れると 死 亡 する 恐 れがあります。 常 に 十 分 な 注 意 を 払 い、 事 故防 止 規 則 を 守 ってください。❑ 機 械 が 起 動 したとき、 可 動 部 品 および 高 電 圧 に 注 意 してください。❑ ポンプを 長 時 間 使 用 した 後 で 保 守 作業 を 行 わなければならない 場 合 、 冷 めるまで 待 ってください。 外 部 表 面 の 温度 は 60 °C を 超 えている 場 合 があります。❑ 保 守 作 業 を 始 める 前 に、 必 ずポンプへの 電 源 を 切 り 離 してください。修 理 のためにポンプを 工 場 へ 返 却 する前 に、 本 取 扱 説 明 書 に 添 付 されている「 健 康 安 全 」の 用 紙 に 記 入 して、 最 寄の 営 業 所 に 送 付 する 必 要 があります。ポンプを 発 送 する 前 に、 用 紙 のコピーを 同 梱 してください。ポンプを 廃 棄 する 場 合 、 該 当 する 国 内 基 準 を 守 ってください。警 告ポンプは 中 性 、または 非 腐 食 性 の 液 体を 使 用 する 目 的 で 設 計 されています。潜 在 的 に 爆 発 性 、 可 燃 性 、または 毒 性を 有 する 物 質 へのご 使 用 は 厳 禁 です。ポンプを 停 止 する 上 で 特 別 な 手 順 は 要 りません。オン /オフ スイッチにより 電 源 から 切 り 離 すだけです。ポンプが 停 止 すると 同 時 に 吸 入 バルブが 閉 じます。12

SH-110 Dry Scroll Vacuum Pump사용 지침일반 정보본 장비는 전문가가 사용하도록 설계되었습니다. 사용자는 장비를 조작하기 전에 본 사용 설명서 및 VacuumTechnologies가 제공한 추가 정보를 주의 깊게 읽어야 합니다. Vacuum Technologies는 본 설명서 내용의 미준수,교육받지 않은 작업자에 의한 부적절한 사용, 비승인 개조, 또는 정해진 국가 규정에 반하는 모든 행위에 의해 발생한 결과에 대해 아무런 책임도 지지 않습니다.SH-110는 밀폐형 건식 스크롤 진공 펌프입니다. 이 펌프는 공기 또는 불활성 가스의 펌핑 작업에 적합합니다.이 펌프는 유독성, 부식성, 폭발성 또는 미립자-성형 가스의 펌핑 작업용으로 고안되지 않았습니다.다음 내용들은 본 장비 사용시에 작업자의 안전을 보장하기 위한 모든 필수 정보를 포함하고 있습니다 . 상세한정보는 15 페이지의 “Technical Information” 을 참조하십시오.본 설명서는 다음과 같은 표준 안전 심볼을 사용합니다.경고주의경고 메시지는 정확히 따르지 않을 경우 심각한 상해를 입을수 있는 특정 작업 절차 또는 작업 방법을 표시합니다.주의 메시지는 작업 절차를 따르지않을 경우 장비에 손상을 입힐 수 있는주의 사항을 표시합니다.보관펌프를 운송하거나 보관할 때는 다음과 같은 환경적 조건들을 초과해서는 안됩니다.온도:상대 습도:설치 준비이 펌프는 특수 보호 포장 상태로 공급됩니다. 운송 도중에 발생한 것으로 보이는 손상의 흔적이 있으면 현지의판매 사무소로 연락하십시오.SH-110 펌프를 포함한 포장품의 총 중량은 약 20 kg(44 lbs)입니다.경고참고−20 °C ~ +60 °C (−4 °F ~ 140 °F)0 ~ 95% (비응축)펌프를 포장할 때는 떨어뜨리거나, 갑작스러운 충격을 가하거나, 흔들리지않도록 주의하십시오.일반적인 상황에서는 펌프가 손상되지않습니다. 하지만, 펌프를 시스템에 설치하기 전까지는 펌프의 흡입구를 막아놓는 것이 좋습니다.DRAFT 7/12/05참고참고는 알아두어야 할 중요 정보를표시합니다.13

