NIP REPORT January 2006- May 2007 - The UP College of Science ...

c. establish data on throughput of the device, ion source lifetime, tune time,
meantime before failure, and the total availability of the machine for optimization
and standardization of prototype device
d. make a comparative studies of metal-doped C on TiN and diamond/diamond
like carbon film exposed to titanium/nitrogen plasma to synthesize TiCN
e. synthesize TiCuN thin films
Project B: a. develop emittance and brightness techniques to characterize beam
b. study beam focusing and acceleration methods
c. study applications of ion treatment on biological, semiconductor and polymer
samples
Project C: a. utilize einzel lens for beam focusing techniques of metal and gas ions
b. construct electrostatic energy analyzer to determine ion energy downstream
from ion source
c. develop time-of-flight mass spectroscopy (TOFMS)
OVCRD, UP Diliman
Project Title: Studies of a Newly-Developed Microwave Plasma Device for
Plasma Applications
Duration: September 1, 2006 to August 31, 2008 (requested to be extended until December 31,
2008
Amount/Fund: PhP 300,000
Grantee: Marko Arciaga
Research Goals
Further develop the design and operation of the microwave plasma device
Evaluate the discharge characteristics of the microwave plasma device
Optimize the plasma parameters of the microwave plasma device for several discharge
conditions and gases
Use the microwave plasma device for plasma processing, such as abatement of PFCs
Students involved
BS: April Ulano
Henry Lee
This study will help in further understanding the characteristics of a newly-developed
microwave plasma device, which is actually the first non-DC plasma device in the Plasma
Physics Laboratory (PPL) of the National Institute of Physics. Further characterization of this
device is needed for its eventual usefulness in various applications in the future such as plasma
wood processing, elimination of soot from diesel engines, abatement of perfluorinated
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