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<strong>PRiMELiNE</strong> CdTe<br />

Cadmium Telluride Fab - Cluster Tools for<br />

Thin Film SolarModule Manufacturing


<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Under the brand name <strong>PRiMELiNE</strong> <strong>Roth</strong> & <strong>Rau</strong> offers PV turnkey<br />

lines assuring a successful implementation of a state of the art<br />

production facility. Now, <strong>Roth</strong> & <strong>Rau</strong> CTF Solar is the first company<br />

worldwide to offer turnkey solutions for the production of Thin<br />

Film PV Modules, based on the reliable CdTe-technology.<br />

The advantages of the <strong>Roth</strong> & <strong>Rau</strong> turnkey offering are obvious:<br />

The “One-stop-shopping” solution has been designed for customers<br />

wanting to focus on their core business and wanting to<br />

rely on a strong partner with a proven track record of successfully<br />

realized turnkey projects worldwide.<br />

With a <strong>PRiMELiNE</strong> CdTe Turnkey Line <strong>Roth</strong> & <strong>Rau</strong> delivers state-ofthe-art<br />

and future proof technology, based on a continuous improvement<br />

of all components of the turnkey line, their integration,<br />

and accurate process design. To keep track with the continuous<br />

development in high technology, <strong>Roth</strong> & <strong>Rau</strong> maintains a broad<br />

network with renowned Research & Development partners.<br />

<strong>Roth</strong> & <strong>Rau</strong> is proud of its international appreciation as technologically<br />

leading company based on its strong commitment to<br />

R&D. Our continuous equipment improvement ensures a long lifetime<br />

of our <strong>PRiMELiNE</strong> CdTe product. The focal points in all development<br />

activities of the <strong>PRiMELiNE</strong> CdTe turnkey line are: Environmental<br />

responsibility, superior Cost of Ownership (CoO) and technological<br />

leadership. One of the outcomes of these principles is<br />

the design of the <strong>PRiMELiNE</strong> CdTe following the “Emission-free fab”<br />

concept, allowing operation of the production line with emissions<br />

close to zero.<br />

For customers that already invested into a CdTe Thin Film factory or<br />

who wish to integrate own or local content, <strong>Roth</strong> & <strong>Rau</strong> CTF Solar<br />

offers cost efficient, proven processing tool clusters that can be<br />

seamlessly integrated into either new production lines as well as<br />

into existing lines. The sum of all fully integrated clusters is the<br />

innovative yet proven <strong>PRiMELiNE</strong> CdTe Turnkey production line. The<br />

turnkey clusters are designed to provide specific process knowledge<br />

combined with suitable process equipment and processing<br />

material specification, project management and equipment startup<br />

for highest process reliability and product quality. All<br />

<strong>PRiMELiNE</strong> CdTe Clusters are capable of processing module sizes<br />

of up to 1200 x 1600 mm, with a throughput of up to 70 modules<br />

per hour. The table below provides to you an overview on our<br />

<strong>PRiMELiNE</strong> CdTe 80 MW Turnkey line offering and our PRiME-<br />

LiNE CdTe Turnkey clusters.


<strong>PRiMELiNE</strong> CdTe Laser Cluster (80 MW)<br />

CdTe Thin Film PV Modules have been recognized as the markets<br />

most cost efficient solution for PV applications. To support cost<br />

efficient, proven processing, <strong>Roth</strong> & <strong>Rau</strong> CTF Solar offers processing<br />

clusters and tools for all thin film PV module customers<br />

worldwide that can be seamlessly integrated into new production<br />

lines as well as into existing fabrication lines. The <strong>Roth</strong> & <strong>Rau</strong> CTF<br />

Solar chosen cluster design provides to the customer specific<br />

process knowledge combined with suitable process equipment<br />

and processing materials, project management and equipment<br />

startup in order to enhance product quality and module efficiencies.<br />

All <strong>PRiMELiNE</strong> CdTe Clusters are capable of processing standard<br />

module sizes of 1200 x 1600 mm (other dimensions on<br />

request), with a throughput of > 60 modules per hour. Basis for the<br />

design of all <strong>PRiMELiNE</strong> CdTe Cluster Tools is the innovative yet<br />

proven <strong>PRiMELiNE</strong> CdTe Turnkey production line.<br />

The <strong>PRiMELiNE</strong> CdTe Laser Cluster contains three Laser Scribers<br />