SH-110 Dry Scroll Vacuum PumpDRAFT 7/12/05설치비, 눈, 얼음, 먼지 또는 활성 가스에 노출되거나, 폭발 또는 화재 발생 우려가 있는 환경에서는 이 펌프를 설치하거나 사용하지 마십시오.환경 조건이 다음과 같을 때만 작업하십시오.온도:상대 습도:주의최하 10 A 정격의 IEC-320 형식 전원 코드를 사용하여 펌프와 전원 공급장치를 연결하십시오.사용최대의 진공 성능을 얻으려면 흡입구가 실링된 상태에서약 1시간 정도 펌프를 구동시켜야 합니다.특별한 펌프 작동 방법은 없습니다. ON/OFF 스위치를 ON에 놓기만 하면 됩니다.흡입 밸브는 펌프가 구동되기 시작한 후 10 초 정도 지나면 열립니다.경고+5 °C ~ +40 °C (41 °F ~ 104 °F)0 ~ 95% (비응축)사용 장소의 메인 전압은 펌프 뒤쪽의ON/OFF 스위치 근처에 있는 흰색 탭에표시된 전압(110 또는 220)과 일치해야합니다.전압 변환이 필요할 경우에는 작은 스크류 드라이버로 전원 모듈의 탭 홀더를 떼어 내십시오. 흰색 탭이 정확한 전압을 표시하도록 위치를 조정한 다음탭 홀더를 다시 부착하십시오.이 펌프는 중성 또는 비부식성 용액의펌핑 작업용으로 설계되었습니다. 폭발성, 인화성 또는 유독성 물질의 펌핑 작업에는 절대로 이 펌프를 사용하면 안됩니다.유지 보수펌프 작동 및 유지 보수 책임자는 충분한 교육을 받아야하며, 사고 방지 지침을 철저히 인식하고 있어야 합니다.경고참고❑ 고전압에 감전되어 목숨을 잃을 수도있습니다. 각별한 주의를 기울임과 동시에 사고 방지 지침을 철저히 준수해야만 합니다.❑ 장비에 전원이 들어와 있을 때는 작동 부품 및 고전압에 각별히 주의하십시오.❑ 상당히 오랜 시간 동안 사용했을 경우에는, 펌프 표면 온도가 60 °C 이하가될 때까지 식힌 다음 유지 보수 작업을실시하십시오.❑ 유지 보수 작업을 시작하기 전에 반드시 펌프와 전원 공급장치의 연결을차단하십시오.펌프 수리를 위해 공장으로 반송할 경우에는 본 사용 설명서에 부착된 “보건및 안전” 증명서를 작성하여 현지 판매사무소로 보내야 합니다. 발송하기 전에, 증명서 사본 1부를 포장된 펌프에동봉해야 합니다.펌프는 정해진 국가 규정에 따라 폐기해야만 합니다.특별한 펌프 정지 방법은 없습니다 . ON/OFF 스위치를사용하여 전원 공급을 차단하기만 하면 됩니다.펌프를 정지시키면 흡입 밸브는 즉시 닫힙니다.14

Technical InformationSH-110 Dry Scroll Vacuum PumpTable 1SpecificationsModelInterface dimensions See Figure 1 on page 16Peak pumping speedMediaUltimate pressureMaximum inlet pressureMaximum outlet pressureInlet connectionExhaust connectionGas ballastAmbient operating temperatureStorage temperatureMotor ratingOperating voltagesSH-110 Dry Scroll Single Hermetic Vacuum Pump50 Hz: 90 L/m, 5.4 m 3 /hr (3.3 cfm)60 Hz: 110 L/m, 6.6 m 3 /hr (4.0 cfm)See Figure 2 on page 16 for detailsNo corrosive, explosive or particulate forming gases5.0 x 10 −2 Torr (6.6 x 10 −2 mbar)1.0 atmosphere (0 psig)1.5 atmosphere (7.5 psig)NW25Female 1/4" National Pipe Thread (NW16 adapter provided)Female 1/8" National Pipe Thread, (20 micron sintered plug provided)5 °C to 40 °C (41 °F to 104 °F)–20 °C to 60 °C (–4 °F to 140 °F)0.25 HP (0.19 kW)1 phase/50-60 Hz/100-115:200-230 VACRun current See Table 3 on page 20Motor thermal protectionOperating speedCooling systemWeightLeak rate (with exhaust sealed)Noise Level (per ISO 11201)Vibration level at inlet (per ISO 10816-1)Fuse typeHour meterConformance standardsAutomatic thermal protection60 Hz: 1725 RPM, 50 Hz: 1425 RPMAir-cooledPump only: 19.5 kg (43 lbs)Shipping weight: 20 kg (44 lbs)

