Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...
Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...
Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...
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4. 12 - CLASSIC THREE-VALVES COMBINATION<br />
53<br />
PTM<br />
TMP<br />
o PPM<br />
i..--__ ...J<br />
RP<br />
\<br />
a) Start (TMP off) :<br />
- RP on<br />
- Open air cooling<br />
- Open E2<br />
- Open E3 (E 1 closed)<br />
- At pressure P:::; 1 mbar<br />
· E2 closed<br />
· Open El<br />
- TMP on<br />
b) Venting chamber to atmosphere:<br />
- E3 closed<br />
- Inert gas enters chamber (2 min)<br />
c) <strong>Pump</strong>ing down chamber:<br />
(RP and TMP on)<br />
- El closed<br />
- E2 open .<br />
- At pressure P:::; 1 mbar<br />
· E2 closed<br />
· E3 open<br />
· El open<br />
'i.",<br />
d) Stop:<br />
- E3 closed<br />
- El closed<br />
- RP off<br />
- TMP off<br />
- Close air cooling<br />
062794 - 10/1993
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