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RF<br />

O<br />

MB<br />

VP<br />

PG<br />

GT<br />

SH<br />

DC<br />

LP<br />

BG<br />

to pumps<br />

Figure 2.2: Photographic view of plasma experimental set-up. O-oscilloscope.<br />

MB-matching box. VP-voltage probe. RF-radio frequency source. GT-gas tank.<br />

SH-spores holder. LP-Langmuir probe. DC-discharge chamber. BG-baratron<br />

gauge.<br />

ment is presented in Fig. 2.1. The height of the reactor is 150 mm and the diameter<br />

is 300 mm. The upper part of the vessel can be lifted, giving access to the spore<br />

holder (SH in Fig. 2.1). The detailed picture of the experimental device can be<br />

seen in the Fig. 2.2<br />

The plasma diagnosis and observation was realized through a few plexiglas<br />

ports and one quartz window. The RF power was injected into the plasma by<br />

the help of the horizontal, internal ring antenna, 200 mm in diameter, made of a<br />

25

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