SH-110 Dry Scroll Vacuum PumpzoDRAFT 7/12/05120.00Figure 1Interface Drawing with DimensionsSH 110 PUMPING SPEED - AIRTEST PERFORMED IAW ISO 1607-1:1993(E)110.00100.0090.00Pumpig speed - l/min80.0070.0060.0050.0040.0030.0020.0010.000.001.E-02 1.E-01 1.E+00 1.E+01 1.E+02 1.E+03Presure - Torr50Hz, 115VAC60Hz, 115VACFigure 2Pumping Speed Curves16

SH-110 Dry Scroll Vacuum Pumpa1. Front Cowling Screws; M8 (3)2432. Front Cowling3. Inlet (NW25)4. Inlet Screen765. Exhaust Adapter NW166. Gas Ballast Port (1/8" National Pipe Thread)7. Frame8. Base59. Mounting Slots; (4) for 1/4" or M6 Hardware110. Rear Cowling811. Rear Cowling Screws: M5 (3)12. On/Off Switch13. Fuse Holder and Voltage Changeover Tab14. Power Connection (IEC-320)1110151312149Figure 3 Outline Drawing and Principal Items15. Hour MeterUnpacking and Inspection1. Orient the shipping container with “This End Up”on top.2. Open the box and remove the upper foam block.3. Carefully lift the SH-110 out of the box. Save thecarton and all packing materials.4. Inspect the pump for damage. If there is shippingdamage, contact the freight carrier and your localVacuum Technologies sales office immediately.DRAFT 7/12/0517

SH-110 Dry Scroll Vacuum PumpDRAFT 7/12/05InstallationSafetyDo not remove or modify any safety or insulating equipmentfrom the pump. To do so may create a serious safetyhazard and may void the warranty.WARNINGCAUTION❑ This pump is capable of pumping airand inert gases only. It is not designedto pump explosive, flammable, corrosiveor particulate forming gases. Theycan cause bodily injury, explosion, orfire.❑ Install in an area that is not exposedto rain, steam, or excessive humidity.They can cause electric shock, shortcircuits, and severe bodily injury.❑ Before reconfiguring the pumpvoltage, or inspecting or servicing thepump, be sure the electrical supply isdisconnected.❑ The gas ballast must be sealed wheneverpumping any gas not intended tobe vented to the atmosphere.Although the pump can pump traceparticulates normally found in theatmosphere, it is not designed toprocess solids, chemicals, powders,solvents, condensates, or other particulates.They can damage the equipment,degrade its performance, or shorten itsuseful life.CAUTIONElectrical ConnectionsThe pump can be configured for low voltage, 100 VAC to115 VAC, or for high voltage, 200 VAC to 230 VAC.The pump as delivered from the factory is configured forlow voltage. To change the pump voltage follow this procedure:WARNINGDo not block the fan ducts. Blockingthese ducts can cause pump overheating.A pump surface temperature inexcess of 65 °C (150 °F) is potentiallydamaging. If such conditions areobserved, turn the pump off and allow itto cool. Disassemble, inspect for damage,and repair, if necessary.Risk of electric shock. Disconnect thepump from electrical power mainsbefore attempting to change the voltageconfiguration.1. Verify your electrical supply voltage.2. Use a small flat blade screwdriver to release the fuseholder from the power entry module.3. Carefully pop out the white plastic assembly andreinsert with the desired operating voltage showingoutward.4. Reinsert the fuse holder into the power entry module.Startup1. Check that the inlet screen is installed before beginningoperation.WARNINGDo not insert a finger or any foreignobject in the path of the fan; seriouspersonal injury may result or the pumpmay be damaged.2. Operate the pump at an ambient temperature of 5 °Cto 40 °C (41 °F to 104 °F), otherwise damage to thepump or shortened operating life may result.18

