HigH Voltage Pulsed generators - Physical Instruments

The device serie RUP (Rossendorf
Universal Pulse Generator)
includes all generators
with a broad spectrum of
impedances and parameters
(frequency, pulse length, amplitude).
The serie Ecopuls represents
a number of low cost and low
power pulse generators using
a pulse transformator. Many
different special solutions can
be offered.
Special solutions
� ECOPULS 2 is a cost effective
solution for PBII.
� Ignitronpuls for applications
with four ignitrons
with high current pulses
with low repitition.
� RUPmag 800 V, 1 kW,
flexible power supply for
pulsed dual magnetron
sputtering with two unipolar
or alternative bipolar
exits
� RUPmag2 dual power
supply for pulsed dual
magnetron sputtering
(low power 2*100W),
high frequencies (up to
200 kHz).
produced by GBS Elektronik GmbH
Universal High Voltage Pulse Generators
� RUP 1, basing on Tetrode TH5188, max. 100 kV, 10 A,
modular construction (old version)
� RUP 2, basing on Tetrode 4PR250C, max. 45 kV, 4 A,
modular construction (old version, RUP4 is the better solution)
� RUP 3, basing on MOSFET-HV switch modules,
many versions up to 15 kV.
� RUP 3-2/6 (-2kV Pulse, -200V Bias voltage, 200 + 200W)
� RUP 3-3A (-3kV Pulse, 300W)
� RUP 3-5A (5kV Pulse, 100W)
� RUP3-5/1A (5kV Pulse, 1kW)
� RUP 3-5 (-5kV Pulse, 1kW)
� RUP3-5ion for pulsed mode of an ion source 5kV/2A average
current; second exit for synchronisation of the extraction grid.
� RUP 3-10B (-10 kV Pulse, +/- 200V Bias voltage, 500 + 200 + 200 W)
� RUP 3-10/5 (+10 kV Pulse, 5kW)
� RUP3-15A (-15kV Pulse, 750W)
� RUP3-7bip Bipolar Pulse Generator +/- 7.5 kV, 2*500W
� RUP 4, basing on tube 8960. max. 45 kV/32A.
� RUP4-1, 40kV, 8A peak, 2kW average power.
Recommended economic solution for high voltage
and moderate current or power.
� RUP 5, basing on tube Y546. max. 55 kV, 90A.
� RUP 6, basing on stapled IGBT switch modules.
Different voltage versions can be offered current
max. 50A, optional max. 120A possible.
� RUP6-1c (-1kV, 100A peak, 5kW)
� RUP 6-6d (-6kV, -200V Bias, additional 500V-high
current pulse mode, 2.5kW)
� RUP 6-10 (-10 kV Pulse, 2.5 kW)
� RUP 6-10i (3-10kV tuneable, 120A, 12kW)
� RUP 6-12 (-12 kV Pulse, 2.5 kW)
� RUP 6-12c (-12 kV Pulse, 120 A peak, 6 kW)
� RUP 6-20 (-20 kV Pulse, 2.5 kW)
� RUP 6-22a (22kV Pulse, resonant switcher,
max. frequency 5kHz at half voltage)
� RUP 6-22b (-22 kV Pulse, -200 V Bias voltage, 2.5 kW + 200 W)
� RUP 6-25 (-25 kV, 2.5 kW)