for P1, P2, P3 cuts and a Laser Edge Deletion tool. Equipment<br />

selection is optimized for use on CdTe. Although the individual<br />

tools of the Laser Tool cluster are spread inside the sequential<br />

tool layout of a thin film production line, customers can benefit<br />

from this tool package as all tools are matched with respect to<br />

performance and specification for optimized utilization of active<br />

module surface area.<br />

Thin film PV modules require several special processing steps in<br />

order to generate a pattern of multiple PV sub cells that needs to<br />

be very precise, as well as a fast and reliable layer removal without<br />

damaging the substrate itself for preparation of the backend<br />

edge sealing process. Therefore the application of laserbased<br />

tools is just a logical consequence, as laser tools are known as<br />

precise and powerful machining tools.<br />

Laser Scribers for P1, P2, P3 cuts<br />

These laser systems are used for scribing of the thin-films of conductive<br />

and semi-conductive materials on large substrates to produce<br />

stripes of defined width parallel to the substrate´s long or<br />

short edge depending on the modules' cell orientation. The position<br />

of each P1, P2, and P3 scribe is shifted by a small distance in<br />

order to connect all sub cells serially to each other. To guarantee<br />

for minimal distances between P1 and P2 resp. P3 cuts both P2<br />

and P3 laser use a dynamic line tracking mechanism; this feature<br />

provides for optimized active cell areas and - in total - for high<br />

module efficiencies. The number and width of the individual sub<br />

cells are optimized for a maximum utilization of active module surface.<br />

The Scribing tools are programmable; to achieve sufficient<br />

throughput each Scribing tool is equipped with several pulsed<br />

lasers, and each laser beam is split into several cutting beams.<br />

In accordance with the layer composition each tool's laser<br />

wavelength is adapted; used laser wavelengths are 532 nm resp.<br />

1064 nm. Damage of underlying layers is avoided, which is of special<br />

importance for P2 and P3 cuts: Both cuts are not allowed to<br />

cut into the underlying TCO layer. All laser tools use a dynamic,<br />

active focusing for excellent scribing process<br />

Key features:<br />

Throughput > 60 substrates/h<br />

Module size up to 1200 x 1600 mm<br />

Scribing line width 35 - 70 m,<br />

Line-to-line distance 5 - 15 mm<br />

(adjustable per software setting)<br />

Multiple processing beams, depending<br />

on specific requirements<br />

Air bearings to guide laser axis‘<br />

Massive granite processing table<br />

for optimum accuracy<br />

Dynamic focusing (optional)<br />

Dynamic line tracking (optional)<br />

Integrated laser fumes exhaust<br />

and filtration system<br />

Integrated P1 and P2 input substrate cooling


<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Laser Edge Deletion tool<br />

The Edge Ablation Machine removes all deposited layers around<br />

the substrate with a programmable width on the substrate front<br />

side and - additionally - around its outer edges. Precision, high<br />

process speed and stability, and a residue-free processing are<br />

key for this machine.<br />

Key features:<br />

Nd-Y<strong>AG</strong> high-energy laser with scanner<br />

Laser wavelength 1030 - 1060 nm<br />

Programmable ablation widths in steps<br />

between 2 - 30 mm width<br />

Optional dynamic focusing<br />

Process integrated quality inspection<br />

Integrated laser fumes exhaust system<br />

All Laser tools are designed to comply with the <strong>Roth</strong> & <strong>Rau</strong> CTF<br />

Solar principle of delivering only environmental friendly tools, as<br />

also realized in the entire <strong>PRiMELiNE</strong> CdTe turnkey production line,<br />

which is designed to keep the "environmental footprint" as small<br />

as possible:<br />

All fab emissions are post-treated already at tool-level so that virtually<br />

no contaminated or hazardous substances can be released<br />

to the environment, and used processing fluids are recycled for<br />

minimal consumption values<br />

Turnkey Cluster<br />

<strong>PRiMELiNE</strong> CdTe Laser Cluster (80 MW)<br />

Project duration<br />

Cluster content<br />

12 months<br />

– Optimization of Scribing Pattern<br />

– Laser Scribing 1<br />

– Laser Scribing 2<br />

– Laser Scribing 3<br />

– Scribing Quality Monitoring Each<br />

– Substrate Temperature Control for Scribing 1 to 3<br />

– Automated focus control<br />

– Dynamic Scribing Distance Control for Scribing 2 and 3<br />

– Laser Edge Deletion<br />

– Exhaust Air Filtration Safety Housings<br />

– Other relevant EHS Provisions


<strong>PRiMELiNE</strong> CdTe Coating Cluster (80 MW)<br />

CdTe Thin Film PV Modules have been recognized as the markets<br />

most cost efficient solution for PV applications. To support cost<br />

efficient, proven processing, <strong>Roth</strong> & <strong>Rau</strong> CTF Solar offers processing<br />

clusters and tools for all CdTe customers worldwide that<br />

can be seamlessly integrated into new production lines as well<br />

as into existing fabrication lines. The <strong>Roth</strong> & <strong>Rau</strong> CTF Solar chosen<br />

cluster design provides to the customer specific process<br />

knowledge combined with suitable process equipment and processing<br />

materials, project management and equipment startup<br />

in order to enhance product quality and module efficiencies.<br />

All <strong>PRiMELiNE</strong> CdTe Clusters are capable of processing standard<br />

module sizes of 1200 x 1600 mm (other dimensions on request),<br />

with a throughput of > 60 modules per hour. Basis for the design<br />

of all <strong>PRiMELiNE</strong> CdTe Cluster Tools is the innovative yet proven<br />

