Methodologies for Assessing On-line Probe Process Parameters
Methodologies for Assessing On-line Probe Process Parameters
Methodologies for Assessing On-line Probe Process Parameters
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CRES Longterm Tests<br />
• Test Sequence<br />
Pin High / Low<br />
– 200 TDs on a 600nm Aluminum Wafer at 25µm<br />
Overtravel<br />
– CRES vs Overtravel per<strong>for</strong>mance tests up to 100µm<br />
overtravel on a Rh-Plate<br />
• Test Execution <strong>for</strong> total of 20K TDs on wafer<br />
– Pin with 300mA (High) and Rh-Plate (Low)<br />
– Pin with 300mA (Low) and Rh-Plate (High)<br />
– Per<strong>for</strong>med with existing and new probe material<br />
– Per<strong>for</strong>med without cleaning<br />
June 11 / 2008 Martens, Allgaier, Allgaier Allgaier, , Broz IEEE SW Test Workshop 37
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