PRiMELiNE - Roth & Rau AG

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PRiMELiNE Turnkey Solutions by Roth & Rau Laser Edge Deletion tool The Edge Ablation Machine removes all deposited layers around the substrate with a programmable width on the substrate front side and - additionally - around its outer edges. Precision, high process speed and stability, and a residue-free processing are key for this machine. Key features: Nd-YAG high-energy laser with scanner Laser wavelength 1030 - 1060 nm Programmable ablation widths in steps between 2 - 30 mm width Optional dynamic focusing Process integrated quality inspection Integrated laser fumes exhaust system All Laser tools are designed to comply with the Roth & Rau CTF Solar principle of delivering only environmental friendly tools, as also realized in the entire PRiMELiNE CdTe turnkey production line, which is designed to keep the "environmental footprint" as small as possible: All fab emissions are post-treated already at tool-level so that virtually no contaminated or hazardous substances can be released to the environment, and used processing fluids are recycled for minimal consumption values Turnkey Cluster PRiMELiNE CdTe Laser Cluster (80 MW) Project duration Cluster content 12 months – Optimization of Scribing Pattern – Laser Scribing 1 – Laser Scribing 2 – Laser Scribing 3 – Scribing Quality Monitoring Each – Substrate Temperature Control for Scribing 1 to 3 – Automated focus control – Dynamic Scribing Distance Control for Scribing 2 and 3 – Laser Edge Deletion – Exhaust Air Filtration Safety Housings – Other relevant EHS Provisions
PRiMELiNE CdTe Coating Cluster (80 MW) CdTe Thin Film PV Modules have been recognized as the markets most cost efficient solution for PV applications. To support cost efficient, proven processing, Roth & Rau CTF Solar offers processing clusters and tools for all CdTe customers worldwide that can be seamlessly integrated into new production lines as well as into existing fabrication lines. The Roth & Rau CTF Solar chosen cluster design provides to the customer specific process knowledge combined with suitable process equipment and processing materials, project management and equipment startup in order to enhance product quality and module efficiencies. All PRiMELiNE CdTe Clusters are capable of processing standard module sizes of 1200 x 1600 mm (other dimensions on request), with a throughput of > 60 modules per hour. Basis for the design of all PRiMELiNE CdTe Cluster Tools is the innovative yet proven PRiMELiNE CdTe Turnkey production line. The key process in manufacturing of CdTe PV modules is the deposition of the photo-active CdS (Cadmium Sulfide) and CdTe (Cadmium Telluride) layers onto the substrate. Module efficiency is mainly predetermined in these critical process steps. The Roth & Rau CTF Solar CSS (Closed Space Sublimation) Deposition Tool is a vacuum-based tool that incorporates many years of field proven deposition technology: Based on commercial scale coating equipment using this deposition technology CdTe cells of 12,7% efficiency have been achieved. In the current generation of the CSS Tool many enhancements and design optimizations have been implemented, therefore deposition rates, film thickness uniformities, film qualities and tool reliability are among the highest within the market. The deposition process originally developed at the Batelle institute and producing the world-record CdTe cell efficiency, is performed in a vacuum atmosphere and at high temperatures (> 500 °C). The substrates are fed into the CSS Deposition Tool as a substrate band, transport speed is continuous at about 1.5 m/min. The layers are deposited at the bottom surface of the substrates by nucleation of CdS respectively CdTe vapours on the substrate surface. Due to its unique technology the current Roth & Rau CTF Solar deposition process is the far cleanest CdS / CdTe deposition technology available worldwide. Included in the CSS Deposition tool is an integrated cooling section that carefully cools the substrates to ambient temperature without introducing thermal stress and therefore contributing to long module lifetimes. Typical film thicknesses are 30 - 100 nm CdS, and 2 - 5 m CdTe. A major feature of the CSS deposition technology is - unlike films deposited with non-vacuum conditions - the formation of dense, non-porous films. Raw materials are utilized with > 95%, contributing to the low CoO of the CSS Deposition Tool. It operates fully automatic, it is programmable to achieve best process results on various types of substrates. The deposition zone is contained by a special exhausted and filtered enclosure; hazardous materials are handled exclusively within this enclosure, additionally the entire tool is contained in a second enclosure, providing for an EHS-proof design. This feature adds to the Roth & Rau CTF Solar principle of delivering only environmental friendly tools, as also realized in the entire PRiMELiNE CdTe turnkey production line, which is designed to keep the "environmental footprint" as small as possible: All fab emissions are post-treated already at tool-level so that virtually no contaminated or hazardous substances can be released to the environment, and used processing fluids are recycled for minimal consumption values. Key features: Short substrate edge leading Cycle time < 60 s Deposition temperature app. 600°C Integrated exhaust filtration Integrated heating and cooling zones Vacuum pumps Deposition zone for sequential deposition of both CdS and CdTe Low fab facility requirements Double enclosure design providing for high ESH standards.
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PRiMELiNE - Roth & Rau AG

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