SH-110 Dry Scroll Vacuum PumpPower CordSeveral power cord options are available from yourVacuum Technologies dealer. Descriptions of the availablepower cords and their ordering numbers are given inTable 2.NOTETable 2For high voltage operation, the pumpmust be connected to the power supplyusing a high voltage IEC-320 typepower cord of at least 10 A capacity.SH-110 Power Cord SelectionCountry Power Cord Specification OrderEurope 10 A / 220-230 VAC, 2.5 m 656494220Denmark 10 A / 220-230 VAC, 2.5 m 656494225Switzerland 10 A / 230 VAC, 2.5 m 656494235UK/Ireland 13 A / 230 VAC, 2.5 m 656494250India 10 A / 220-250 VAC, 2.5 m 656494245Israel 10 A / 230 VAC, 2.5 m 656494230Japan 12 A / 100 VAC, 2.3 m 656494240NorthAmerica15 A / 125 VAC, 2.0 m 65645820310 A / 230 VAC, 2.5 m 656494255Grounding InstructionsThis product should be grounded. In the event of an electricalshort circuit, grounding reduces the risk of electricshock by providing an escape wire for the electric current.This pump is equipped with a power cord that has agrounding wire with an appropriate grounding plug. Theplug must be inserted into an outlet that is properlyinstalled and grounded in accordance with all local codesand ordinances.DANGERWARNINGImproper installation of the groundingplug can result in a risk of electricalshock.For United States and Canadian installations:❑ When this product is configured foruse on a nominal 120 V circuit, it mustbe used with a grounding plug thatlooks like the plug illustrated inFigure 4.❑ If repair or replacement of thecord or plug is necessary, connectthe grounding wire to the groundingterminal only.❑ The grounding wire is insulated andits outer surface is green. It may or maynot have yellow stripes.❑ When this product is configured foruse on a nominal 220 V circuit, it mustbe used with a factory supplied cordand plug that permits connection to theproper electric circuit. See “ElectricalConnections” on page 18 for properrating and type of cord set.Check with a qualified electrician orserviceman if the grounding instructionsare not completely understood, or ifyou are in doubt as to whether theproduct is properly grounded.Do not modify the plug provided; if itdoes not fit the outlet, have the properoutlet installed by a qualified electrician.Connect the product only to an outletthat has the same configuration as theplug.DRAFT 7/12/05Do not use an adapter with thisproduct.19

SH-110 Dry Scroll Vacuum PumpFigure 4GroundedOutletBoxGroundingPinGrounding Plug and OutletGroundedOutletExtension CordsIf you must use an extension cord with this product:❑ For this product, Vacuum Technologies recommendsusing only extension cords with a minimum of 16-gagewire and a maximum length of 25 feet (7.6 m).❑ Use only a 3-wire extension cord that will accept theplug.❑ Make sure your extension cord is in good condition.❑ Be sure the extension cord is rated high enough tocarry the current your product will draw. An undersizedcord will cause a drop in line voltage resulting inloss of power and overheating.WARNINGIf the product must be reconnectedfor use on a different type of electric circuit,the connector should be replacedby qualified service personnel.DRAFT 7/12/05Run CurrentsTypical run currents listed in Table 3 are approximatelyconstant from minimum to maximum intake pressure.Start CurrentTable 3SH-110 Typical Run CurrentsFrequency Low Voltage Range High Voltage Range90 V 100 V 115 V 126 V 180 V 200 V 230 V 252 V60 Hz 4.4 4.2 4.0 3.7 2.2 2.1 2.0 1.950 Hz 4.1 4.1 4.2 4.2 2.1 2.1 2.1 2.1Table 4 lists the typical SH-110 maximum starting currentand duration.Table 4 Typical SH-110 Maximum Starting Current andDuration @ 115 V50 Hz 60 HzCurrent (A) Time (ms) Current (A) Time (ms)24 250 26 25020

