ERIKS nv - O-ring Technical Handbook

Sealing ElementsTechnical Handbook O-rings6. Compound Selection - Kalrez ® in Semicon IndustryChemical resistance that is nearly universal, coupled withsuperior high temperature properties, enables Kalrez ® parts towithstand virtually any process media - including plasma - attemperatures up to 327°C (620°F).By selecting the Kalrez ® compound that is best suited to a specificapplication, processors can improve seal performance in allwafer fabricating operations, including thermal, gas/vacuum, dryplasma, and wet chemical systems.Kalrez ® gives long-term sealing performance at hightemperaturesKalrez ® perfluoroelastomer parts retain elastic recovery propertiesand sealing force far better than other heat resistant elastomers- even after long term exposure at temperatues as highas 327°C (620°F). This thermal relaxation/stress aging test is adirect indication of long-term sealing effectiveness at elevatedtemperatures.Kalrez ® Spectrum 7075 offers new high temperatureperformance standard for the CPI industryDuPont Performance Elastomers has unveiled Kalrez ®Spectrum 7075, the first Kalrez ® Spectrum product lineexpansion designed specifically for high temperature resistancein the chemical processing industry.Customers have already reported exceptional seal performancein preliminary product testing, especially in mechanical sealapplications.Kalrez ® Spectrum 7075 builds on the exceptional performanceof Kalrez ® 4079. By choosing 7075, customers will benefit fromeven longer seal life and increased mean time between repairsas a result of:• Very low compression set at 204°C for 70 hours (15 %)• Enhanced sealing force retention.• Higher thermal resistance, up to 327°C / 620°F.In addition 7075 offers broader chemical resistance and bettercool down set recovery than Kalrez ® 4079, and provides asmoother, glossier finish than other Kalrez ® products.Kalrez ® 9100 – The New ‘Workhorse’ For DepositionApplicationsThe new Kalrez ® 9100 exhebits ultra low particle generation andcombines the best features of existing Kalrez ® compounds forthe semicon industry.Kalrez ® 9100 is an amber translucent product targeted specificallyfor deposition process applications, i.e., HDPCVD, PECVD,SACVD, Metal CVD, ALD, etc. It has also exhibited excellentperformance in “select” etching and ashing/stripping processapplications. Kalrez ® 9100 has been specifically designed forlow erosion and ultra-low particle generation in harsh plasmaenvironments. It offers outstanding thermal stability, very lowoutgassing as well as excellent elastic recovery and mechanicalstrength properties and is well suited for both static and dynamicsealing applications. A maximum continuous service temperatureof 300°C is suggested. Ultrapure post-cleaning and packaging isstandard for all parts made from Kalrez ® 9100.Kalrez ® 9100 has been reported to significantly improve waferproduction in a variety of semiconductor process applications,i.e., HDPCVD, PECVD, etching, ashing, etc., where oxygen andfluorinated plasmas are used during the cleaning cycle. In anumber of evaluations at fab line customers, Kalrez ® 9100 exhibitedless erosion, lower particle generation and longer seal lifecompared to competitive perfluoroelastomers in both static anddynamic sealing applications.Kalrez ® Application GuideThe Kalrez ® Application Guide is ready to be downloaded fromthe internet in the always up-to-date version.The easy guide to choosing the best perfluoroelastomer seal foran application now includes the latest chemical processing andsemi-conductor compounds from Kalrez ® . It helps incompound selection by rating the resistance of Kalrez ® compoundsto virtually any combination of temperature and chemicalmedia, and it helps you in seal design.The seal design selection will assist in designing a groove for aspecific O-ring, and calculate seal performance parameters invarious temperature and swell conditions at minimum and maximumO-ring groove tolerance.Download NOW at: www.dupontelastomers.com56All the information in this documentation has been compiled with the greatest of care.Despite this we can bear no responsibility whatsoever for any errors present in the documentation. The recommendations are intended as guidelines.www.eriks.info