Presentation: Exploring Best Practices in Design of Experiments - JMP
Presentation: Exploring Best Practices in Design of Experiments - JMP
Presentation: Exploring Best Practices in Design of Experiments - JMP
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Photolithography Example<br />
• Consider five factors <strong>in</strong> a photolithography process<br />
– A = aperture sett<strong>in</strong>g<br />
– B = exposure time<br />
– C = develop time<br />
– D = mask dimension<br />
– E = etch time<br />
With each factor at two levels the result<strong>in</strong>g number <strong>of</strong> runs is:<br />
2 5 = 32