SH-110 Dry Scroll Vacuum PumpMechanical ConnectionsIsolation ValveThe SH-110 has an integral automatic isolation valve. Aninternal timer opens the valve 10 seconds after the pumpis switched ON. If power is lost or the pump is switchedOFF, the isolation valve will immediately close.Pump InletUse NW25, or larger, clean vacuum hardware with asshort a length as practical between the pump and vacuumchamber.Insert a bellows between the pump and vacuum chamberto provide both vibration isolation and strain relief.OperationCleaning the PumpUnlike conventional oil-sealed pumps, Vacuum Technologiesdry scroll pumps do not contain fluid for the cleansingof accumulated dust and debris. Run the pumpperiodically at atmosphere for a minute or two to flush itout. Until experience is gained on your specific process,flush the pump regularly and adjust this schedule accordingto your specific conditions.Startup Procedure1. Make sure that the pump is configured for the mainsvoltage to which the pump is connected.Pump ExhaustA female 1/4" National Pipe Thread exhaust fitting islocated radially near the front of the pump. Additionally,an NW16 male adapter with 1/4" National Pipe Thread isprovided. To avoid overheating the pump, do not restrictthe exhaust flow with long lengths of small diameter tubing.Use as short as practical lengths of NW16, or larger,diameter hardware.Gas BallastThe pump incorporates an automatic gas ballast to preventwater and other condensates from accumulatingwithin the pump. The standard configuration has a solidplug installed in the 1/8" National Pipe Thread gas ballastport (item 6 on Figure 3 on page 17). This configurationcan be used for relatively dry applications. A sintered filterplug is also supplied with the pump. The filter plugcan be installed in the gas ballast port and will allowenough atmospheric air to enter the pump to purge condensateswhile not affecting pump ultimate pressure orpumping speed.For applications where the ingress of atmospheric air isundesirable, dry nitrogen at a flow rate of approximately2 L/m can be bled into the gas ballast port.WARNINGThe gas ballast must be sealed wheneverpumping any gas not intended tobe vented to atmosphere.NOTEONFigure 5ON/OFF Power Switch2. Switch the pump ON.3. The isolation valve will open automatically10 seconds after starting the pump.Shutdown ProcedureThe pump ON/OFF switch is a rockertype switch that has symbols in accordancewith IEC Publication 417 torepresent the ON and OFF positions.Figure 5 shows a switch in the ONposition.OFFTo shutdown the pump:1. Switch the pump OFF.The isolation valve will close very quickly to isolatethe vacuum chamber from the pump.DRAFT 7/12/0521

SH-110 Dry Scroll Vacuum PumpTroubleshootingUse the Troubleshooting chart in Table 5 to assist in defining a problem, determining a possible cause, and defining actionsteps to remedy the situation.Table 5Troubleshooting ChartProblem Possible Causes Corrective ActionsWill not start One or both fuses blown Replace fuses.Identify cause of overload.Check the line voltage and the voltage configuration of the pump.DRAFT 7/12/05Poor ultimatepressureMotor thermal protector openExcessive voltage dropDefective motorSystem leakWater in pumpGas ballast pluggedSolvent in pumpSeals worn outPoor conductance to pumpAllow motor to cool.Identify cause of overload.Check size and length of cable.Inspect. Contact Vacuum Technologies.Locate and repair leak.Flush pump with air or dry nitrogen.Replace breather vent. Contact Vacuum Technologies.Flush pump with air or dry nitrogen.Install trap or filter.Rebuild pump.Replumb with shorter and/or larger diameter tubing.Hammering noise Pump overheated Check ventilation to pump.Check ambient temperature.Pump runsintermittentlyDebris in pumpMotor thermal protector iscycling open and closed.*Check intake screen.Flush pump.Disassemble pump and inspect.Allow the motor to cool.Identify the cause of the overload.* The SH-110 is equipped with an auto-reset thermal motor protector. This protector will automatically shut down thepump when it detects an overload condition, and will automatically restart the pump when the motor has cooled towithin an acceptable temperature range.22

