Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...
Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...
Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...
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68<br />
C - TURBOMOLECULAR PUMP MODEL <strong>5081</strong> <strong>CP</strong> <strong>IS</strong><br />
CHAPTER 1 : DESCRIPTION<br />
1.1. The <strong>5081</strong> <strong>CP</strong> <strong>IS</strong> TMP is specially designed for aggressive environments. Ball bearings and motor are<br />
isolated from process gases by a reversed dynamic seal and an inert gas purge system.<br />
Inlet flange: UHV 63 CF.<br />
Exhaust flange: NW 16.<br />
Purge flange: NW 16.<br />
Without continuous and proper utilization of the purge system, the TMP <strong>5081</strong> <strong>CP</strong> <strong>IS</strong> is not suitable for<br />
reactive gas or particulate laden applications.<br />
Nevertheless, the dynamic seal allows ball bearings protection during a short time period (gases<br />
adjustment into the chamber for example), with TMP running at nominal speed. Let the purge supplied as<br />
soon as possible.<br />
1.2 •. TMP <strong>5081</strong> <strong>CP</strong> <strong>IS</strong> operates with the same converter than the TMP <strong>5081</strong> standard.<br />
1.3. REVERSED DYNAMIC SEAL<br />
The reversed dynamic seal is an originally corrosion resistant device which re-inforces the neutral gas<br />
efficiency.<br />
It can take the place of the puge for a short period of time when ligh~y corrosive gases are pumped.<br />
062794 - 10/1993
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