Element Brochure - Owens Design

Finally, you can put more focus
on your valuable core competencies
Element Specifications
Industry research shows, less than 20% of a typical
engineering team’s efforts are spent on developing
their core technology...
Finally, you can rectify that problem. Now, with
the Element, you can cross “platform”
off your list of concerns—and add it
to your list of strong assets and risk
minimizers.
Most importantly, now you can
start putting more of your resources
where they will give you the greatest
return—namely, on developing your
core IP. Because, bottom line, that’s what really
makes your tools valuable and what makes your
company successful.
You may find that the Element platform actually
allows you to streamline your operation by eliminating
redundant engineering and manufacturing
infrastructure. You’ll increase your profitability
while turning out a strongly superior product.
Element: a true win-win opportunity
After many of our Element presentations, the
response has been, “What’s not to like?”
We agree. The
Element platform
definitely saves
you a great deal
of money. And
time. And effort.
And manpower.
The Element provides dual loadports
And lets you customize
it all you want.
with integrated wafer mapping.
It gets you to market much more quickly. With a
stronger, more streamlined, more fab-worthy tool.
If any of that sounds interesting to you, just let us
know. We’d be happy to arrange for you to see more
of the Element automation platform.
Wafer Sizes:
Substrate Types:
Repeatability:
Throughput:
Cleanliness:
Reliability:
User Interface:
Optional Wafer
and Carrier ID:
Facilities:
Regulatory Compliance:
150mm, 200mm, 300mm
Silicon
Quartz optional
In X, Y, Z axis: 75µm, 3 sigma
In Theta axis: 0.1 degrees
(measured at wafer hand-off)
120 wph (excluding measurement time)
Time to first wafer: 18 seconds
Swap time: 4 seconds
Front side: < 0.1 particles @ 0.12 µm, PWP
Back side: < 1,500 particles @ 0.2 µm, PWP
Mini-environment ISO Class 1
MTBF > 10,000 hrs
MTBS > 6 months
Availability > 98%
MTTR < 2 hrs
15” flat panel display, trackball and keyboard
OCR (SEMI T7, M12 and M13 scribes)
Carrier Auto ID
208 VAC, 50/60 Hz, 30 amps
22-26 in Hg vacuum required
SEMI S2, S8 and CE Mark
SEMI E15.1, E44.1, E45, E46-95, E47.1, E57
SEMI E62, E63, E64, E84, E99
I300I Integrated Mini-environment Design
Best Practices
I300I Factory Guideline, Version 4.1
Owens Design | 47427 Fremont Boulevard, Fremont, CA 94538
Tel: 510.659.1800 | Fax: 510.659.1896 | www.owensdesign.com