FactSheet HELiA - Roth & Rau AG
FactSheet HELiA - Roth & Rau AG
FactSheet HELiA - Roth & Rau AG
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Texturing<br />
PECVD 1<br />
Back Side i/n<br />
PECVD 2<br />
Front Side i/p<br />
PVD<br />
TCO Front/ Back Side<br />
Back Contact<br />
Screen<br />
Printing<br />
Curing<br />
Cell Tester<br />
& Sorter<br />
Heterojunction Technology process<br />
<strong>HELiA</strong> PECVD<br />
- Three tool options available<br />
High level tool<br />
Medium level tool<br />
Entry level tool<br />
Cross contamination free solution<br />
Cross contamination may occur<br />
(i-, p-, n-layers)<br />
2,400 w/h throughput (both sides)<br />
optional: 4,800 w/h throughput (both sides)<br />
2,400 w/h throughput<br />
(both sides)<br />
2,400 w/h<br />
throughput<br />
(one side)<br />
Back side processing Front side processing Back side Front side Single side<br />
PM<br />
(i)<br />
PM<br />
PM<br />
(i)<br />
PM<br />
(p)<br />
PM<br />
(i)<br />
PM<br />
(i)<br />
PM<br />
(i)<br />
Cassette Loader<br />
TM<br />
TM<br />
PM<br />
(i)<br />
Handling<br />
(n)<br />
TM TM<br />
TM<br />
Flip<br />
Handling<br />
TM TM TM<br />
(n) (i)<br />
(p)<br />
PM PM PM<br />
Cassette Loader<br />
Cassette Loader<br />
TM<br />
Handling<br />
TM<br />
PM<br />
(n)<br />
Flip<br />
TM<br />
Handling<br />
TM<br />
PM<br />
(p)<br />
Cassette Loader<br />
Cassette Loader<br />
TM<br />
Handling<br />
TM<br />
PM<br />
(p)<br />
Cassette Loader<br />
Option for higher throughput<br />
<strong>HELiA</strong> PVD<br />
Waferload LM TM Transfer BM<br />
Module (In)<br />
PM<br />
(TCO)<br />
BM<br />
(Out)<br />
TM<br />
BM<br />
(In)<br />
PM<br />
(Metal)<br />
BM<br />
(Out)<br />
TM<br />
Waferload<br />
LM - Load Module<br />
TM - Transfer Module<br />
BM - Buffer Module<br />
PM - Process Module<br />
Data sheet <strong>HELiA</strong><br />
Wafer size<br />
6“ wafer<br />
Wafer type<br />
Throughput<br />
n-, or p-type mono<br />
2,400 w/h (optional: 4,800 w/h)<br />
<strong>Roth</strong> & <strong>Rau</strong> <strong>AG</strong>, info@roth-rau.com, www.roth-rau.com
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