ε (eV)
ε (eV)
ε (eV)
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T e (<strong>eV</strong>)<br />
6<br />
5<br />
4<br />
3<br />
2<br />
1<br />
0<br />
100 200 300 400<br />
P (W)<br />
4x10 10<br />
3x10 10<br />
2x10 10<br />
Figure 2.7: Estimation of the plasma density and electron temperatures from the<br />
I(V ) characteristics of the Langmuir probe. The RF power applied was varied<br />
between 100W and400 W.<br />
2.4.2 Measurement of the plasma light emission<br />
10 10<br />
Light plasma emission was analyzed with a Jobin Yvon spectrometer model<br />
DA−40. The optical emission was monitored with a quartz optical and the signal<br />
was fed to a monochromator, as shown in Fig. 2.8. This is connected to a central<br />
unit (controller) which commands the sweeping of the whole wavelengths interval.<br />
The spectra were analyzed within the 300 and 850 nm wavelength interval, due<br />
39<br />
n e (cm -3 )