ε (eV)
ε (eV)
ε (eV)
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RF<br />
O<br />
MB<br />
VP<br />
PG<br />
GT<br />
SH<br />
DC<br />
LP<br />
BG<br />
to pumps<br />
Figure 2.2: Photographic view of plasma experimental set-up. O-oscilloscope.<br />
MB-matching box. VP-voltage probe. RF-radio frequency source. GT-gas tank.<br />
SH-spores holder. LP-Langmuir probe. DC-discharge chamber. BG-baratron<br />
gauge.<br />
ment is presented in Fig. 2.1. The height of the reactor is 150 mm and the diameter<br />
is 300 mm. The upper part of the vessel can be lifted, giving access to the spore<br />
holder (SH in Fig. 2.1). The detailed picture of the experimental device can be<br />
seen in the Fig. 2.2<br />
The plasma diagnosis and observation was realized through a few plexiglas<br />
ports and one quartz window. The RF power was injected into the plasma by<br />
the help of the horizontal, internal ring antenna, 200 mm in diameter, made of a<br />
25