Combined use of in-situ curvature and full- wafer ... - Laytec

Shear stress on the (1-11)[10-1] and (1-11)[0-1-1] slip system
10 ºC Radial temperature variations
Temperature ( o C)
Temperature ( o C)
1005
1000
995
990
1005
1000
995
990
Temperature profile 1
-10 0 10 20 30 40 50 60 70 80
Radial distance (mm)
Temperature profile 2
0 10 20 30 40 50 60 70 80
Radial distance (mm)
Wafer centre Wafer edge
Max stress ~2 MPa
Max stress ~1 MPa
Stress calculations: courtesy of
Kirsten McLaughlin, Cambridge
10