SH-110 Dry Scroll Vacuum PumpMaintenanceKits and Service OptionsVacuum Technologies pumps will provide many years oftrouble-free service if the maintenance procedures andintervals are observed. Cleaning and tip seal replacementare recommended when pump base pressure has risen toan unacceptably high level for your application. If yourpump exhibits humming or grinding noises from the bearings,a major overhaul should be done by VacuumTechnologies or an authorized rebuild center. Advanceexchange pumps are available to minimize downtime.The parts needed for tip seal replacement on the SH-110are available in the kit described in Table 6. This kit containsseals and O-rings, and can be obtained from yourVacuum Technologies dealer.PartNumberSH0110TSFactory ServiceVacuum Technologies offers rebuilding service at our factory,or you can obtain advance exchange of completeSH-110 pumps. The service plans available and theirordering numbers are given in Table 7.CleaningTable 6Table 7Tip Seal Replacement KitDescriptionReplacementTip Seal SetFactory Service PlansAdvance Exchange SH-110PumpService/Rebuild SH-110ContentsReplacement TipSeals and O-rings forSH-110 pumpsFactory Service OptionsModel NumberEXSH01101UNIVRPSH01101UNIVExteriorThe exterior surfaces of the SH-110 may be cleaned withalcohol or mild detergents only.InteriorRun the pump periodically at atmosphere for a minute ortwo to flush it out. For more information, see “Cleaningthe Pump” on page 21.Tip Seal ReplacementThe parts and tools required to replace tip seals are listedbelow:❑ Tip Seal Replacement Kit P/N SH0110TS❑ 4 and 8 mm Allen wrenches❑ 14 mm crescent wrench❑ Razor blade or side-cutting pliers❑ Compressed air (optional)WARNINGIf dangerous gases were being pumped,flush the pump with air or inert gas forat least 10 minutes prior to disassembly.Figure 6 on page 24 shows the various componentsinvolved in a tip seal replacement procedure. Refer toFigure 6 as you follow the procedure.To remove the worn tip seals:1. Disconnect the pump from electrical power.2. Remove (3) M8 socket head bolts (item 1).3. Using a crescent wrench, remove the exhaust adapter(item 2).4. Remove the front cowling and hang out of the way(item 3). Do not unplug.5. Remove (4) M5 bolts (item 4).6. Remove the scroll housing axially off the frame(item 5).7. Remove and discard the worn tip seals (item 6) andthe main O-ring (item 7).8. If compressed air is available, blow any remainingseal debris off the scroll parts. If seal debris isattached to the sides, use a razor or Exacto knife toscrape the debris off.To install the new seals and O-rings:1. Unpack the Tip Seal.2. Install the closed loop portion of the Tip Seal onto theOrbiting Scroll (item 9).3. Sequentially insert the seal from center to the outeredge of the scroll wall.4. Cut the Tip Seal about 1/8" (3 mm) from the grooveend.5. Use the remaining Tip Seal material to fill the sealgroove on the Scroll Housing and again trim theexcess Tip Seal so that a gap of about 1/8" (3 mm)remains.6. Place the new main O-ring onto the Frame (item 10).Make sure the area where the O-ring sits is clean.DRAFT 7/12/0523

SH-110 Dry Scroll Vacuum Pump7. Carefully replace the Scroll Housing making sure toline up the Locating Pins. Be sure that the Tip Seal hasnot fallen out of its groove.8. Reinstall (4) M5 bolts (item 4). Torque the (4) M5 boltsto 4 N-m (40 in-lbs).9. Place the front cowling in place and replace the M8bolts.10. Reinstall the exhaust valve.11. Reconnect the pump to the electrical power mains.5387110DRAFT 7/12/05To test the pump:Figure 6Exploded View of Pump Body1. Front Cowling Bolts; M8 (3) 2. Exhaust Adapter (NW16)3. Front Cowling 4. Frame Bolts; M5 (4)5. Scroll Housing 6. Tip Seals7. Main O-ring Parker No. 2-168 8. Locating Pins (2)9. Orbiting Scroll 10. Frame42691. Run the pump for about 5 seconds. Verify that thefront fan is running.If you hear loud noises or observe labored operation,this indicates that the Tip Seal or main O-ring arepossibly out of place.2. Disassemble and repair as necessary.The pump is now ready to return to service.NOTENewly installed Tip Seals may requireseveral hours of run time to seat properlyand enable the pump to meet speedand base pressure specifications.24

