Alcatel 5081, 5101, CFV 100, 5081 CP IS, Turbo Pump, Turbopack ...

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TURBOMOLECULAR PUMPS AND TURBOPAK
Type 5081 - 5101 + CFV 100
SOMMAIRE
NOTE S
......................................................................................................... 41
A - TURBOMOLECULAR PUMP MODEL 5081 - 5101 ............................................. 43
CHAPTER 1 - GENERALITIES ...................................................................................... 43
CHAPTER 2 - SPECIFICATIONS .......•.•...........................................•........................... 46
CHAPTER 3 - INSTAlLATION .. ~ .................................................................................. 48
CHAPTER 4 - OPERATION ........................................................................................ 52
CHAPTER 5 - MAINTENANCE AND SERViCiNG ......................................................... 55
CHAPTER 6 - ACCESSORIES ..................................................................................... 56
CHAPTER 7 - EQUIPMENT CONFIGURATION - ACCESSORIES PIN ............................. 60
CHAPTER 8 - CFV 100 CARD ..................................................................................... 61
B· 5081 • 5101 TURBOPAK + CFY 100 •••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••• 63
:HAPTER 1
:-iAPTER 2 -
DESCRIPTION - DIMENSIONS ............................................................... 63
SPECIFICATIONS ................................................................................. 64
:-iAPTER 3 - INSTAllATION..................................................................................... 65
:-iAPTER 4 - OPERATION ........................................................................................ 66
: ~APTER 5 - MAINTENANCE ................................................................................... 67
: . TURBOMOLECULAR PUMP MODEL 5081 CP IS ................................................ 68
= -APTER 1 - DESCRIPTION ...................................................................................... 68
:-A.PTER 2 - SPECIFICATIONS ................................................................................. 70
: -A.PTER 3 - INERT GAS PURGE SYSTEM .................................................................. 71
"-.APTER 4 - OPERATING DIAGRAM ......................................................................... 72
: -APTER 5 - EQUIPMENT CONFIGURATION - PART NUMBER .................................... 73
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__ ~=S AND DRAWINGS ................................................................................................ 75
062794 - 10/1993