<strong>PRiMELiNE</strong> CdTe Turnkey production line.<br />

The key process in manufacturing of CdTe PV modules is the deposition<br />

of the photo-active CdS (Cadmium Sulfide) and CdTe<br />

(Cadmium Telluride) layers onto the substrate. Module efficiency<br />

is mainly predetermined in these critical process steps. The<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar CSS (Closed Space Sublimation) Deposition<br />

Tool is a vacuum-based tool that incorporates many years of field<br />

proven deposition technology: Based on commercial scale coating<br />

equipment using this deposition technology CdTe cells of<br />

12,7% efficiency have been achieved.<br />

In the current generation of the CSS Tool many enhancements<br />

and design optimizations have been implemented, therefore deposition<br />

rates, film thickness uniformities, film qualities and tool<br />

reliability are among the highest within the market. The deposition<br />

process originally developed at the Batelle institute and producing<br />

the world-record CdTe cell efficiency, is performed in a vacuum<br />

atmosphere and at high temperatures (> 500 °C). The substrates<br />

are fed into the CSS Deposition Tool as a substrate band,<br />

transport speed is continuous at about 1.5 m/min. The layers are<br />

deposited at the bottom surface of the substrates by nucleation of<br />

CdS respectively CdTe vapours on the substrate surface. Due to<br />

its unique technology the current <strong>Roth</strong> & <strong>Rau</strong> CTF Solar deposition<br />

process is the far cleanest CdS / CdTe deposition technology<br />

available worldwide. Included in the CSS Deposition tool is an<br />

integrated cooling section that carefully cools the substrates to<br />

ambient temperature without introducing thermal stress and<br />

therefore contributing to long module lifetimes.<br />

Typical film thicknesses are 30 - 100 nm CdS, and 2 - 5 m CdTe.<br />

A major feature of the CSS deposition technology is - unlike films<br />

deposited with non-vacuum conditions - the formation of dense,<br />

non-porous films. Raw materials are utilized with > 95%, contributing<br />

to the low CoO of the CSS Deposition Tool. It operates<br />

fully automatic, it is programmable to achieve best process<br />

results on various types of substrates.<br />

The deposition zone is contained by a special exhausted and<br />

filtered enclosure; hazardous materials are handled exclusively<br />

within this enclosure, additionally the entire tool is contained<br />

in a second enclosure, providing for an EHS-proof design. This<br />

feature adds to the <strong>Roth</strong> & <strong>Rau</strong> CTF Solar principle of delivering<br />

only environmental friendly tools, as also realized in the entire<br />

<strong>PRiMELiNE</strong> CdTe turnkey production line, which is designed to keep<br />

the "environmental footprint" as small as possible: All fab emissions<br />

are post-treated already at tool-level so that virtually no<br />

contaminated or hazardous substances can be released to the<br />

environment, and used processing fluids are recycled for minimal<br />

consumption values.<br />

Key features:<br />

Short substrate edge leading<br />

Cycle time < 60 s<br />

Deposition temperature app. 600°C<br />

Integrated exhaust filtration<br />

Integrated heating and cooling zones<br />

Vacuum pumps<br />

Deposition zone for sequential deposition<br />

of both CdS and CdTe<br />

Low fab facility requirements<br />

Double enclosure design providing for<br />

high ESH standards.


<strong>PRiMELiNE</strong> CdTe Activation Cluster (80 MW)<br />

CdTe Thin Film PV Modules have been recognized as the markets<br />

most cost efficient solution for PV applications. Various CdTe deposition<br />

processes have been established, whereas the basic processing<br />

around the CdS / CdTe layering is rather similar in all<br />

CdTe production lines. To support cost efficient, proven processing<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar offers processing clusters for all CdTe<br />

customers worldwide that can be seamlessly integrated into<br />

new production lines as well as into existing fabrication lines. The<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar chosen cluster design provides to the customer<br />

specific process knowledge combined with suitable<br />

process equipment and processing materials, project management<br />

and equipment startup in order to enhance product quality<br />

and module efficiencies. All <strong>PRiMELiNE</strong> CdTe Clusters are capable<br />

of processing standard module sizes of 1200 x 1600 mm (other<br />

dimensions on request), with a throughput of > 60 modules per<br />

hour. Basis for the design of all <strong>PRiMELiNE</strong> CdTe Cluster Tools is the<br />

innovative yet proven <strong>PRiMELiNE</strong> CdTe Turnkey production line. The<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar principle of delivering only environmental<br />

friendly tools, as realized in the entire <strong>PRiMELiNE</strong> CdTe turnkey production<br />

line, which is designed to keep the "environmental footprint"<br />

as small as possible, applies also to the<br />

For a seamless integration into existing production lines the<br />

<strong>PRiMELiNE</strong> CdTe Activation Cluster uses a standardized SECS/GEM<br />

protocol, substrate-ID-tracking (virtual / DMC reader), and adaptable<br />

horizontal communication with adjacent process tools.<br />

Nevertheless, the cluster can be operated also fully autonomous,<br />

with recipe administration on Cluster level.<br />

In detail, the <strong>PRiMELiNE</strong> CdTe Activation Cluster consists of a Coating<br />

