Chapter 5: Carrier Transport Phenomena - FKE
Chapter 5: Carrier Transport Phenomena - FKE
Chapter 5: Carrier Transport Phenomena - FKE
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Microelectronics I<br />
If N d=2 x 10 17 cm -3 , impurity<br />
concentration, N I= N d + +Na - =3 x 10 17<br />
cm -3 . from the figure, µn= 510<br />
cm 2 /Vs. so σ=8.16 (Ωcm) -1 .<br />
If Nd=5 x 1017 cm-3 , impurity<br />
concentration, NI= N +<br />
d +Na - =6x 1017 cm-3 . from the figure, µn= 325<br />
cm2 /Vs. so σ=20.8 (Ωcm) -1 cm .<br />
2 /Vs. so σ=20.8 (Ωcm) -1 .<br />
N d should be between 2 x 10 17 and 5 x<br />
10 17 cm -3 . after trial and error.<br />
Nd= 3.5 x 10 17 cm -3<br />
µn=400 cm 2 /Vs<br />
σ= 16 (Ωcm) -1