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Chapter 5: Carrier Transport Phenomena - FKE

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Microelectronics I<br />

If N d=2 x 10 17 cm -3 , impurity<br />

concentration, N I= N d + +Na - =3 x 10 17<br />

cm -3 . from the figure, µn= 510<br />

cm 2 /Vs. so σ=8.16 (Ωcm) -1 .<br />

If Nd=5 x 1017 cm-3 , impurity<br />

concentration, NI= N +<br />

d +Na - =6x 1017 cm-3 . from the figure, µn= 325<br />

cm2 /Vs. so σ=20.8 (Ωcm) -1 cm .<br />

2 /Vs. so σ=20.8 (Ωcm) -1 .<br />

N d should be between 2 x 10 17 and 5 x<br />

10 17 cm -3 . after trial and error.<br />

Nd= 3.5 x 10 17 cm -3<br />

µn=400 cm 2 /Vs<br />

σ= 16 (Ωcm) -1

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