Machine, an Activation Furnace, and a Cascade Washing/Cascade<br />

Rinsing tool.<br />

<strong>Roth</strong> & <strong>Rau</strong> Activation Cluster<br />

All fab emissions are post-treated already at tool-level so that virtually<br />

no contaminated or hazardous substances can be released<br />

to the environment. Also, the entire Cluster is enclosed with a<br />

safety housing to contain all hazardous substances and to avoid<br />

any contamination of the remaining production environment. A very<br />

critical step in processing of CdTe PV-modules is the activation of<br />

the CdS / CdTe layer stack with its target to improve the physical as<br />

well as electro-optical properties of the CdS / CdTe stack. Here, as<br />

also applied by leading CdTe solar module producers, a dedicated<br />

CdCl 2 activation, combining a CdCl 2 deposition plus a subsequent<br />

heat treatment, is used. The <strong>Roth</strong> & <strong>Rau</strong> CTF Solar processing solution<br />

provides all necessary tools plus appropriate, perfectly harmonized<br />

materials and process selection for a cost efficient activation<br />

and enhanced module efficiency.<br />

Therefore the <strong>Roth</strong> & <strong>Rau</strong> CTF Solar Activation Cluster can be a reliable<br />

retrofit for tools in existing production lines while adding<br />

improved module performance for shorter payback times of investments.<br />

However, together with the <strong>Roth</strong> & <strong>Rau</strong> CSS type of CdS /<br />

CdTe films and its characteristic properties the Activation Cluster<br />

tool offers a perfectly harmonized chemical activation process.<br />

Coating Machine<br />

During fully automatic processing within the coating tool an<br />

aqueous film containing dissolved CdCl 2 is applied in a defined<br />

thickness on the surface of the glass pane utilizing a specially<br />

engineered roller-coating system. Adding a specially formulated<br />

mixture to the coating solution allows for an excellent<br />

uniformity of the liquid film over the entire surface by improving<br />

the specific wetting characteristics. The preparation of the<br />

coating solution is done in a dedicated chemical cabinet next to<br />

the core process modules of the tool taking care of the specific<br />

handling precautions of the used materials. After successfully<br />

depositing the solution onto the substrate a drying step safely<br />

removes all liquid remnants while the CdCl 2 remains on top of<br />

the CdTe layer. As part of the <strong>Roth</strong> & <strong>Rau</strong> CTF Solar Activation<br />

Cluster all necessary peripherals to prevent the release of hazardous<br />

liquids and gases are included. A closed loop DI water<br />

supply is available as an option to account for low operating<br />

costs and low factory facility requirements.


