Optical Glass Metrology â Techniques / Limitations - Owens Design

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Confocal Laser Point Sensor Principle: : The confocal point sensor uses a point light source and detector pinhole to discriminate depth : The laser beam emitted from the point light source is focused on a specimen through an objective lens that moves rapidly up and down. The maximum light intensity occurs when the specimen lies within the focal plane of the objective. As the objective moves closer to or farther from the specimen, however, the reflected light reaching the pinhole is defocused and does not pass through it. As a result, the quantity of light received by a detector behind the pinhole decreases rapidly. A detection signal is only generated when the maximum of light goes through the pinhole. : A precise height measurement of the illuminated point is achieved by continuously scanning along the z-axis. Advantages: - Vibration-free measurement - Exceptional sub-nanometric resolution - High signal to noise ratio - Thin layer thickness measurement (min. measurable thickness: ~ 0.4 µm) - Measurement of high aspect-ratio holes - Measurement from low to high reflectivity - Measurement of transparent objects : SICK AG: : BU02 side session: high end displacement Patrick Nutz 19.03.2009 14
Chromatic Confocal Measurement : SICK AG: : BU02 side session: high end displacement Patrick Nutz 19.03.2009 15
Page 1 and 2: Optical Glass Metrology - Technique
Page 3 and 4: Limitations of Optical Measurement
Page 5 and 6: Laser Triangulation Advantages : Si
Page 7 and 8: Detection of the Glass Plates Inter
Page 9 and 10: Glass Thickness Measurement with on
Page 11 and 12: LaserScanner with rotating Mirror D
Page 13: Confocal Laser Point Sensor : SICK
Page 17 and 18: Principle of operation of an AutoFo
Page 19: : Thank you for your attention.

Optical Glass Metrology â Techniques / Limitations - Owens Design

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Optical Glass Metrology â Techniques / Limitations - Owens Design