Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...

49
e} At inlet screen (splinter shield) is available, however this accessory reduces the pumping speed of
the TMP.
3.24 - The bearings have been lubricated at the factory.
3.3 - RECOMMENDED FORE PUMP
3.31 - ALCATEL 5101 and 5081 TMP require a forepump. The ALCATEL 2004 A is recommended .. :" ."
The selection of the forepump pumping speed will depend on the volume of the chamber to be pumped
down and on the pump-down time to achieve 1.10- 2 mbar (this time must be 3 mn).
3.32 - PRECAUTIONS
To prevent oil backstreaming from the roughing pump (RP), avoid sudden changes in outlet circuit pressure.
Optionally, in order to prevent oil vapor contamination of the TMP and chamber, the following can be
connected between the TMP outlet and the RP :
- a manual or automatic valve
- a molecular sieve trap (the trap must not be exposed to the system)
• the installation of a vent valve (NO) between the outlet flange of the TMP and the RP. (See chapt'f,6) ..
3.33 - The forevacuum line must be constructed of flexible hose.
- Remove protective cover from the TMP outlet.
• Install a NW 25 (10 inches ID) flexible hose to the TMP outlet, with the other end connected to the
roughing pump.
3.34 - COOLING
a) Air cooling device:
The fan is assembled on the TMP by a bracket. This last is assembled on the pump rear tape with 3 screws
CHc M4 x 10 (see figures 5/1 and 5/2).
• Connect the fan to converter at J5 with the special cable.
• The fan will start when the TMP is started.
The fan provides sufficient cooling for ambient temperature up to 95° F. If the ambient temperature is above
95° F, the user should install a water cooling collar.
062794 • 1 0/1993