<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Key features:<br />

Short substrate edge leading<br />

Layer stack facing upwards<br />

Cycle time < 60 s<br />

Integrated substrate heating<br />

Selectable composition of CdCl 2 -solution<br />

Closed-loop waste water reconditioning<br />

Integrated exhaust filtration<br />

Safety housing<br />

Automatic cleaning routines for<br />

easy maintenance..<br />

Cascade Washing/ Cascade Rinsing tool<br />

After deposition and tempering of the CdCl 2 layer all remaining<br />

residues are removed in a cleaning step so that the substrates<br />

can be processed in subsequent process steps without any<br />

risk of CdCl 2 contamination to tools and operators. The cascade<br />

washing machine is the final tool within performing the activation<br />

process.<br />

DI-water is applied stepwise on all substrate surfaces utilizing<br />

the eponymous "cascade"-setup of cleaning modules. The procedure<br />

is performed without adding any chemical additives to the<br />

rinse water. After removal of the CdCl 2 layer the substrates are<br />

automatically transferred to an integrated drying section where<br />

liquid film is evaporated. All used DI-water is collected and recycled<br />

on tool level.<br />

Activation Furnace<br />

In close combination with the coating tool the activation furnace<br />

supports the restructuring of the CdS / CdTe layer stack.<br />

After CdCl 2 coating the substrate enters the furnace where<br />

the glass pane is heated up to a defined and well controlled<br />

activation temperature.<br />

Temperature and transport speed are adjustable. Subsequent<br />

to the tempering process the substrate is cooled down carefully<br />

in order to avoid that thermal stress remains inside the<br />

glass. All mentioned steps are performed under standard<br />

atmospheric conditions.<br />

Key features:<br />

Long substrate edge leading<br />

Layer stack facing upwards<br />

Cycle time < 60 s<br />

Atmospheric process<br />

Activation temperature @ app. 400 °C<br />

Activation time adjustable between 10 - 20 min<br />

Integrated cooling tunnel<br />

Integrated filtration of exhaust gases - no special<br />

contaminated exhaust duct system necessary<br />

Safety housing


<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Key features:<br />

Short substrate edge leading<br />

Chemical layer facing upwards<br />

Cycle times < 60 s<br />

Integrated recycling of used rinsing DI water<br />

No chemical additives needed<br />

Integrated dryer<br />

Safety housing<br />

Turnkey Cluster<br />

<strong>PRiMELiNE</strong> CdTe Coating Cluster plus<br />

<strong>PRiMELiNE</strong> CdTe Activation Cluster (80 MW)<br />

Project duration<br />

14 months<br />

Cluster content<br />

Coating Cluster<br />

– CdS/CdTe Coating (CSS)<br />

– Substrate Cooling Section<br />

– Vacuum System<br />

– Closed Loop Water cooling System<br />

– Safety Housings<br />

Activation Cluster<br />

– Conveyor<br />

– Conveyor EX, Conveyor EX SEL, Conveyor EX SEL Inspection,<br />

Conveyor EX LEL, Conveyor LEL, Conveyor SEL,<br />

Conveyor SEL Inspection<br />

– Activation Coating Unit<br />

– Rotary Table EX<br />

– Corner Transfer EX<br />

– Activation Furnace<br />

– Corner Transfer<br />

– Rotary Table<br />

– Cascade Rinsing + Closed Loop DI Water Regeneration<br />

– Safety Housings<br />

– Relevant EHS provisions<br />

– EHS Equipment


<strong>PRiMELiNE</strong> CdTe Back-Contact Cluster (80 MW)<br />

CdTe Thin Film PV Modules have been recognized as the markets<br />

most cost efficient solution for PV applications. To support cost<br />

efficient, proven processing <strong>Roth</strong> & <strong>Rau</strong> CTF Solar offers processing<br />

clusters and tools for all CdTe customers worldwide that<br />

can be seamlessly integrated into new production lines as well as<br />

into existing fabrication lines. The <strong>Roth</strong> & <strong>Rau</strong> CTF Solar chosen<br />

cluster design provides to the customer specific process knowledge<br />

combined with suitable process equipment and processing<br />

materials, project management and equipment startup in<br />

order to enhance product quality and module efficiencies. All<br />

<strong>PRiMELiNE</strong> CdTe Clusters are capable of processing standard module<br />

sizes of 1200 x 1600 mm (other dimensions on request), with<br />

a throughput of up to 70 modules per hour. Basis for the design<br />

of all <strong>PRiMELiNE</strong> CdTe Cluster Tools is the innovative yet proven<br />

<strong>PRiMELiNE</strong> CdTe Turnkey production line.<br />

A major process in manufacturing of CdTe PV modules is the formation<br />

of the back contact which allows for efficient collection of<br />

generated PV current. The <strong>Roth</strong> & <strong>Rau</strong> CTF Solar Back Contact<br />

cluster can be retrofitted for tools in existing production lines<br />

while adding improved module performance for shorter payback<br />

times of investments.<br />

In order to achieve high CdTe PV Module energy efficiencies,<br />

a low resistance back contact needs to be integrated into the<br />

CdTe Solar Module. This process step requires state-of-the-art<br />

know-how of CdTe surface preparation, back contact material<br />

selection, deposition technology, and equipment design to<br />

integrate the metallic back contact in the design of the CdTe PV<br />

module. In consequence, all sub-processes within this cluster<br />

are carefully adapted to each other and individually optimized<br />

with regard to etching rate, layer sequence, layer thickness,<br />

process homogeneity.<br />

The <strong>Roth</strong> & <strong>Rau</strong> CTF Solar Back-Contact processing provides for<br />

one of the lowest available film resistivity that enables high solar<br />

module energy efficiencies, high fill factor, long term stability, and<br />

compatibility with subsequent backend processes such as bus<br />

bar application and lamination.<br />

For a seamless integration into existing production lines the<br />

<strong>PRiMELiNE</strong> CdTe Back Contact Cluster uses a standardized SECS/<br />

GEM protocol, substrate-ID-tracking (virtual / DMC reader), and<br />

adaptable horizontal communication with adjacent process tools.<br />

Nevertheless, the cluster can be operated also fully autonomous,<br />

with recipe administration on Cluster level. All sub-processes are<br />

decoupled by a substrat buffer stations which allow for scheduled<br />

maintenance of single tools without interruption of production of<br />

other cluster tools. This provides for a high cluster uptime and a<br />

flexible maintenance planning.<br />

In detail, the <strong>PRiMELiNE</strong> CdTe Back Contact Cluster consists of a<br />

CdTe Surface Preparation tool and a Metal Contact Deposition tool.<br />

CdTe Surface Preparation Tool<br />

The surface preparation consists of an etching step to prepare<br />

the CdS / CdTe layer stack before it is fed into the metal deposition<br />

equipment. The target of the preparation process is to establish<br />

a p+-doped layer of defined thickness on top of the CdTe<br />

surface by removing the existing Cd while simultaneously enrichening<br />

Te by a special etching process. Any liquid residues are<br />

removed by subsequent rinsing of the substrate with DI water.<br />

Set up of the etching solution is done in a chemical cabinet located<br />

next to the core process modules of the machine. Drained<br />

etching solution is collected and treated in a waste water subsystem.<br />

Traces of hazardous gases that may be generated during<br />

processing of the substrate are safely exhausted to a customized<br />

filtration unit.<br />

Key features:<br />

Short substrate edge leading<br />

Chemical layer facing upwards<br />

Cycle time < 60 s<br />

Selectable composition of etchingsolution<br />

Actively controlled etching rate and composition<br />

of etching solution with automatic compensation<br />

for selective consumption of components<br />

Integrated substrate rinsing and drying, integrated<br />

exhaust filtration<br />

Optionally available with a closed loop for flushing<br />

DI-water - no external DI-water supply required<br />

No release of contaminated waste water


<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Metal Contact Deposition tool<br />

