PRiMELiNE - Roth & Rau AG

PRiMELiNE CdTe Coating Cluster (80 MW)
CdTe Thin Film PV Modules have been recognized as the markets
most cost efficient solution for PV applications. To support cost
efficient, proven processing, Roth & Rau CTF Solar offers processing
clusters and tools for all CdTe customers worldwide that
can be seamlessly integrated into new production lines as well
as into existing fabrication lines. The Roth & Rau CTF Solar chosen
cluster design provides to the customer specific process
knowledge combined with suitable process equipment and processing
materials, project management and equipment startup
in order to enhance product quality and module efficiencies.
All PRiMELiNE CdTe Clusters are capable of processing standard
module sizes of 1200 x 1600 mm (other dimensions on request),
with a throughput of > 60 modules per hour. Basis for the design
of all PRiMELiNE CdTe Cluster Tools is the innovative yet proven
PRiMELiNE CdTe Turnkey production line.
The key process in manufacturing of CdTe PV modules is the deposition
of the photo-active CdS (Cadmium Sulfide) and CdTe
(Cadmium Telluride) layers onto the substrate. Module efficiency
is mainly predetermined in these critical process steps. The
Roth & Rau CTF Solar CSS (Closed Space Sublimation) Deposition
Tool is a vacuum-based tool that incorporates many years of field
proven deposition technology: Based on commercial scale coating
equipment using this deposition technology CdTe cells of
12,7% efficiency have been achieved.
In the current generation of the CSS Tool many enhancements
and design optimizations have been implemented, therefore deposition
rates, film thickness uniformities, film qualities and tool
reliability are among the highest within the market. The deposition
process originally developed at the Batelle institute and producing
the world-record CdTe cell efficiency, is performed in a vacuum
atmosphere and at high temperatures (> 500 °C). The substrates
are fed into the CSS Deposition Tool as a substrate band,
transport speed is continuous at about 1.5 m/min. The layers are
deposited at the bottom surface of the substrates by nucleation of
CdS respectively CdTe vapours on the substrate surface. Due to
its unique technology the current Roth & Rau CTF Solar deposition
process is the far cleanest CdS / CdTe deposition technology
available worldwide. Included in the CSS Deposition tool is an
integrated cooling section that carefully cools the substrates to
ambient temperature without introducing thermal stress and
therefore contributing to long module lifetimes.
Typical film thicknesses are 30 - 100 nm CdS, and 2 - 5 m CdTe.
A major feature of the CSS deposition technology is - unlike films
deposited with non-vacuum conditions - the formation of dense,
non-porous films. Raw materials are utilized with > 95%, contributing
to the low CoO of the CSS Deposition Tool. It operates
fully automatic, it is programmable to achieve best process
results on various types of substrates.
The deposition zone is contained by a special exhausted and
filtered enclosure; hazardous materials are handled exclusively
within this enclosure, additionally the entire tool is contained
in a second enclosure, providing for an EHS-proof design. This
feature adds to the Roth & Rau CTF Solar principle of delivering
only environmental friendly tools, as also realized in the entire
PRiMELiNE CdTe turnkey production line, which is designed to keep
the "environmental footprint" as small as possible: All fab emissions
are post-treated already at tool-level so that virtually no
contaminated or hazardous substances can be released to the
environment, and used processing fluids are recycled for minimal
consumption values.
Key features:
Short substrate edge leading
Cycle time < 60 s
Deposition temperature app. 600°C
Integrated exhaust filtration
Integrated heating and cooling zones
Vacuum pumps
Deposition zone for sequential deposition
of both CdS and CdTe
Low fab facility requirements
Double enclosure design providing for
high ESH standards.