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T e (<strong>eV</strong>)<br />

6<br />

5<br />

4<br />

3<br />

2<br />

1<br />

0<br />

100 200 300 400<br />

P (W)<br />

4x10 10<br />

3x10 10<br />

2x10 10<br />

Figure 2.7: Estimation of the plasma density and electron temperatures from the<br />

I(V ) characteristics of the Langmuir probe. The RF power applied was varied<br />

between 100W and400 W.<br />

2.4.2 Measurement of the plasma light emission<br />

10 10<br />

Light plasma emission was analyzed with a Jobin Yvon spectrometer model<br />

DA−40. The optical emission was monitored with a quartz optical and the signal<br />

was fed to a monochromator, as shown in Fig. 2.8. This is connected to a central<br />

unit (controller) which commands the sweeping of the whole wavelengths interval.<br />

The spectra were analyzed within the 300 and 850 nm wavelength interval, due<br />

39<br />

n e (cm -3 )

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