After chemical preparation the substrates are automatically<br />

transferred into the metal contact deposition tool. The back contact<br />

processing is accomplished with a dedicated PVD process,<br />

within this process several metal materials can be sputtered onto<br />

the CdS / CdTe layer stack in order to optimize sheet resistance of<br />

the sputtered layers. Sputtered layer composition and processing<br />

conditions may be optimized depending on customer requirements.<br />

The metal contact deposition tool is explicitly designed for exceptional<br />

high production performance with long uninterrupted<br />

sputtering times and a synchronized sputter target lifetime<br />

with optimized preventive maintenance intervals to achieve high<br />

tool uptime.<br />

Key features:<br />

Short substrate edge leading,<br />

layer stack facing upwards<br />

Cycle time < 60 sec.<br />

Long uninterrupted sputter campaigns<br />

High process stability and accuracy<br />

High yield, high reliability, high availability<br />

Maintenance friendly<br />

Vacuum pumps included<br />

Integrated substrate heating for hot sputtering<br />

Integrated filtration of exhaust gases<br />

Integrated cooling zone<br />

All Back Contact Deposition tools are designed to comply with the<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar principle of delivering only environmental<br />

friendly tools, as also realized in the entire <strong>PRiMELiNE</strong> CdTe turnkey<br />

production line, which is designed to keep the "environmental<br />

footprint" as small as possible: All fab emissions are post-treated<br />

already at tool-level so that virtually no contaminated or hazardous<br />

substances can be released to the environment, and used<br />

processing fluids are recycled for minimal consumption values.<br />

Turnkey Cluster<br />

<strong>PRiMELiNE</strong> CdTe Back-Contact Cluster (80 MW)<br />

Project duration<br />

Cluster content<br />

13 months<br />

– Etching station with closed loop DI-water<br />

supply and wastewater treatment<br />

– 2 conveyors<br />

– Buffer station incl. 3 storage boxes<br />

– Back-contact magnetron sputtering machine<br />

– Substrate cooling section<br />

– EHS equipment


<strong>PRiMELiNE</strong> CdTe Back-End Cluster (80 MW)<br />

CdTe Thin Film PV Modules have been recognized as the markets<br />

most cost efficient solution for PV applications. To support cost<br />

efficient and proven processing <strong>Roth</strong> & <strong>Rau</strong> CTF Solar offers processing<br />

clusters and tools for all thinfilm PV customers worldwide<br />

that can be seamlessly integrated into new production lines as<br />

well as into existing fabrication lines. The <strong>Roth</strong> & <strong>Rau</strong> CTF Solar<br />

chosen cluster design provides to the customer specific process<br />

knowledge combined with suitable process equipment and<br />

processing materials, project management and equipment startup<br />

in order to enhance product quality and module efficiencies.<br />

All <strong>PRiMELiNE</strong> CdTe Clusters are capable of processing standard<br />

module sizes of 1200 x 1600 mm (other dimensions on request),<br />

with a throughput of > 60 modules per hour. Basis for the design<br />

of all <strong>PRiMELiNE</strong> CdTe Cluster Tools is the innovative yet proven<br />

<strong>PRiMELiNE</strong> CdTe Turnkey production line.<br />

The backend processing of PV modules is crucial for achieving<br />

high module reliability and lifetime. Especially module certification<br />

acc. to DIN EN 61464 and DIN-EN 61740-1/2 is highly<br />

dependent on the overall quality of the Back-End process. The<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar Back-End Cluster provides for a well engineered<br />

total solution, including material selection, process know<br />

how, and equipment specification and therefore ensures for a<br />

"glitch-free" product certification and PV module lifetimes > 20<br />

years. The <strong>PRiMELiNE</strong> CdTe Backend Cluster is specifically designed<br />

for CdTe photovoltaic modules. To provide for a balanced<br />

investment cost optimization a mix of automatic and manual processes<br />

is chosen.<br />

The <strong>Roth</strong> & <strong>Rau</strong> CTF Solar Back-End Cluster comprises a complex<br />

sequence of module processing tools: Module test, busbar application,<br />

edge sealing, marriage (e.g. application of encapsulant foil<br />

plus layering of backside glass), lamination, junction box application,<br />

and final testing (flasher, wet leakage, and metrology) plus<br />

labeling. An optimized, integrated substrate buffering concept<br />

(buffer station with exchangeable storage boxes, FILO buffers,<br />

loading stations) is integrated into the cluster design which<br />

allows for flexible maintenance schedules and reduced impact of<br />

unscheduled equipment events. Of course all intermediate substrate<br />

transport devices necessary for operation of the entire<br />

Back-End are included in the Cluster design.<br />

For a seamless integration into existing production lines the<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar Back-End Cluster uses a standardized<br />

