INSTITUTE OF PHOTONIC TECHNOLOGY - IPHT Jena

INSTITUTE OF PHOTONIC
TECHNOLOGY
P.O. Box 10 02 39
D - 07702 Jena, Germany
Dept. of Quantum Detection
Phone: +49-3641-206 365
Fax: +49-3641-206 199
e-mail: frank.haenschke@ipht-jena.de
internet: http://www.ipht-jena.de
LINEAR THERMOPILE
INFRARED SENSING
FEATURES
ARRAY ZS-64
� High Sensitivity
� Broad Spectral Response
� Low Cost
� Self-Generating Voltage
No Bias Required
No 1/f Noise
� Ambient Temperature Operation
� High Reliability
� Hermetically Sealed
� Excellent Long-Term Stability
� Rugged Construction
TECHNICAL DESCRIPTION
The linear array of thermopile sensors model ZS-64 is made by modern thin-film technology on Silicon
wafers. It consists of 64 pixels with a pitch of 0.5 mm. Each pixel consists of a thermopile with 30
junction pairs made from evaporated antimony and bismuth thin films in multilayer technology.
The receiving area per pixel is 0.45 mm x 1.5 mm (width x length).
The cross-talk between adjacent pixels is minimized by slits in the supporting membrane. The absorbing
layer is made from silver black with a very high and flat absorptance from the UV to the FIR. The
thermopile sensor array requires no cooling and no bias voltage or current for operation. It generates no
1/f noise but only the thermal resistance (Johnson-Nyquist) noise. The sensor array can be used for DC
and low frequency AC measurements.
Complete measuring systems including the thermopile sensor array and the read-out electronics with
multiplexer and preamplifier circuit are available (in collaboration with Micro Hybrid Electronic GmbH).

TYPICAL SPECIFICATIONS ZS-64
This data sheet may be modified at any time ZS-64_2011-10-28.DOC
Active Area mm 2 0.675 mm 2 (0.45 mm x 1.5 mm) 1)
Pixel Pitch mm 0.5
Number of Junctions 30 1)
Resistance k� 8.5 ± 3.5 1)
Resistance TC %/K - 0.02 ... - 0.04
Noise Voltage nV/Hz 1/2 � 12 1)
Filling Gas Vacuum 2)
DC Responsivity V/W 250 3) Vacuum
Responsivity TC %/K -0.35...-0.55
DC Output@38 µW/mm 2 mV 6,3 3) 4) Vacuum
D* (500 K, DC) cmHz 1/2 /W
9 3)
1.6 x 10
1)
per Pixel
3)
without window
2)
other filling gases : Xe,
4)
500K
Spectral Response Flat from UV to IR
(dependent on Window Material)
Window Materials Standard: KRS-5; 8 ... 14 µm Filter
Other Materials on Request
Case Metallic PDS-32
Operating Temperature - 20 ... + 85 °C
Weight (Chip) 2 g
APPLICATIONS
- Non-Contact Temperature Measurements
- Spectroscopy
- Position Identification
Spectral absorptance of the Agblack
with an interference
absorbing layer in the spectral
range 2 ... 14 µm