functionalized surfaces on porous silica by atomic layer ... - Aaltodoc

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CONTROLLED PREPARATION OF AMINO- FUNCTIONALIZED SURFACES ON POROUS SILICA BY ATOMIC LAYER DEPOSITION Satu Ek (née Härkönen) Dissertation for the degree of Doctor of Science in Technology to be presented with due permission of the Department of Chemical Technology for public examination and debate in Auditorium KE 1 at Helsinki University of Technology (Espoo, Finland) on the 11 th of December, 2004, at 12 noon. Helsinki University of Technology Department of Chemical Technology Laboratory of Inorganic and Analytical Chemistry Teknillinen korkeakoulu Kemian tekniikan osasto Epäorgaanisen ja analyyttisen kemian laboratorio
Distribution: Helsinki University of Technology Laboratory of Inorganic and Analytical Chemistry P.O. Box 6100 FIN-02150 HUT, FINLAND © Satu Ek ISBN 951-22-7403-5 ISSN 1458-5154 Picaset Oy Helsinki 2004
Page 1: Helsinki University of Technology I
Page 5 and 6: PREFACE The experimental work of th
Page 7 and 8: THE AUTHOR’S CONTRIBUTION TO THE
Page 9 and 10: MTES Methyltriethoxysilane MTMS Met
Page 11 and 12: 1. INTRODUCTION There is growing in
Page 13 and 14: 2. GENERAL BACKGROUND As background
Page 15 and 16: Figure 2. Gas-phase deposition of
Page 17 and 18: 3-Bromopropyltrichlorosilane Glass
Page 19 and 20: the number of cycles applied. Adjac
Page 21 and 22: announced ALD to be the method-of-c
Page 23 and 24: precursor molecules compared to the
Page 25 and 26: Figure 5. Distilled water was used
Page 27 and 28: 3.2.2 Deposition of several surface
Page 29 and 30: 4. RESULTS AND DISCUSSION The effec
Page 31 and 32: Wave number/ cm -1 Figure 8. DRIFT
Page 33 and 34: Table 3. Results from TG and 1 H MA
Page 35 and 36: Various signal-processing technique
Page 37 and 38: 450 °C, the sharp peak due to free
Page 39 and 40: only monodentately bound, but also
Page 41 and 42: mono- and bidentate bonding modes o
Page 43 and 44: The reaction of the amino groups of
Page 45 and 46: APTS molecules/ nm 2 Carbon atoms/
Page 47 and 48: Figure 20. Deposition of pyromellit
Page 49 and 50: 5. CONCLUSIONS Because ALD growth i
Page 51 and 52: 6. REFERENCES 1. Vansant, E.F., Van
Page 53 and 54:
64. Haller, I., J. Amer. Chem. Soc.
Page 55 and 56:
135. Maciel, G.E. and Sindorf, D.W.
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