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filmes finos: fundamentos e aplicações - IFSC - USP

filmes finos: fundamentos e aplicações - IFSC - USP

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600 o C (a) 750 o C (d) 900 o C<br />

(g)<br />

Lab de Filmes Finos<br />

Filmes de SiMn<br />

3 µm<br />

(b) (e) (h)

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