Request for Return Health and Safety CertificationRequest for ReturnHealth and Safety Certification1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to aVarian, Inc. Customer Service Representative.2. Pack goods appropriately and drain all oil from rotary vane and diffusion pumps (for exchanges please use the packingmaterial from the replacement unit), making sure shipment documentation and package label clearly shows assignedReturn Authorization Number (RA#) VVT cannot accept any return without such reference.3. Return product(s) to the nearest location:North and South America Europe and Middle East Asia and ROWVarian, Inc.Vacuum Technologies121 Hartwell Ave.Lexington, MA 02421Fax: (781) 860-9252Varian S.p.A.Via F.lli Varian, 5410040 Leini (TO) – ITALYFax: (39) 011 997 9350Varian Vacuum TechnologiesLocal OfficeFor a complete list of phone/fax numbers see www.varianinc.com/vacuum4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred toensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result ofexposure to toxic or hazardous materials present in the product.CUSTOMER INFORMATIONCompany name: ......................................................................................................................................................................Contact person: Name: ...................................................................................... Tel:............................................................Fax: .......................................................................................... E-mail: .....................................................Ship method: Shipping Collect #: .................................. P.O.#: .......................................................Europe only: VAT Reg Number: ........... USA only: ❒Taxable ❒Non-taxableCustomer ship to: .................................................................... Customer bill to: ..................................................................................................................................... ..................................................................................................................................... .................................................................PRODUCT IDENTIFICATIONISO 9001R E G I S T E R E DProduct Description Varian, Inc. Part Number Varian, Inc. Serial NumberTYPE OF RETURN (check appropriate box)❒ Paid Exchange ❒ Paid Repair ❒ Warranty Exchange ❒ Warranty Repair ❒ Loaner Return❒ Credit ❒ Shipping Error ❒ Evaluation Return ❒ Calibration ❒ OtherHEALTH and SAFETY CERTIFICATIONVACUUM TECHNOLOGIES CANNOT ACCEPT ANY BIOLOGICAL HAZARDS, RADIOACTIVE MATERIAL, ORGANIC METALS, ORMERCURY AT ITS FACILITY. CHECK ONE OF THE FOLLOWING:❒ I confirm that the above product(s) has (have) NOT pumped or been exposed to any toxic or dangerous materials in aquantity harmful for human contact.❒ I declare that the above product(s) has (have) pumped or been exposed to the following toxic or dangerous materials in aquantity harmful for human contact (Must be filled in):Print Name................................................ Signature ................................................... Date ...............................PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGEDo not write below this lineNotification (RA) #: ................................... Customer ID #: ........................................ Equipment #: ............................................August 2003 — Page 1 of 2

Request for ReturnHealth and Safety CertificationISO 9001R E G I S T E R E DFAILURE REPORT(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):TURBO PUMPS AND TURBOCONTROLLERSClaimed Defect Position Parameters❒ Does not start ❒ Noise ❒ Vertical Power: Rotational Speed:❒ Does not spin freely ❒ Vibrations ❒ Horizontal Current: Inlet Pressure:❒ Does not reach full speed ❒ Leak ❒ Upside-down Temp 1: Foreline Pressure:❒ Mechanical Contact ❒ Overtemperature ❒ OtherTemp 2: Purge flow:❒ Cooling defective ❒ Clogging................................Operation Time:Describe Failure:Turbocontroller Error Message:ION PUMPS/CONTROLLERSVALVES/COMPONENTS❒ Bad feedthrough ❒ Poor vacuum ❒ Main seal leak ❒ Bellows leak❒ Vacuum leak ❒ High voltage problem ❒ Solenoid failure ❒ Damaged flange❒ Error code on display ❒ Other .............................. ❒ Damaged sealing area ❒ Other ...............................Describe failure:Describe failure:Customer application:Customer application:LEAK DETECTORSINSTRUMENTS❒ Cannot calibrate ❒ No zero/high background ❒ Gauge tube not working ❒ Display problem❒ Vacuum system unstable ❒ Cannot reach test mode ❒ Communication failure ❒ Degas not working❒ Failed to start ❒ Other ............................... ❒ Error code on display ❒ Other ...............................Describe failure:Describe failure:Customer application:Customer application:ALL OTHER VARIAN, INC.DIFFUSION PUMPS❒ Pump doesn't start ❒ Noisy pump (describe) ❒ Heater failure ❒ Electrical problem❒ Doesn't reach vacuum ❒ Overtemperature ❒ Doesn't reach vacuum ❒ Cooling coil damage❒ Pump seized ❒ Other ............................... ❒ Vacuum leak ❒ Other ...............................Describe failure:Describe failure:Customer application:Customer application:August 2003 — Page 2 of 2

