Brittle Fracture of Ceramics - Semiconductor Wafer Test Workshop
Brittle Fracture of Ceramics - Semiconductor Wafer Test Workshop
Brittle Fracture of Ceramics - Semiconductor Wafer Test Workshop
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Distribution <strong>of</strong> <strong>Fracture</strong> Strength<br />
Cumulative Probability F( sf)<br />
1.00<br />
0.90<br />
0.80<br />
0.70<br />
0.60<br />
0.50<br />
0.40<br />
0.30<br />
0.20<br />
0.10<br />
MACOR<br />
Max 275.80<br />
Min 183.97<br />
Range 91.83<br />
Mean 224.10<br />
Std Dev 37.18<br />
ALUMINA<br />
Max 656.27<br />
Min 528.76<br />
Range 127.51<br />
Mean 590.00<br />
Std Dev 49.61<br />
ZIRCON<br />
Max 721.04<br />
Min 648.93<br />
Range 72.10<br />
Mean 682.10<br />
Std Dev 27.15<br />
SILICON NITRIDE<br />
Max 1598.73<br />
Min 1047.22<br />
Range 551.51<br />
Mean 1253.41<br />
Std Dev 205.23<br />
Macor<br />
Alumina<br />
Zircon<br />
SN<br />
Linear (Macor)<br />
Linear (Alumina)<br />
Linear (Zircon)<br />
Linear (SN)<br />
0.00<br />
0 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700<br />
<strong>Fracture</strong> Strength sf [ MPa]<br />
June 7 to 10, 2009<br />
IEEE SW <strong>Test</strong> <strong>Workshop</strong> 13
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