SECS/GEM protocol, substrate-ID-tracking (virtual / DMC reader),<br />

and adaptable horizontal communication with adjacent process<br />

tools.<br />

The Module Tester yields a Go/No Go decision and determines if<br />

the module is worth applying the backend process. This is accomplished<br />

by an automatic I-V-curve tracing when applying light to<br />

the module and allows for a calculation of most electrical key<br />

parameters ( Isc, V0C, Pmax, FF, Rserieal, Rparallel). The Module<br />

Tester uses state-of-the-art LED lighting which allows for long<br />

uptimes and reliable functionality.<br />

In the Busbar Application machine the module's sub cells are<br />

connected via a conductive, low-loss Cu-ribbon and a conductive<br />

silver paste. Alternatively soldering or ultrasonic welding<br />

methods can be used, depending on the specific physical properties<br />

of the photovoltaic layers. All components in this process are<br />

carefully selected with special attention to long-term reliability<br />

of the module.<br />

The Edges Sealing tool applies an UV-stable and highly resistive<br />

string of sealant, variable in width and thickness, in an extrusion<br />

process. Other than in available Back-End processes this special<br />

process serves as an additional barrier against humidity penetrating<br />

into the module and is therefore part of the "dual component"<br />

sealing solution. <strong>Roth</strong> & <strong>Rau</strong> CTF Solar delivers to its customers<br />

an optimized and tested combination from equipment, material,<br />

and application process for an unsurpassed module lifetime.


<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

After mounting of busbars and application of edge sealant<br />

the processed substrate, the washed and cleaned back glass,<br />

and the encapsulant foil are mounted together to a stacked sandwich.<br />

This fully automated process tool is called "marriage".<br />

The marriage station is designed to process glass and encapsulant<br />

foil for module sizes up to 1200 x 1600 mm; encapsulant foil<br />

material may be EVA or PVB, which is fed to the machine from<br />

rolls and then cut to the appropriate size and precisely placed<br />

onto the substrate. Encapsulant foil size and positioning with<br />

respect to the edge sealant "frame" is essential for a good subsequent<br />

lamination process result.<br />

The Laminator forms a mechanical stable module from the glassfoil-glass<br />

stack created in the process before, that can withstand<br />

all environmental effects that a PV module is exposed to. This is<br />

accomplished by applying heat and pressure to the stack for a<br />

defined time. Temperatures are adjustable and precisely controllable,<br />

depending on the encapsulant foil material. Pressure is<br />

adjusted in order to obtain a bubble-free, homogenously polymerized<br />

encapsulant material. Included in the scope of delivery is the<br />

integrated cooling press to cool down the modules to temperatures<br />

that allow safe subsequent processing.<br />

After lamination the PV module is almost ready, only the specially<br />

adapted junction box needs to be connected to the busbar on the<br />

module backside. This process step can be executed either manually<br />

or fully automatic, with crimp or soldering connection to the<br />

busbar, with adhesive pads, hot melts or silicone adhesives, with<br />

metal or polymer junction boxes: Obviously, all customer requirements<br />

can be fully met by the flexible process station design.<br />

Final testing consists of a Flasher, a Wet Leakage Tester, and a<br />

Visual Inspection Station. Flashing simulates PV module output at<br />

sunlike illumination (STC, 1000 W/m 2 , AM 1.5 global) and therefore<br />

enables determination of module output parameters Pmax, Impp,<br />

Umpp, Isc, Uoc, and - finally - the module efficiency . Design of the<br />

Flasher may be either horizontally or vertically, depending on the<br />

individual requirements at customer's site.<br />

A Wet Leakage Test (= High Potential Test) ensures proper electrical<br />

insulation of the module. UL1703 and IEC61730 are the basic<br />

standards, covering requirements for safety and construction of<br />

photovoltaic modules to address prevention of electrical shock<br />

and fire hazards. These two base standards are to be used in conjunction<br />

with IEC61646. Only modules that pass this test are<br />

considered as "sellable modules" and will be labeled according<br />

to its output power. Label printer and software connection to<br />

Flasher and Wet Leakage tester is included in the Backend Cluster<br />

design. Metrology tools utilized within the <strong>Roth</strong> & <strong>Rau</strong> CTF Solar<br />

Back-End Cluster comprise of a back glass inspection (broken<br />

corners, chipping, and edge cracks) and a module inspection<br />

(lamination bubbles, lamination inclusions, glass breakage). All<br />

inspections are fully automatic, incorporating image recognition<br />

and analysis. Optionally, additional inspection methods (electro<br />

luminescence, photo luminescence) can be integrated in the<br />

Back-End Cluster layout.<br />

Key features:<br />

Cluster output > 60 substrates / h<br />

Integrated substrate transport system<br />

Short substrate edge leading<br />

Integrated inspection and metrology (adaptable)<br />

Flexible process design (adaptable to various<br />

encapsulant foil materials<br />

Junction box designs, process/throughput<br />

requirements at lamination<br />

Flasher mechanical design),<br />

Xenon lamp flashing<br />

Automatic module labeling<br />

Flexible and adaptable MES connection<br />

Integrated cooling press at the laminator<br />

All Back-End tools are designed to comply with the <strong>Roth</strong> & <strong>Rau</strong><br />