Sales and Service OfficesSales and Service OfficesCanadaCentral coordination through:Varian, Inc.121 Hartwell AvenueLexington, MA 02421USATel: (781) 861 7200Fax:(781) 860 5437Toll Free: (800) 882 7426ChinaVarian Technologies - BeijingRoom 1201, Jinyu MansionNo. 129A, Xuanwumen XidajieXicheng DistrictBeijing 1000031P.R. ChinaTel: (86) 10 6608 1031Fax:(86) 10 6608 1541France and BeneluxVarian s.a.7 avenue des TropiquesZ.A. de Courtaboeuf – B.P. 12Les Ulis cedex (Orsay) 91941FranceTel: (33) 1 69 86 38 13Fax:(33) 1 69 28 23 08Germany and AustriaVarian Deutschland GmbHAlsfelder Strasse 6Postfach 11 14 3564289 DarmstadtGermanyTel: (49) 6151 703 353Fax:(49) 6151 703 302IndiaVarian India PVT LTD101-108, 1st Floor1010 Competent House7, Nangal Raya Business CentreNew Delhi 110 046IndiaTel: (91) 11 5548444Fax:(91) 11 5548445ItalyVarian, Inc.Via F.lli Varian, 5410040 Leini, (Torino)ItalyTel (39) 011 997 9 111Fax (39) 011 997 9 350JapanVarian, Inc.Sumitomo Shibaura Building, 8th Floor4-16-36 ShibauraMinato-ku, Tokyo 108JapanTel: (81) 3 5232 1253Fax:(81) 3 5232 1263KoreaVarian Technologies Korea, Ltd.Shinsa 2nd Building 2F966-5 Daechi-dongKangnam-gu, SeoulKorea 135-280Tel: (82) 2 3452 2452Fax:(82) 2 3452 2451MexicoVarian S.A.Concepcion Beistegui No 109Col Del ValleC.P. 03100Mexico, D.F.Tel: (52) 5 523 9465Fax:(52) 5 523 9472RussiaCentral coordination through:Varian, Inc.via F.lli Varian 5410040 Leini, (Torino)ItalyTel: (39) 011 997 9 252Fax: (39) 011 997 9 316TaiwanVarian Technologies Asia Ltd.18F-13 No.79, Hsin Tai Wu RoadSec. 1, Hsi Chih, Taipei HsienTaiwan, R.O.C.Tel: (886) 2 2698 9555Fax:(886) 2 2698 9678UK and IrelandVarian Ltd.28 Manor RoadWalton-On-ThamesSurrey KT 12 2QFEnglandTel: (44) 1932 89 8000Fax:(44) 1932 22 8769United StatesVarian, Inc.121 Hartwell AvenueLexington, MA 02421USATel: (781) 861 7200Fax:(781) 860 5437Other CountriesVarian, Inc.Via F.lli Varian 5410040 Leini, (Torino)ItalyTel: (39) 011 997 9 111Fax:(39) 011 997 9 350Customer Support and Service:North AmericaTel: 1 (800) 882-7426 (toll-free)vtl.technical.support@varianinc.comEuropeTel: 00 (800) 234 234 00 (toll-free)vtl.technical.support@varianinc.comJapanTel: (81) 3 5232 1253 (dedicated line)vtj.technical.support@varianinc.comKoreaTel (82) 2 3452 2452 (dedicated line)vtk.technical.support@varianinc.comTaiwanTel: 0 (800) 051 342 (toll-free)vtw.technical.support@varianinc.comWorldwide Web Site,Catalog and On-line Orders:www.varianinc.comRepresentatives in most countries12/04