CTF Solar principle of delivering only environmental friendly tools,<br />

as also realized in the entire <strong>PRiMELiNE</strong> CdTe Turnkey production<br />

line, which is designed to keep the "environmental footprint" as<br />

small as possible: All fab emissions are post-treated already at<br />

tool-level so that virtually no contaminated or hazardous substances<br />

can be released to the environment, and used processing<br />

fluids are recycled for minimal consumption values.


Turnkey Cluster<br />

<strong>PRiMELiNE</strong> CdTe Back-End Cluster (80 MW)<br />

Project duration<br />

Cluster content<br />

13 months<br />

– 2 Buffer Stations<br />

– Bus bar application<br />

– All necessary substrate transport<br />

(14 conveyor SEL, 6 conveyor EX SEL, rotary table)<br />

– Edge sealing (butyl)<br />

– 2 FILO buffer 30 subs<br />

– Back glass washer plus closed loop wastewater treatment<br />

– Back glass loading station<br />

– Back glass inspections<br />

– Corner transfer<br />

– Buffer station incl. 3 storage boxes<br />

– Marriage station + foil loader + slicing<br />

– Lamination loading<br />

(10 corner transfers, 7 conveyor LEL, 2 rotary tables)<br />

– Laminators (including cooling press)<br />

– Lamination unloading (portal crane)<br />

– FILO buffer 50 subs<br />

– Automated lamination quality inspection<br />

– Manual junction box mounting station<br />

– High potential test<br />

– Flash tester<br />

– Labeling<br />

– Unloading station for finished modules<br />

– EHS equipment


<strong>PRiMELiNE</strong><br />

Turnkey Solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Turnkey Cluster<br />

<strong>PRiMELiNE</strong> CdTe Automation and Metrology Cluster (80 MW) and MES<br />

Project duration<br />

Cluster content<br />

14 months<br />

– Substrate Marking<br />

– Substrate Tracking System<br />

– Substrate Transport System<br />

– Substrate-Inspection<br />

– x Buffer Substrate Stations<br />

– Buffer- & Transport Boxes for 1.400 plus substrates<br />

– Cooling sections<br />

– Heating sections<br />

– PV Function Check<br />

– MES and Line integration services<br />

Turnkey Cluster<br />

<strong>PRiMELiNE</strong> CdTe Ramp-Up Cluster<br />

Project duration<br />

9 months<br />

Cluster content<br />

– Shipping<br />

– Data pack for building permit<br />

– EHS data pack<br />

– Move-in/ Move-in Project Management<br />

– Turnkey Project Management<br />

– Full service Ramp-up<br />

– Staff training<br />

– EHS Consulting<br />

– Material Management Consulting<br />

– Raw Materials and Component Specification<br />

– Staff training (“classroom” and “on the job”)<br />

– Total Annual Output and Efficiency Warranty<br />

Turnkey Cluster<br />

Total <strong>PRiMELiNE</strong> CdTe Cluster + Service /<br />

Complete Turnkey Line 80 MW<br />

Project duration<br />

24 months


<strong>PRiMELiNE</strong> CdTe - Turnkey solutions by <strong>Roth</strong> & <strong>Rau</strong><br />

Turnkey solution features<br />

All equipment from one hand<br />

Developing new generations of turnkey solutions<br />

The best developed sales and service network<br />

in photovoltaics worldwide<br />

<strong>Roth</strong> & <strong>Rau</strong> CTF Solar is the first supplier of<br />

complete production lines and cluster tools<br />

for cadmium-telluride thin film solar modules<br />

Our Scope<br />

Customer‘s Benefits<br />

Integrated equipment, technology and service package<br />

Factory layout assistance<br />

Equipment installation and start-up procedure<br />

Technology transfer and production<br />

Ramp-up support<br />

Training of the staff<br />

After sales service and support in spare part logistics<br />

Quick mass production launch<br />

High technology level<br />

Low running cost<br />

High marketing acceptance for the product<br />

(20% market share in world PV market)<br />

Esthetical appearance<br />

Very good performances at diffuse sunlight<br />

and high temperatures<br />

High marketing acceptance for the product (20% market share in world PV market)<br />

Esthetical appearance<br />

Very good performances at diffuse sunlight and high temperatures


<strong>Roth</strong> & <strong>Rau</strong> CTF Solar GmbH<br />

An der Baumschule 6-8<br />

09337 Hohenstein-Ernstthal<br />

Germany<br />

Phone +49 3723 66 85 0<br />

Fax +49 3723 66 85 100<br />

E-mail info@roth-rau.com<br />

www.roth-rau.com

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